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Single Zone 80mm Dia Alumina Tube Furnace (1700C Max.) with Digital Vacuum Gauge and 9 Channel Gas Mixing System - GSL-1700X-80-HVC9
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Click to enlarge
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Please email to info@mtixtl.com for lead time.
Item Number: GSL-1700X-80-HVC9
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GSL-1700X-80-HVC9 is CE certified 80mm diameter alumina tube furnace with vacuum pump system (up to 10-5 torr) and 9 channel precision digital Mass flow-meters, which can control nine types of gases for CVD or diffusion and work up to 1700oC.
Specifications:
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Furnace Structure
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| Power
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6 Kw
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Voltage
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AC 208-240V Single Phase, 50/60 Hz
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| Heating Element
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8 pcs 1800oC grade MoSi2 heating element
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Max. Temperature
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1700 oC (< 1 hours )
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Continuous Temperature
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1600 oC
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Max. Heating Rate
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<= 5 oC /min
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Tube Size and Materials
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Premier Grade alumina tube made in USA.
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ID: 82 mm x OD: 73 mm x 1000 mm length.
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Two pairs of SS tune support is installed to avoid tube bending under high temperature (click picture below to see details).
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Heating Zone
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| Temperature controllers
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One precision digital temperature controller programmable with 50 segments.
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PID adjustable with auto tune function to ensure temperature stability within +/- 1 oC.
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Full protection in each controller for over-temperature and broken thermal couple.
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Thermal Couple
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B type thermal couples built in
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| Vacuum Flanges
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- Two stainless steel flanges with vacuum hose and gas fitting pipe. One flange is installed with KFD-40 adaptor and ball valve.
- Double high temperature silicone O-ring for using under 300oC.
- Porous alumina blocks included for protecting flange from heat radiation.
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Vacuum pumps
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Tow stages vacuum pump installed in bottom case:
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Vacuum Sensor & display
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Vacuum sensor is installed to vacuum flange on tube furnace, and connect to a digital vacuum pressure display.
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Vacuum controller and display are installed in bottom mobile cart.
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| Gas flow meter
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- 9 precision mass flow meters (CS200) controllers are installed in bottom mobile cart with digital display panel of+/-1% of Full Scale (accuracy is within 35%-100% of full scale)
- 3 MFC at range 0 - 1000scc
- 3 MFC at range 0 - 200scc
- 3 MFC at range 0 - 10 scc
- one floating meter will be installed for N2 gas only
- one mechanical pressure meters are installed in bottom mobile cart for monitor each gas 's pressure in mixer.
- 9mass flow MFC control panels/displays with dial button to adjust gas flow rate. Please see picture below.
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| Pipe connection, valves and gas mixer
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- SS 316 1/4" pipe/fitting
- SS 316 vacuum needle valves
- 21 sets of stainless steel vacuum valves are installed outside of right side panel of mobile cabinet to control, vacuum pump, flowing gases and two inlet gases separately.
- Please click here to see sketch of pipe connection.
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Dimension
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Furnace: 550 x 380 x 520 Bottom Mobile case: 600x600x597
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Net Weight
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about 100 kg
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Shipping weight
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200 Lbs
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Shipping package size after crating
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Two cases in one plastic pallet: 45x45x35/case
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Warranty & certificate
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 Operation Manual
Download Catalog
About shipping / Handling
Quick test instruction |
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Sale Price: USD$10,095.00
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Please clear the browsing history before ordering the product. Otherwise, availability and price are not guaranteed. | |
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MS&T 2012, Booth# 536, Oct.9-10, 2012, Pittsburgh, PA, USA
 Nanotech 2012, Booth# 712, June 19-20, 2012, Santa Clara, California
 ECS 221st, Booth#208, May 7-9, 2012, Seattle,WA, USA
 SVC TechCon2012, Booth# 739, May 1- 2, 2012, Santa Clara, California
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Notices
1. The price listed on line is valid for US market and who pay by credit card only. There will be extra cost for shipping and handling. The price is different from country to country
2. We may add extra cost for paper order and net 30 term due to extra labor cost
3. The price is subject to change without notice
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