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RTP Tube Furnace with 4" Quartz Tube & and Three Channels Gas Flowmeter and Vacuum Pump (up to 10-3 torr at 1100C) - EQ-RTP-1000-LV3C
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Click to enlarge
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In stock
Item Number: EQ-RTP-1000-LV3C
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EQ-RTP1000-LV3C is 4" I.D RTP (rapid thermal processing) tube furnace with three flowmeters and one machanical pump up to 10-3 torr vacuum. It is designed for annealing semiconductor wafer & solar cell or any sample up to 3" diameter. EQ-RTP1000-LV3C is heated by 10KW halogen light with max. 120oC/second heating rate. 50 segment precision temperature controller is built in with +/-1oC. accuracy. RS485 port and control software are included to allow you running furnace and monitoring temperature profile via PC. Three gas flow-metera and and vacuum pump are installed inside mobile cart and connected to RTP furnace.
Specifications:
On RTP Furnace
- Furnace structure: Double layer steel case with mullite liner without water cooling or air cooling
- Heating element: 8 pcs Halogen light tube (D=10 L=300 T =200, mm)
- Heating zone: 12" length with 4" constant temperature zone within +/-5oC uniformity
- Quart Tube size: 4.33" O.D x 4.05" I.D x 15" Length
- Vacuum Flange: Made of stainless steel with double hi-temp. silicone O-ring, needle valves and water cooling jacket
- only require water cooling in long time running at > 900oC
- Circulating water rate: 0.5 m3 /hr
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- 30 segments programmable precision controller with auto tune function
- Built in protection from overheated and broken thermal couple
- Temperature control accuracy: +/- 0.5oC
- Built in RS485 port for PC control
- Software is included (Window XP/7 version required, computer is not included)
- Max. Heating Rate: 50 oC/sec recommended, and 120oC/sec. for short time
- Working Temperature: 1100oC Max.
- Power Input: 208-240 AC, 50/60 Hz single phase, 9 KW Max. (> 60A breaker required)
- Dimension: 760 X 330 X 530 mm (30"W x 13"L x 21" H)
- Net weight: 45 kg (100 lbs)
Quartz sample holder with slide / flange , which can handle 3" wafer max.
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Furnace can be heated to 1100oC at 120 oC/second, and fast cooling by opening cover
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Sliding flange to make sample load at easy
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Click to see detail specification
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Temperature control software is included. Please click picture to enlarge and review interface
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On Vacuum Pump and Gas flow-meter
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Sale Price: USD$21,945.00
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Sale Price: USD$12,995.00
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MS&T 2012, Booth# 536, Oct.9-10, 2012, Pittsburgh, PA, USA
 Nanotech 2012, Booth# 712, June 19-20, 2012, Santa Clara, California
 MRS 2012 Spring Meeting, Booth# 321, Apr. 10-12, 2012, San Francisco, CA , USA
 TMS 2012, Booth# 330, Mar. 12- 14, 2012, Orlando, FL, USA
 APS 2012, Booth#211, Feb.27-29, 2012, Boston, MA, USA
 AABC 2012, Booth #809, Feb 6-10, 2012,Orlando, FL, USA
 36th ICAE/ICACC 2012, Booth#214, Jan.24-25, 2012, Daytona Beach, FL, USA
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Notices
1. The price listed on line is valid for US market and who pay by credit card only. There will be extra cost for shipping and handling. The price is different from country to country
2. We may add extra cost for paper order and net 30 term due to extra labor cost
3. The price is subject to change without notice
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