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Compact 4“ RTP Tube Furnace System with Turbomolecular Vacuum Station & Complete Acessories (up to 1E-4 torr & 1100C ) - EQ-OTF-1200X-4-RTP-HV
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Click to enlarge
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In stock
Item Number: EQ-OTF-1200X-4-RTP-HV
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Product Description
Compact 4“ RTP Tube Furnace with High Vacuum Station & Complete Acessories (up to 10^-5 torr & 1100C ) - EQ-OTF-1200X-4-RTP-HVEQ-OTF-1200X-4-RTP-HV is a compact rapid thermal processing tube (4" I.D.) furnace with High Vacuum Station (diaphragm pump + turbo molecular pump) and KF-D25 vacuum flange assembly. It is designed for annealing semiconductor wafer or solar cell up to 3" diameter. Such furnace is heated by 10KW halogen light around the processing tube with max. heating rate at 120°C/second. 50 segments precision temperature controller is built in with accuracy +/-1°C. RS485 port and control software are included to allow you running furnace and monitoring temperature profile via PC.
Furnace
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structure
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Compact 4“ RTP Tube Furnace（Double layer steel case mullite liner)
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Heating element
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8 pcs Halogen light tube (D=10 L=300 T =200, mm)
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Working Temp.
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1100°C max.
Furnace can be heated to 1100°C at 120°C/second, and fast cooling by opening cover
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| Max heating rate
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50°C/sec recommended, and 120°C/sec. for short time ( furnace must preheated at 200°C for 10 20 minutes to get max heating rate )
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| Max cooling rate
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64°C/min (Under vacuum: 200 mtorr), 117°C/min (Under atmosphere pressure)
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Heating zone
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12" length with 4" constant temperature zone within +/-1°C uniformity
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| Program Temp. controller
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PID automatic control via SCR (Silicon Controlled Rectifier) power control, e.g. current limiting phase angle fired the resistor.
Thermocouple: S type
Built in protection from overheated and broken thermal couple
30 programmable segments
Auto tune function
Temperature control accuracy: +/- 0.5°C
Built in RS485 port for PC control
Software is included. (Computer is not included)
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Control module + Cable + software
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Software Interface
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Temp. Profile
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The laptop with operation software installed is available as option at $900 extra cost. (please select the laptop at option bar)
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Quart Tube & Sample Holder
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Quart Tube Size: 4.33" O.D x 4.05" I.D x 15" Length
3" diameter Sample holder is inserted to sliding flange, which is made of quartz
One 3" diameter AlN wafer is placed in the center of holder for annealing sample up to 3" dia.
AlN has very high thermal conductivity, which provides the best temperature uniformity in the sample area
The sample holder is removable from flange and use the RTP for other purpose
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Vacuum flange
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KF-D25 High Vacuum Flange is made of stainless steel with double hi-temp. silicone O-rings, needle valves.
Sliding flange make an easy way for sample loading. 3" Quartz sample holder.Insert-able thermal-couple for accurate measurement.
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Flow meter
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One flow meter is installed on the front panel to adjust gas flow from 0 - 160 ml/min
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Power input
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208-240 AC, 50/60 Hz single phase, 9 KW Max. (> 60A breaker required)
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HV Station
High Vacuum Station
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Structure
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Mobile cart size: 600 (L) x 600 (W) x 700(W), mm
Max. Loading: 600 Lbs on top
Molecular pump control Panel : LCD digital
Diaphragm Pump and Turbo Molecular Pump are installed inside the steel case.
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Vacuum Degree
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6.3E-5 mbar (with 4" RTP tube furnace in 40 minutes)
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Control panel
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One button operation - the diaphram pump and the turbo molecular pump will start after pressing "start" button.
System controlled spining speed - the controller will control the speed of the turbine spining up and down according to the vacuum level and leaking rate of the reaction chamber.
Self protection - the system will protect the pump from damage by overheating and overcurrect if the leaking rate of the reaction chamber is too high to achieve high vacuum.
LCD screen - double lines parameters checking interface make the working easier to be handled.
