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ZnO/Pt/Ti coated Si wafer ,4"x0.525mm,1sp P-type B-doped,( ZnO=150nm ,Pt=150nm Ti=20-40nm)

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Item Number: ZnO/Pt/Ti coated Si-100D0525C1-US

Silicon Wafer Specifications:

  • Film:         ZnO/Pt/Ti   thin film on Si (100) (P-type) substrate ,4"x0.525mm,1sp
      • ZnO=150nm,  ZnO film: c-axis, medium (001) orientation 
      •  Pt/Ti film: highly (111) orientation    Pt=150nm  Ti( Glue layer)=20-40 nm
  • Resistivity:                  1-10
  • Substrate Size:            4" diameter +/- 0.5 mm x 0.525 mm
  • Polish:                        one side polished
  • Surface roughness:      < 20 A RMS
  • Maximum Thermal Budget of Pt film: ~750 degree C / 1 hr

  • Optional:  you may need tool below to handle the wafer ( click picture to order )

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