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Compact RTP Tube Furnace with 4" Quartz Tube & Digital Vacuum Gauge up to 1100C and Control Software - EQ-RTP-1000D4
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In stock
Item Number: EQ-RTP-1000D4
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EQ-RTP-1000D4 is a compact rapid thermal processing tube furnace with 4" I.D. processing quartz tube and vacuum flange. It is designed for annealing semiconductor wafer or solar cell up to 3" diameter. EQ-RTP-1000D4 is heated by 10KW halogen light with max. 120oC/second heating rate. 50 segment precision temperature controller is built in with +/-1oC. accuracy. RS485 port and control software are included to allow you running furnace and monitoring temperature profile via PC.
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Specifications:
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Furnace structure
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Double layer steel case with mullite liner without water cooling or air cooling
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Heating element
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8 pcs Halogen light tube (D=10 L=300 T =200, mm)
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Heating zone
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12" length with 4" constant temperature zone within +/-1oC uniformity
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Quart Tube & Sample Holder
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Quart Tube Size: 4.33" O.D x 4.05" I.D x 16.14" Length (110.10mm x 103.05mm x 410mm)
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3" diameter Sample holder is inserted to sliding flange, which is made of quartz
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One 3" diameter AlN wafer is placed in the center of holder for annealing sample up to 3" dia.
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AlN has very high thermal conductivity, which provides the best temperature uniformity in the sample area
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The sample holder is removable from flange and use the RTP for other purpose
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Vacuum Flange
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Made of stainless steel with double hi-temp. silicone O-rings, needle valves.
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Water Cooling Jacket
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You must implement cooling water during operation.
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Please make sure the flow rate of cooling water >= 3L/min, water temp. < 20oC @ pressure > 25 PSI
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We suggest you using recirculating water chiller as cooling system (please order separately at the related product below) to save water.
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You can use flowing tap water as cooling source at flowing rate > 8 Liter/minute.
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Warning: This RTP furnace's Max holding time shall be less than 600 seconds at 1000oC ~ 1100oC, otherwise O-ring may get melting
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Flow-meter
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One flow meter is installed on the front panel to adjust gas flow from 0 - 160 ml/min
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Vacuum gauge
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Digital vacuum gauge with a measurement range from 1 mtorr~800 torr is installed with the furnace.
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Vacuum pressure
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Temperature control
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PID automatic control via SCR (Silicon Controlled Rectifier) power control, e.g. current limiting phase angle fired the resistor.
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Thermal Couple
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S type
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Programmable Temperature controller
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Max. Heating Rate
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50 oC/sec recommended, and 120oC/sec. for short time ( furnace must preheated at 200oC for 10 20 minutes to get max heating rate )
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Max. Cooling Rate
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64 oC/min (Under vacuum: 200 mtorr), 117oC/min (Under atmosphere pressure)
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Working Temperature
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1100oC Max.
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Power Input
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208-240 AC, 50/60 Hz single phase, 9 KW Max. (> 60A breaker required)
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Dimension
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760 X 330 X 530 mm (30"W x 13"L x 21" H)
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Net weight
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45 kg (100 lbs)
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Warranty
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One year limited (not including halogen light damaged by user)
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Standard Package
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Item No.
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Description
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Quantity
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Price for replacement, USD
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Quick Links
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EQ-CVM-211
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Digital Vacuum Gauge Up to 10-4 Torr
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1
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USD$395.95
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EQ-NKA
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1/4NPS to KF-D25 quick adapter
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1
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USD$29.95
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EQ-MTS02
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Temperature PC Control System
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1
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USD$199.95
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RT36-00
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Fuse of 63 Amps
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2
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USD$45.00/ea.
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RT14-20
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Fuse of 4 Amps,
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2
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USD$9.95/ea.
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RTP-ACC-01
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Sample Holder for RTP furnace
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1
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USD$150.00
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| AIN-Holder
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Aluminum Nitride Substrate for RTP Furnace's Sample Holder
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1
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USD$49.95
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KSL7-05
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Refractory gloves , Fire-proof upto 900 oC
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1 pair
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USD$29.95
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EQ-QZTube-RTP
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Quartz Tube: 4.33" O.D x 4.05" I.D x 15" Length for RTP Tube Furnace - RTP-1000D4
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1
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USD$295.00
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RTP-ACC-02
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Quartz heat shield disk
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4pcs
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USD$50.00
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20ft.(6m) polyurethane tube O.D. 12mm I.D. 8mm W.P. 100PSI
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1
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N/A
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High Temperature Silicone Rubber O ring
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10
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N/A
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EQ-RTP-Halogen-light
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Halogen light
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8
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$60/ea
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water hose connector
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4
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N/A
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A pair of Vacuum flange
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1
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N/A
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Digital vacuum gauge was installed for immediate use
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Furnace can be heated to 1100oC at 120 oC/second, and fast cooling by opening cover
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Sliding flange make an easy way for sample loading. 3" Quartz sample holder.Insert-able thermal-couple for accurate measurement.
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Click to see detail specification
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user-friendly software
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Temperature control software is included. Please click picture to enlarge and review interface
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Optional High Vacuum Package
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In order to achieve to achieve better vacuum, we strongly suggest you using KF25 adapter with stain steel vacuum pipe (up to 50 mtorr), Please order upgraded accessories as the follows
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Description
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Quantity
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links
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Unit Price
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Vacuum Pump, Two Steps Rotary Vane High Speed Vacuum Pump(226 L/m) with KF25D Adaptor (110V or 220V)
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1
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USD$995.00
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KF-D25 High Vacuum Flange for RTP Furnace Only
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1
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USD$950.00
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Vacuum bellows with KF-D25 adaptor (1m)
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1
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USD$99.95
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Vacuum Ball Valve with Dual KF-D25 port
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1
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USD$259.95
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Quick Clamp with Rubber O-Ring for KF-D25 Vacuum adapter
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2
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USD$29.95
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Quick test instruction
Operation Manual
Product Catalog
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Sale Price: USD$49,995.95
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Sale Price: USD$14,995.00
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Sale Price: USD$19,995.00
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Sale Price: USD$13,399.95
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Upcoming shows:
Please see MTI at
Booth#205, Nov.30- Dec.2, 2010 Boston, MA, USA
Please see MTI at

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Houston,TX, USA
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Las Vegas, NV, USA
Please see MTI at
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San Jose,CA, USA
History:
Please see MTI at Semiconwest, Booth 5677 , July 13-15, 2010 San Francisco, CA, USA
Please see MTI at 217th ECS Meeting, Booth#12, April 26-28,2010 Vancouver, Canada
Please see MTI at MRS Spring 2010, Booth #317, April 6-8, San Francisco, USA
Please see MTI at ACS National Exposition Spring 2010, Booth#436, March 21-24, San Francisco, USA
Please see MTI at APS March Meeting Booth #430 and #432, Portland, OR, UMTI SA

Notices
o The price listed on line is valid for US market and who pay by credit card only. There will be extra cost for shipping and handling. The price is different from country to country
o We may add extra cost for paper order and net 30 term due to extra labor cost
o The price is subject to change without notice
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