Compact RTP Tube Furnace with 4" Quartz Tube & Digital Vacuum Gauge up to 1100C and Control Software - EQ-RTP-1000D4

Specifications:

Furnace structure

Double layer steel case with mullite liner without water cooling or air cooling

Heating element

8 pcs Halogen light tube (D=10 L=300 T =200, mm)

Heating zone

12" length with 4" constant temperature zone within +/-1^oC uniformity

Quart Tube & Sample Holder

• Quart Tube Size: 4.33" O.D x 4.05" I.D x 16.14" Length (110.10mm x 103.05mm x 410mm)
• 3" diameter Sample holder is inserted to sliding flange, which is made of quartz
  • One 3" diameter AlN wafer is placed in the center of holder for annealing sample up to 3" dia.
  • AlN has very high thermal conductivity, which provides the best temperature uniformity in the sample area
  • The sample holder is removable from flange and use the RTP for other purpose

Vacuum Flange

Made of stainless steel with double hi-temp. silicone O-rings, needle valves.

Water Cooling Jacket

• You must implement cooling water during operation.
• Please make sure the flow rate  of cooling water >= 3L/min, water temp. < 20^oC @ pressure > 25 PSI
• We suggest you using recirculating water chiller as cooling system (please order separately at the related product below) to save water.
• You can use flowing tap water as cooling source at flowing rate > 8 Liter/minute.
• Warning:  This RTP furnace's Max holding time shall be less than 600 seconds at 1000^oC ~ 1100^oC, otherwise O-ring may get melting

Flow-meter

One flow meter is installed on the front panel to adjust gas flow from 0 - 160 ml/min

Vacuum gauge

Digital vacuum gauge with a measurement range from 1 mtorr~800 torr is installed with the furnace.

Vacuum pressure

• Pressure can reach 50 mtorr by using mechanical vacuum pump with KF25 adapter.
• Pressure can reach 10^-3 torr by molecular pump with KF25 adapter.

Temperature control

PID automatic control via SCR (Silicon Controlled Rectifier) power control, e.g. current limiting phase angle fired the resistor.

Thermal Couple

S type

Programmable Temperature controller

• Built in protection from overheated and broken thermal couple
• 30 programmable segments
• Auto tune function
• Temperature control accuracy: +/- 0.5^oC
• Built in RS485 port for PC control
• Software is included. (Computer is not included)
• One 15" screen laptop with operation software installed is available as option at $900 extra cost.         
• Click here to download the driver and software

Max. Heating Rate

50 ^oC/sec recommended, and 120^oC/sec. for short time   ( furnace must preheated at 200oC for 10 20 minutes to get max heating rate )

Max. Cooling Rate

64 ^oC/min (Under vacuum: 200 mtorr), 117^oC/min (Under atmosphere pressure)

Working Temperature

1100^oC Max.

Power Input

208-240 AC, 50/60 Hz single phase, 9 KW Max. (> 60A breaker required)

Dimension

760 X 330 X 530 mm (30"W x 13"L x 21" H)

Net weight

45 kg (100 lbs)

Warranty

One year limited (not including halogen light damaged by user)