|
Three Zone 60mm Alumina Tube Furnace (1700C Max.) with Digital Vacuum Gauge and Three Channel Gas Mixing System - GSL-1700X-60-III-F3LV
|
Click to enlarge
|
In stock
Item Number: GSL-1700X-60-III-F3LV
|
GSL-1700X-60-III-F3LV is a CE certified three zones tube furnace with 60mm dia. alumina tube, mechanical vacuum pump and three channels gas flowing system, which can heat sample to 1700oC and achieve vacuum degree up to 5x10-2 torr and mix 1- 3 type of gases for CVD or diffusion
Specifications:
|
Furnace Structure
|
-
Double layer steel casing with air cooling. Two cooling fan inside to keep temperature of outside case < 55oC.
-
High purity fibrous alumina insulation for Max, energy saving.
-
Three indepentent heating zone via three pricesion temperature controllers.
-
Click picture on left to review detail specification
|
|
Power
|
9 KW (75A air breaker required )
|
|
Voltage
|
AC 208-240V Single Phase, 50/60 Hz
|
|
Heating Zone
|
Three zones: total 25" (630 mm) heating zone (included two refractory separators)
- Zone 1: 7.5" (190 mm) heated by 4 pcs U type SiC
- Working temperature 800 - 1400°C
- Heating rate: 10°C/min
- Zone 2: 10" (250 mm) heated by 6 pcs U type MoSi2
- working temperature 800 - 1700°C
- Max. Heating rate: 5°C/min
- Zone 3: 7.5" (190 mm) heated by 4 pcs U type SiC
- Working temperature 800 - 1400°C
- Max. Heating rate: 10°C/min
|
|
|
99.8% purity Alumina Tube
2-3/8" ( 60mm) O.D.x 2-1/8"I.D. (54mm) x 48" (1200mm) Length
60 mm stainless steel vacuum sealing flange with valve and meter is included
Two porous ceramic blocks are included for protecting flange from heating radiation
|
|
Temperature controller
|
-
One precision temperature controllers.
-
PID precision control by SCR
-
30 segments programmable for any temperature profile.
-
Built in protection for overheated and broken thermal couple.
|
|
Temperature Accuracy
|
+/- 1oC
|
Power cable & plug
|
|
|
Vacuum pump
|
|
|
Vacuum Gauge
|
|
|
Three Channel Gas mix and delivery system

|
-
Three gas flow-meters ( 4% accuracy FS) are installed inside mobile case which are able to monitor gases flowing rate (three different kinds of gases in total) clcik picture on left to see detail specs
1) Compact direct read flow meter, 10-100 cc/min.
2) Compact direct read flow meter, 16-160 cc/min.
3) Compact direct read flow meter, 25-250 cc/min.
-
One pressure meters is installed inside mobile cart which are able to monitor the pressure of mixing tank.
-
4 stainless steel needle valves are installed on the mobile cart
-
Two gas flowing pipes are provided for immediately use (one pipe from two mixed gases and another is independent gas)
-
Optional: in order to control gas delivery accurately, you may choose three channel gas delivery system controlled by precision digital mass flow meter at extra cost. Click picture below to see detail specs

|
|
Dimension
|
|
|
Net Weight
|
150Kg (furnace) + 100Kg ( total 550lb)
|
|
Shipping weight
|
800 lbs
|
|
Shipping package size after crating
|
Two cases in one pallet: 45x45x35/case
|
|
Warranty & Certificate
|
- One year limited warranty (Consumable parts such as processing tubes, o-rings and heating elements are not covered by the warranty, please order the replacement at related products below.)
-
CE certified
|
|
Notice:
( click underlined to see detail)
|
-
Please click hereto see our typical temperature profile calibration result at various temperature.
-
-
|
Operation Manual
Download Catalog
Quick test instruction
|
Sale Price: USD$19,995.00
|
Sale Price: USD$10,095.00
|
Sale Price: USD$18,995.00
|
Sale Price: USD$49,995.00
|
Sale Price: USD$17,180.00
| |
|
| | |
|
Your cart is empty.
Please clear the browsing history before ordering the product. Otherwise, availability and price are not guaranteed. | |
| | |
|
|
MS&T 2012, Booth# 536, Oct.9-10, 2012, Pittsburgh, PA, USA
 Nanotech 2012, Booth# 712, June 19-20, 2012, Santa Clara, California
ECS 221st, Booth#208, May 7-9, 2012, Seattle,WA, USA
SVC TechCon2012, Booth# 739, May 1- 2, 2012, Santa Clara, California
|
|
|
|
|

|
|
Notices
1. The price listed on line is valid for US market and who pay by credit card only. There will be extra cost for shipping and handling. The price is different from country to country
2. We may add extra cost for paper order and net 30 term due to extra labor cost
3. The price is subject to change without notice
|
|
|