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Single Zone Tube Furnace (80 mm Dia 1200C Max.) with Vacuum Pump (10E-2 torr) + Three Channel Gas Control by Float-meter - OTF-1200X-80-I-F3LV

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Item Number: OTF-1200X-80-I-F3LV

OTF-1200X-80-I-F3LV isCE certified split-able single zone Tube furnace with 80mm diameter quartz tube, mechanical vacuum pump and three channels gas flowing system, which can achieve vacuum up to 10-2 torr and mix 1-3  type of gases for CVD or diffusion.

Specifications:

 Furnace casing Double layer steel casing with air cooling. Built in thermostat to control Cooling running automatically when case > 55oC

 Power

 2.5 KW

 Voltage

 AC 208-240V Single Phase, 50/60 Hz

Heating Element  Fe-Cr-Al Alloy doped by Mo

 Max. Temperature

 1200  oC

 Continuous Temperature

 1100  oC

 Max. Heating Rate

 <= 20  oC /min

 Tube Size and Materials

 Quartz tube: OD: 80mm x  ID: 75 mm x Length: 1000 mm

 Heating Zone length

  400 mm

Constant temperature zone    150  (+/-1oC)

 Temperature controller

  • Two precision temperature controllers and control two zone independently

  • PID precision control by PWM solid relay

  • 30 segments programmable for any temperature profile

  • Built in protection for overheated and broken thermal couple

 Temperature Accuracy

     +/- 1 oC

 Vacuum Seal

Two stainless steel flanges with vacuum gauge and valves and the leaking rate is 6 mtorr/min in max. and 2 in stable, click the picture below to get details chart and data measured by CE cetified vacuum meter: 

(For a whole 24 hours curve display, the time segment through 08:00:00~21:10:00 in X axis is passed over in the chart, therefore, steep variety in there)

Vacuum pump
 

Double Step Rotary Vane Vacuum Pump, 226L/m, with Exhaust Filter & KF-D25 Inlet - EQ-2TW-4C  is included with max. vacuum pressure of 10-2 torr. Stainless steel hose tube is included for connecting to tube furnace.

Vacuum Sensor & display
Vacuum pressure gauges

Vacuum sensor is installed to vacuum flange of tube furnace, and connect to a digital vacuum pressure display which is installed in bottom mobile case.

Gas flow meter and pressure meter
          1) Compact direct read flow meter, 10-100 cc/min.
          2) Compact direct read flow meter, 16-160 cc/min.
          3)
Compact direct read flow meter, 25-250 cc/min.
  • Four pressure meters are installed inside mobile cart which are able to monitor three types of flowing gases pressure as well as the pressure of mixing tank.
Valve Four stainless steel valves are installed in side panel of mobile cart to control mixing gases and three inlet gases separately.

 Dimension

 Furnace: 550 x 380 x 520 Bottom Mobile case: 600x600x597

 Net Weight

 about 60

Shipping weight

 200

Shipping package size after crating

 Two cases in one pallet:  45x45x35/ case

Warranty & Certificate

  • One year limited warranty (Consumable parts such as processing tubes, o-rings and heating elements are not covered by the warranty, please order the replacement at related products below.)
  • CE Certificate

Notice:

( click underlined to see detail)

 Operation Manual  Download Catalog    About shipping / Handling      Quick test instruction

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Notices
1. The price listed on line is valid for US market  and who pay by credit card only. There will be extra cost for shipping and handling. The price is different from country to country
2. We may add extra cost for paper order and net 30 term due to extra labor cost
3. The price is subject to change without notice