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Reflectance Spectrometer for Thin Film Measurement with Software & Laptop for Thickness 15 nm - 50 um - EQ-TFMS-LD


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Item Number: EQ-TFMS-LD
EQ-TFMS-LD is the thin film thickness measurement system that provides a quick and reliable solution for measuring the thickness of Translucent or Low Absorbing thin films from 15 nm to 50 um with 400 nm - 1100 nm spectral range. The measurement is based on specular reflectance and uses fiber optics reflectance probe. The compact system is easy to setup and user-friendly.

SPECIFICATIONS:
Features
  • Real time measurement and analysis: Multi-layer, thin, thick, freestanding and nonuniform layers
  • Extensive material library: 500+ materials
  • Support of parameterized materials: Cauchy, Tauc-Lorentz, Cody-Lorentz, EMA
  • Flexible: Desktop or in-situ, R&D or inline.
  • Measurement: Thickness, optical constants, surface roughness
  • User-friendly and powerful: One-click measurement and analysis
Majority of Translucent or Low Absorbing Films
  • Oxides (See Pic 1 for example)
  • Nitrides
  • Photoresists
  • Polymers (See Pic 2 for example)
  • Semiconductors: Si, aSi, polySi
  • Hard Coating: SiC, DLC
  • Polymer Coating: Paralene, PMMA, Polyamides
  • Thin Metal Coating  (< 50 nm thickness. See Pic 3 for example)
    Pic 1 - 3 um LiNbO3 Pic 2 - 45 um PET Pic 3 - 20 nm Cu
Thickness Range
  • 15 nm - 50 um  for non-metallic, translucent materials as listed above 
  • Note: metallic films can only be measured up to 50 nm reliably; X-Ray measurements are needed for thicker films
Spectral Range
  • 400 nm - 1100 nm
Precision
  • 0.01 nm or 0.01%
Accuracy
  • 0.2% or 1 nm
Stability
  • 0.02 nm or 0.03%
Spot Size
  • 3 mm minimum
Sample Size Requirement
  • Minimum 5 mm x 5 mm for reliable measurement  
Spectrometer/Detctor
  • 3600 pixels Si CCD
  • 16 bit ADC
  • 400 - 1100 nm wavelength range
  • Spectral resolution: < 1 nm
  • Power 100 -240 VAC, 50/60 Hz, 20 W power
Light Source
  • 5 W Tungsten-halogen lamp
  • CT 2800 degree
  • Lifetime: 10000 hours
Reflectance Probe
  • Fiberoptics, 400 um fiber core
  • with spectrometer leg and Illumination leg
Face-Up Measurement
  • The film sample faces up with probe and light source pointing down
Communication Interface and Laptop Computer
  • USB connector to communicate with PC
  • One brand new Laptop with software installed is included for immediate use
Software: TFCompanion 


  • Large library of refractive index (n) and extinction coefficient (k) values for the most common metallic, dielectric, amorphous and crystalline substrate materials
  • Capability for analyzing simple and the most complex film stacks
  • Error estimation and simulation tools allow for factoring in the effects of changing conditions
  • Support for parameterized materials with approximations representing optical dispersion in a desired spectral range using few coefficients that can be adjusted
  •   
Software Option
  • Remote control (TCP) based on Modbus protocol at extra cost
Measurement Standard (Included)
  • Bare Si Reference and 200 nm thickness silicon oxide test wafer are included as thin film standards for thickness measurement verification
  •   

Dimensions

  • 205 mm L x 250 mm W x 105 mm H (8" L x10" W x4" H)

Net Weight

  • 4.5 kg (10 lbs)

Shipping Dimensions

  • 460 mm L x 460 mm W x 460 mm H (18" L x18" W x 18" H)

Shipping Weight

  • 9.1 kg (20 lbs)

Warranty

  • One year limited warranty with lifetime support. (Consumable parts such as thin film measurement standard not covered by the warranty)

Operation Instruction

             

Application Note

  • An example of metal thin film thickness measurement using the reflectance spectrometer can be downloaded here (Click Pic below)

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Notices
1. Prices listed online are valid for US market and whom pay by credit card only. There will be extra charges for shipping & handling. Price various from country to country.
2. We may add extra charges for paper order and net30 terms due to extra labor cost.
3. The prices listed are subject to change without notice.