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Home > Plasma Cleaners > Atomospheric Plasma Beam With Automatic Scanning System For Surface Treatment
Atomospheric Plasma Beam With Automatic Scanning System For Surface Treatment
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In stock
Item Number: GSL1100X-PJF-A
Personalization
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GSL1100X-PJF-A combines Atmospheric Plasma Beam together with two dimension automatical workiing stage, whcih allow plasma beam scan sample surface as setting programa and surface coating or treatment consistent and uniform. The system consists of RF generator, flexible gas delivery pipe, plasma beam head, X-Y workign stage with vacuum chunck sample holder and Programable control box. The plasma beam can activate and clean material surface rapidly at low temperature without vacuum, such as single crystal wafer, optical component, plastics etc, and it make plasma enhanced CVD film on substrate via mixture chemical gas
MAIN SPECIFICATIONS
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Input Power for Plasma
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208 V - 240VAC, 50/60 Hz, < 1000W
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Output Frequency
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20-23 kHz
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Plasma Beam head
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Two plasma Beam heads are included--: round head：10-12mm；retangular head：15-18mm
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Input Gas Pressure and Working Gases
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Plasma working Pressure
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7.- 10 PSI
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Working Environmental
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- Temperature: < 42°C
- Himunity: : ≤ 40℃RH
- No flammable gas
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Saple Stage & Controller
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X-Y two dimension are driven by step motors and controlled by SBC control box.
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Z axis is adjustable by manual
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Control box has LCD display and scanning programa cn be set by function key
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Max. scanning area: 8" x 9"
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One 4" diameter vacuum chunk is installed on X-Y sampel holder, which can soak thin wafer upto 6" diameter on the sample holder firmly
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One vacuum pump is included to connect the vacuum chunk
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Whole system is placed on a heavy duty mobile cart (600x600x 800Lmm)
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Dimension & Net Weight
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Dimension: 600mm x 600mm x 1250mm
Net weight: 55 kg
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Warranty & Certificate
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Operation Manual
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Sale Price: USD$12,695.00
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MS&T 2012, Booth# 536, Oct.9-10, 2012, Pittsburgh, PA, USA
 Nanotech 2012, Booth# 712, June 19-20, 2012, Santa Clara, California
 ECS 221st, Booth#208, May 7-9, 2012, Seattle,WA, USA
 SVC TechCon2012, Booth# 739, May 1- 2, 2012, Santa Clara, California
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Notices
1. The price listed on line is valid for US market and who pay by credit card only. There will be extra cost for shipping and handling. The price is different from country to country
2. We may add extra cost for paper order and net 30 term due to extra labor cost
3. The price is subject to change without notice
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