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Self testing
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Spinning up
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Start-up time
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2 minutes
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Backing Pump Volume Flow Rate at 10 mbar
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3.8 L/min for 50Hz and 4.4 L/min for 60Hz
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Power input
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110V AC or 220V AC switchable, 50/60Hz
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Power consumption
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Duration/Max power: 100/110Watt
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Shipping Info
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Weight and Dimension
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RTP furnace: 110 lbs, 760 x 330 x 530mm (30" x 13" x 21" inch) L x W x H
HV station: 40 lbs, 600 x 600 x 700mm (24" x 24" x 28") L x W x H
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Warranty & Certificate
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One year limited warranty for electrical parts. (Consumable parts such as processing tubes, o-rings and halogen lamp are not covered by the warranty, please order the replacement at related products below.)
 CE certified
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Standard package
Item No.
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Name
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Qty
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Link
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| EQ-PV-HVS
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Compact Turbo molecular Vacuum Pump Station
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1
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EQ-MTS02
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Temperature PC control system (cable and software)
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1
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RTP-ACC-01
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Sample Holder for RTP Furnace
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1
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AIN-Holder
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Aluminum Nitride Substrate for PTP Furnace
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1 pc
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EQ-QZTube-RTP
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Quartz Tube: 4.33" O.D x 4.05" I.D x 15" Length for RTP Tube Furnace (installed)
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1 pc
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RTP-ACC-02
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Quartz heat shield disk
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4 pc
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EQ-RTP-Halogen-light
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Halogen light (heating elements)
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8 pc
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High Temperature Silicone O-ring (Ø108)
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6 pc
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High Temperature Silicone O-ring (Ø118)
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3 pc
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20ft.(6m) polyurethane tube O.D. 12mm I.D. 8mm W.P. 100PSI
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1 pc
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KSL7-05
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Refractory gloves
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1 pair
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KF-Valve-D25
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KF-25 Vacuum right angle valve
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1 pc
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| EQ-KF-Clamp-D25
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Quick Clamp with Rubber O-Ring for KF-D25 Vacuum adapter
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4 pc
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| EQ-KF-Clamp-D40
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Quick Clamp with Rubber O-Ring for KF-D40 Vacuum adapter
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3 pc
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| RU-KF40-25
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KF40 to KF25 Reducer Union RU-KF40-25
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1 pc
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| EQ-KF-Pipe-D25
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KF-D25 Flexible Stainless Steel Vacuum Hose ( Bellows ) (1000mm +600mm)
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2 pc
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EQ-CVM-211
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Compact Digital Vacuum Gauge
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1 pc
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RT36-00
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63 A Fuse
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2 pc
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RT14-20
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4 A fuse
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2
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Optional
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You must implement cooling water during operation.
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You must run test under vacuum or inert gas environment, otherwise the heat radiation blocks will get oxidized.
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Please make sure the flow rate of cooling water >= 3L/min, water temp. < 20oC @ pressure > 25 PSI
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We suggest you using recirculating water chiller as cooling system (please order separately at the related product below) to save water.
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You can use flowing tap water as cooling source at flowing rate > 8 Liter/minute.
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Warning 1: With the normal tap water as cooling source, this RTP furnace's Max holding time shall be less than 600 seconds at 1000oC ~ 1100oC, otherwise O-ring may get melting.
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Warning 2: With the recommended recirculating water chiller as cooling system, this RTP furnace's Max holding time can last 1200 seconds at 1000oC ~ 1100oC, otherwise O-ring may get melting.
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Optional for upgrade: You may choose our gas mixer to replace mobile cart for better gas control-- ( please order at the the related product below
Water cooling chiller Gas mix station
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 Quick test instruction
Operation Manual
Product Catalog
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Sale Price: USD$14,985.00
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MS&T 2012, Booth# 536, Oct.9-10, 2012, Pittsburgh, PA, USA
 Nanotech 2012, Booth# 712, June 19-20, 2012, Santa Clara, California
 MRS 2012 Spring Meeting, Booth# 321, Apr. 10-12, 2012, San Francisco, CA , USA
 TMS 2012, Booth# 330, Mar. 12- 14, 2012, Orlando, FL, USA
 APS 2012, Booth#211, Feb.27-29, 2012, Boston, MA, USA
 AABC 2012, Booth #809, Feb 6-10, 2012,Orlando, FL, USA
 36th ICAE/ICACC 2012, Booth#214, Jan.24-25, 2012, Daytona Beach, FL, USA
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Notices
1. The price listed on line is valid for US market and who pay by credit card only. There will be extra cost for shipping and handling. The price is different from country to country
2. We may add extra cost for paper order and net 30 term due to extra labor cost
3. The price is subject to change without notice
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