|
Single Zone Tube Furnace (80 mm Dia 1200C Max.) with Vacuum Pump (10E-2 torr) + Three Channel Gas Control by Float-meter - OTF-1200X-80-I-F3LV
|
Click to enlarge
|
In stock
Item Number: OTF-1200X-80-I-F3LV
|
OTF-1200X-80-I-F3LV isCE certified split-able single zone Tube furnace with 80mm diameter quartz tube, mechanical vacuum pump and three channels gas flowing system, which can achieve vacuum up to 10-2 torr and mix 1-3 type of gases for CVD or diffusion.
Specifications:
| Furnace casing
|
Double layer steel casing with air cooling. Built in thermostat to control Cooling running automatically when case > 55oC
|
|
Power
|
2.5 KW
|
|
Voltage
|
AC 208-240V Single Phase, 50/60 Hz
|
| Heating Element
|
Fe-Cr-Al Alloy doped by Mo
|
|
Max. Temperature
|
1200
oC
|
|
Continuous Temperature
|
1100
oC
|
|
Max. Heating Rate
|
<= 20 oC /min
|
|
Tube Size and Materials
|
Quartz tube: OD: 80mm x ID: 75 mm x Length: 1000 mm
|
|
Heating Zone length
|
400 mm
|
| Constant temperature zone
|
150 (+/-1oC)
|
|
Temperature controller
|
-
Two precision temperature controllers and control two zone independently
-
PID precision control by PWM solid relay
-
30 segments programmable for any temperature profile
-
Built in protection for overheated and broken thermal couple
|
|
Temperature Accuracy
|
+/- 1 oC
|
|
Vacuum Seal
|
Two stainless steel flanges with vacuum gauge and valves and the leaking rate is 6 mtorr/min in max. and 2 in stable, click the picture below to get details chart and data measured by CE cetified vacuum meter:

(For a whole 24 hours curve display, the time segment through 08:00:00~21:10:00 in X axis is passed over in the chart, therefore, steep variety in there)
|
|
Vacuum pump
|
Double Step Rotary Vane Vacuum Pump, 226L/m, with Exhaust Filter & KF-D25 Inlet - EQ-2TW-4C is included with max. vacuum pressure of 10-2 torr. Stainless steel hose tube is included for connecting to tube furnace.
|
|
Vacuum Sensor & display
|
Vacuum sensor is installed to vacuum flange of tube furnace, and connect to a digital vacuum pressure display which is installed in bottom mobile case.
|
|
Gas flow meter and pressure meter
|
1) Compact direct read flow meter, 10-100 cc/min.
2) Compact direct read flow meter, 16-160 cc/min.
3) Compact direct read flow meter, 25-250 cc/min.
- Four pressure meters are installed inside mobile cart which are able to monitor three types of flowing gases pressure as well as the pressure of mixing tank.
|
| Valve
|
Four stainless steel valves are installed in side panel of mobile cart to control mixing gases and three inlet gases separately.
|
|
Dimension
|
Furnace: 550 x 380 x 520 Bottom Mobile case: 600x600x597
|
|
Net Weight
|
about 60
|
|
Shipping weight
|
200
|
|
Shipping package size after crating
|
Two cases in one pallet: 45x45x35/ case
|
|
Warranty & Certificate
|
|
|
Notice:
( click underlined to see detail)
|
|
Operation Manual
Download Catalog
About shipping / Handling
Quick test instruction
|
Sale Price: USD$14,995.00
|
Sale Price: USD$17,995.00
| |
|
| | |
|
Your cart is empty.
Please clear the browsing history before ordering the product. Otherwise, availability and price are not guaranteed. | |
| | |
|
|
MS&T 2012, Booth# 536, Oct.9-10, 2012, Pittsburgh, PA, USA
 Nanotech 2012, Booth# 712, June 19-20, 2012, Santa Clara, California
MRS 2012 Spring Meeting, Booth# 321, Apr. 10-12, 2012, San Francisco, CA , USA
TMS 2012, Booth# 330, Mar. 12- 14, 2012, Orlando, FL, USA
APS 2012, Booth#211, Feb.27-29, 2012, Boston, MA, USA
AABC 2012, Booth #809, Feb 6-10, 2012,Orlando, FL, USA
36th ICAE/ICACC 2012, Booth#214, Jan.24-25, 2012, Daytona Beach, FL, USA
|
|
|
|
|

|
|
Notices
1. The price listed on line is valid for US market and who pay by credit card only. There will be extra cost for shipping and handling. The price is different from country to country
2. We may add extra cost for paper order and net 30 term due to extra labor cost
3. The price is subject to change without notice
|
|
|