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GaN Epitaxial Template on 2" Silicon Wafer, GaN film, N type, undoped on Si (111) substrates, 2"x 500 nm, 1sp

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Item Number: GaNT50D-C1 (SIc)

GaN Epitxial Template on silicon is made by a hydride vapor phase epitaxy (HVPE)-based method. During the HVPE process, HCl reacts with molten Ga to form GaCl, which in turn reacts with NH3 to form GaN. Epi GaN template on silicon is a cost effective way to replace GaN single crystal substrate.

Specifications:
 
  • Nominal GaN thickness: 0.5μm ± 0.1 μm
  • Front Surface finish (Ga-face): <1nm RMS,  As-grown, Epi-ready
  • Back surface finish: Silicon as received
  • GaN orientation: C-plane (00.1)
  • Polarity: Ga-face
  • Conduction Type: Undoped (N-)
  • Macro Defect Density: <5/cm^2
  • Wafer base: Silicon [111], 2" diameter x 0.5mm, one side polished
 
 

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