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ZnO/Au/Cr coated Si substrate ,4"x0.525 mm,1sp P-type B-doped,(ZnO=150nm,Au=150nm,Cr=20-40nm)

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Item Number: ZnO/Au/Cr on Si-100D0525C1-US

Silicon Wafer Specifications:

  • Film:         ZnO/Au/Cr coated Si substrate ,4"x0.525 mm,1sp  P-type B-doped,
      • ZnO =150 nm ,ZnO film: c-axis, medium (001) orientation  
      • Au/Cr film: highly (111) orientation  Au=150nm    Cr(Glue layer)=20-40nm
      • Si(100) P type B doped ~525 um Prime Grade
  • Resistivity:                  1-10 
  • Substrate Size:            4" diameter +/- 0.5 mm x 0.5 mm
  • Polish:                        one side polished
  • Surface roughness:      < 20 A RMS
  • Maximum Thermal Budget of Pt film: 250 degree C

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