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Home > What's new in MTI > Compact RTP Tube Furnace with 4" Quartz Tube & Digital Vacuum Gauge up to 1100C and Control Software
Compact RTP Tube Furnace with 4" Quartz Tube & Digital Vacuum Gauge up to 1100C and Control Software
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In stock
Item Number: RTP1000D4
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RTP-1000D4 is compact rapid thermal processing tube furnace with 4" I.D. processing quartz tube and vacuum flange. It is designed for annealing semiconductor wafer ro solar cell up to 3" diameter. RTP-4 is heated by 10KW halogen light with max. 120oC/second heating rate. 50 segment precision temperature controller is built in with +/-1oC. accuracy. RS485 port and control software are included to allow you running furnace and monitoring temperature profile via PC.
Specifications:
- Furnace structure: Double layer steel case with mullite liner without water cooling or air cooling
- Heating element: 8 pcs Halogen light tube ( D=10 L=300 T =200, mm )
- Heating zone: 12" length with 4" constant temperature zone within +/-1oC uniformity
- Quart Tube size: 4.33" O.D x 4.05" I.D x 16.14" Length (110.10mm x 103.05mm x 410mm)
- Vacuum Flange: Made of stainless steel with double hi-temp. silicone O-ring, ball valves and water cooling jacket
- only require water cooling in long time running at > 900oC
- Circulating water rate: 0.5 m3 /hr
- Flowmeter: One flow meter is installed on fron of panel to adjust gas flow from 0 - 160 ml/min
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Vacuum gauge: CE certified vacuum gauge with a measurement range from 1 mtorr~800 torr. is installed with the furnace.
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Vacuum pressure: Depended on vacuum pump pressure limit ( pump not included, please click underlined to order separately ). by MTI small mechancal vacuum pump , pressure can reach 80 mtorr, and by moleculor pump with KF25 adaptor , can reach 10-3 torr
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Thermal Couple: S type
- Max. Heating Rate: 50 oC/sec recommended, and 120oC/sec. for short time
- Max. Cooling Rate: 64 oC/min (Under vacuum: 200 mtorr), 117oC/min (Under atmosphere pressure)
- Working Temperature: 1100oC Max.
- Power Input: 208-240 AC, 50/60 Hz single phase, 9 KW Max. ( > 60A breaker required)
- Dimension: 760 X 330 X 530 mm ( 30"W x 13"L x 21" H )
- Net weight: 45 kg ( 100 lbs )
- Warranty: One year limited ( not including halogen light damaged by user )
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Digital vacuum gauge was installed for immediate use
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Furnace can be heated to 1100oC at 120 oC/second, and fast cooling by opening cover
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Sliding flange make an easy way for sample loading. Quartz sample holder can handle 3" wafer max. Insertable thermal-couple can reach the central point of processing tube which allows for accurate measurement.
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Click to see detail specification
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user-friendly software
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Temperature control software is included. Please click picture to enlarge and review interface
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STANDARD PACKAGE
1. RTP furnace machine with
1) Full set of flanges.
2) 8 pcs Halogen lights.
and standard accessories listed below:
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Item No.
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Description
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Quantity
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Price for replacement, USD
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Quick Links
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EQ-CVM-211
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Digital Vacuum Gauge Up to 10-4 Torr
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1
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USD$395.95
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EQ-MTS02
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Temperature PC Control System
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1
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USD$199.95
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RT36-00
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Fuse of 63 Amps
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2
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USD$45.00/ea.
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RT14-20
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Fuse of 4 Amps,
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2
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USD$9.95/ea.
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RTP-ACC-01
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Sample Holder for RTP furnace
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1
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USD$150.00
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KSL7-05
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Refractory gloves , Fire-proof upto 900 oC
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1 pair
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USD$29.95
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EQ-QZTube-RTP
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Quartz Tube: 4.33" O.D x 4.05" I.D x 15" Length for RTP Tube Furnace - RTP-1000D4
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1
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USD$295.00
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RTP-ACC-02
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Quartz heatshield disk
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1 pair
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USD$50.00
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20ft.(6m) polyurethane tube O.D. 12mm I.D. 8mm W.P. 100PSI
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1
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N/A
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High Temperature Silicone Rubber O ring
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10
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N/A
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water hose connector
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4
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N/A
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OPTIONAL ACCESSORIES LIST
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Item NO.
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Description
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Quantity
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Price of replacement, USD
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Quick link
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2TW-4C-110v
2TW-4C-220v
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Vacuum Pump, Double Steps Rotary Vane High Speed Vacuum Pump(240 L/m ) with KF25D Adaptor (110V or 220V)
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1
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USD$995.00d
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KF-Pipe-D25
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bellows with KF-D25 adaptor (1m L)
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1
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USD$99.95
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KF-Clamp=D25
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Quick Clamp with Rubber O-Ring for KF-D25 Vacuum adaptor
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1
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USD$29.95
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N/A
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Heating elements----Halogen light ( D=10 L=300 T =200, amm )
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1
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N/A
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Quick test instruction
Operation Manual
Product Catalog
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Sale Price: USD$39,995.00
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Sale Price: USD$14,995.00
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