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Mini Plasma Sputtering Coater with Vacuum Pump & Gold Target, 1.5" Max Sample -GSL-1100X-SPC12-LD

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In stock
Item Number: GSL-1100X-SPC12-LD
Transported by LTL Freight (Truck)


GSL-1100X-SPC12 is a compact plasma sputtering coater designed for making metallic coatings, such as gold, platinum, Indium and silver etc which can be applied on a sample up to 40 mm diameter with 300 Angstrom thickness. Especially for coating conductive gold film for SEM sample. The plasma sputtering coater is shipped with all necessary accessories for immediate use, including one sputtering head with gold sputtering target (gold cathode), Vacuum pump, stainless steel bellows, quick clamps and vapor trap.


Input Power
Specimen chamber
  • Fused glass tube, 100 mm Dia. x 130mm Height 
  • Stainless steel flange
Specimen stage
  • 40 Dia. (Can coating 6 SEM sample on one stage)
  • Height of the stage is adjustable

Vacuum Accessories

Every acessories are included for immediate use. ( (Please click the picture left for detail )

  • 120 L/m  Rotary Vane Vacuum Pump (external) with Pirani gauge vapor trap prevent oil streaming get back into the vacuum chamber
  • Stainless steel bellows with KF16 adapter and quick clamps
  • Two Stage Exhaust Filter on vacuum pump to eliminate oil vapor contamination
  • One sphere vapor trap is included to avoid pump oil return to vacuum chamber
  • High purity gold foil target

Gas atmosphere

One needle valve installed to allow Ar gas flow to achieve better plasma coating.


Overall dimensions

L480mm x W320mm x H150mm
    (click to enlarge the picture)

Shipping weight

120 Lbs with 40"x31"x22" dimension with crating

Net Weight

20 kg

Application Notes       

  • MTI Corp. shares the most state-of-art sputter coating technology with our customer, please click the picture below to read the artical Plasma Sputter Coating.
  • For the best film strength, please use plasma cleaner to clean sample surface before coating
  • The system requires an Ar gas tank with pressure regulator which is not included
  • This model is not suitable for coating light weight metallic material such as Al, Mg and Zinc or Carbon target due to low energy. Please consider our Megnetron-sputtering coater or Carbon Evaporation Coating. Click pic bellow for detail.
         Megnetron sputtering         Thermal  Evaporating      
Operation Instructions



One year limited warranty with lifetime support
Certificate   certified

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1. Prices listed online are valid for US market and whom pay by credit card only. There will be extra charges for shipping & handling. Price various from country to country.
2. We may add extra charges for paper order and net30 terms due to extra labor cost.
3. The prices listed are subject to change without notice.