Compact RTP Furnace with 4" Quartz Tube & Digital Vacuum Gauge up to 1100ºC - OTF-1200X-4-RTP

Specifications:

Furnace structure

Double layer steel case with mullite liner without water cooling or air cooling

Heating element

8 pcs Halogen light tube (D=10 L=300 T =200, mm)

Heating zone

12" length with 4" constant temperature zone within +/-5ºC uniformity

Quart Tube & Sample Holder

• Quart Tube Size: 4.33" O.D x 4.05" I.D x 15" Length
• 3" diameter Sample holder is inserted to sliding flange, which is made of Aluminum Nitride (AIN).
  • +\- 5°C temperature uniformity
    
     
  • One 3" diameter AlN wafer is placed in the center of holder for annealing sample up to 3" dia
  • AlN has very high thermal conductivity, which provides the best temperature uniformity in the sample area
  • The sample holder is removable from flange and use the RTP for other purpose

Vacuum Flange

• Made of stainless steel with double hi-temp. silicone O-rings, KF25 Vacuum Port and Needle Valves.
• Slide-out flange provides an easier way of loading, unloading the samples and other specific process needed.

Water Cooling Jacket

• Cooling water is required.
• Please make sure the flow rate of cooling water is ≥ 3L/min, water temp. < 20ºC; pressure > 25 PSI
• We suggest you using recirculating water chiller as cooling system (please order separately at the related product below) to save water.
• Warning:  This RTP furnace's max holding time shall be less than 600 seconds at 1000ºC ~ 1100ºC, otherwise O-ring may get melting

Flow-meter

One flow meter is installed on the front panel to adjust gas flow from 16 - 160 ml/min

Vacuum gauge

Digital vacuum gauge with a measurement range from 1 mtorr~800 torr is installed with the furnace.

• Pressure can reach 50 mtorr by using mechanical vacuum pump with KF25 adapter.
• Pressure can reach 10^-4 torr by molecular pump with KF25 adapter.

Temperature control

PID automatic control via SCR (Silicon Controlled Rectifier) power control, e.g. current limiting phase angle fired the resistor.

Thermal Couple

S type, the head of the thermocouple touches the Aluminum Nitride sample holder from underneath 

Programmable Temperature controller

• Built in protection from overheated and broken thermal couple
• 30 programmable segments
• Auto tune function
• Temperature control accuracy: +/- 1ºC
• Built in RS485 port for PC control
• Software is included. (Computer is not included)
• One 15" screen laptop with operation software installed is available as option at $900 extra cost.         
• Click here to download the driver and software

Max. Heating Rate

Max. Cooling Rate

Working Temperature

Power Input

Dimension

Net weight

Standard Package 

Item No.

Description

Quantity

Price for replacement, USD

Quick Links

EQ-CVM-211

Digital Vacuum Gauge Up to 10^-4 Torr

1

EQ-KF-Valve-D25

Vacuum Ball Valve with Dual KF-D25 port

1

EQ-MTS02

Temperature PC Control System

1

RT36-00

Fuse of 63 Amps

2

RT14-20

Fuse of 4 Amps,

2

RTP-ACC-01

Sample Holder for RTP furnace

1

USD$150.00

KSL7-05

Refractory gloves , Fire-proof upto 900 ^oC

1 pair

EQ-QZTube-RTP

Quartz Tube: 4.33" O.D x 4.05" I.D x 15" Length for RTP Tube Furnace

1

RTP-ACC-02

Quartz heat shield disk

4pcs 

USD$50.00

20ft.(6m) polyurethane tube O.D. 12mm I.D. 8mm W.P. 100PSI

1

N/A

High Temperature Silicone Rubber O ring

(6 pcs are installed)

9

N/A

Halogen light

8

water hose connector

2

N/A

A pair of Vacuum flange

1

N/A