Gas Control System for Tube Furnaces by Three Channel Float Flowmeters and Valves - EQ-GSL-3F (upgraded from VGS-3F)

The gas control system is designed for control of 1-3 types of gases flowing through vacuum sealed MTI tube furnaces in lower cost. The gas control system is installed in heavy duty mobile cart where tube furnace can be placed on the top. The front panels in the system will display  flow rate with adjust valves. Combining with MTI tube furnaces, it can be used as CVD system and annealing furnace to study gas environmental influence to materials.

• Three Floating Flow-meter with various flow rate range and 4% FS accuracy

  • A: 10 - 100 mL/min

  • B: 16 - 160 mL/min

  • C: 25 - 250 mL/min

• Mechanical Pressure Gauge (mixing tank): -0.1-0.15 MPa, (0.01 MPa/grit)

• Vacuum needle valves: (three)

  • Made of SS304

  • Installed in right side of cart

• Pipe fitting: 1/4" pipe (nylon or stainless steel)

  • Three Gas Inlet fittings (from gas tanks) are Installed in right side of cart

  • Two channel gases flow into a gas mixer container and one gas channel independent (please review manual for drawing)

  • Two gas outlet fittings (to tube furnace) are installed in left side of cart (one for mixing gas and one independent)

  • 12' length 1/4" Nylon pipe is included for immediate use

• Mobile Cart with four wheel and brake:  600 mm (L) x 600 mm  (W) x 650 mm ( H)
• Load limit: 400 lbs
  
• Net weight: 165 lbs
• Shipping dimension: 41 x 49 x 38 inch
  
• Shipping weight: 200 lbs 

 Operation Manual