Compact RTP Tube Furnace with 4" Quartz Tube & Digital Vacuum Gauge up to 1100C and Control Software

RTP-1000D4 is compact rapid thermal processing tube furnace with 4" I.D. processing quartz tube and vacuum flange.  It is designed for annealing semiconductor wafer ro solar cell up to 3" diameter.  RTP-4 is heated by 10KW halogen light  with max. 120^oC/second heating rate.  50 segment precision temperature controller is built in with +/-1^oC. accuracy.  RS485 port and control software are included to allow you running furnace and monitoring temperature profile via PC.

Specifications:

• Furnace structure:         Double layer steel case with mullite liner without water cooling or air cooling
• Heating element:          8 pcs  Halogen light  tube  ( D=10 L=300 T =200, mm )
• Heating zone:               12" length with 4" constant temperature zone within +/-1^oC uniformity
• Quart Tube size:           4.33" O.D x 4.05" I.D x 16.14" Length (110.10mm x 103.05mm x 410mm)
• Vacuum Flange:           Made of stainless steel with double hi-temp. silicone O-ring, ball valves and water cooling jacket 
  • only require water cooling in long    time running at > 900^oC
  • Circulating water rate: 0.5 m³ /hr
• Flowmeter:             One flow meter is installed on fron of panel to adjust gas flow from 0 - 160 ml/min
• Vacuum gauge:            CE certified vacuum gauge with a measurement range from 1 mtorr~800 torr. is installed with the furnace.
• Vacuum pressure:    Depended on vacuum pump pressure limit   ( pump not included, please click   underlined to order separately ). by MTI small mechancal vacuum pump , pressure can reach 80 mtorr, and by moleculor pump with KF25 adaptor , can reach 10^-3 torr
• Temperature control:     PID automatic control via SCR ( Silicon Controlled Rectifier) power control, e.g. current limiting phase angle fired the resistor.
• Thermal Couple: S type

• 30 segments programmable precision controller with auto tune function
• Built in protection from overheated and broken thermal couple
• Temperature control accuracy: +/- 0.5^oC
• Built in RS485 port for PC control
• Software is included  ( Window XP English version required, computer is not included, but 9" screen laptop with operation software installed is available as option at $600 extra cost )           
•  click here to download the driver and software

• Max. Heating Rate:         50 ^oC/sec  recommended, and 120^oC/sec. for short time
• Max. Cooling Rate:         64 ^oC/min (Under vacuum: 200 mtorr),  117^oC/min (Under atmosphere pressure)
  
• Working Temperature:     1100^oC Max.
• Power Input:                   208-240 AC, 50/60 Hz single phase,   9 KW Max.  ( > 60A breaker required)
• Dimension:                    760 X 330 X 530 mm  (  30"W x 13"L x 21" H )
• Net weight:                    45 kg   ( 100 lbs )
• Warranty:                      One year limited    ( not including halogen light damaged by user )

Digital vacuum gauge was installed for immediate use	Furnace can be heated to 1100oC at 120 oC/second, and fast cooling by opening cover	Sliding flange make an easy way for sample loading. Quartz  sample holder can handle 3" wafer max. Insertable thermal-couple can reach the central point of processing tube which allows for accurate measurement.
Click to see detail specification	user-friendly software	Temperature control software is included. Please click picture to enlarge and review interface

STANDARD PACKAGE

Item No.	Description	Quantity	Price for replacement, USD	Quick Links
EQ-CVM-211	Digital Vacuum Gauge Up to 10-4 Torr	1	USD$395.95
EQ-MTS02	Temperature PC Control System	1	USD$199.95
RT36-00	Fuse of 63 Amps	2	USD$45.00/ea.
RT14-20	Fuse of 4 Amps,	2	USD$9.95/ea.
RTP-ACC-01	Sample Holder for RTP furnace	1	USD$150.00
KSL7-05	Refractory gloves , Fire-proof upto 900 oC	1 pair	USD$29.95
EQ-QZTube-RTP	Quartz Tube: 4.33" O.D x 4.05" I.D x 15" Length for RTP Tube Furnace - RTP-1000D4	1	USD$295.00
RTP-ACC-02	Quartz heatshield disk	1 pair	USD$50.00
	20ft.(6m) polyurethane tube O.D. 12mm I.D. 8mm W.P. 100PSI	1	N/A
	High Temperature Silicone Rubber O ring	10	N/A
	water hose connector	4	N/A

Quick test instruction    Operation Manual   Product Catalog