Three Zones Quartz Tube Furnace (80mm Dia, 1200C Max) with Vacuum Pump (10E-2 torr) + Three Channel Gas Control by Float-meter - OTF-1200X-80-III-F3L

• Double layer steel casing with air cooling
• High purity alumina fiber insulation for max. energy saving
• Splitable cover for easy tube replacement

 Power

 5 KW

 Voltage

 AC 208-240V Single Phase, 50/60 Hz

 Max.Temperature

 1200 ^oC

 ContinuousTemperature

 250-00 ^oC

 Max. Heating Rate

 <= 20 ^oC /min

• 80 mm O.D x 72 mm ID. x 1219 mm fused quartz tube included.

• Vacuum flanges with valves and pressure gauge are includes. Click picture below to see details.

  

   
   

• Slide for transforming sample (manual operated) is available as option at $1900 extra cost (refer picture above left).

• Please click here to order 3"wafer quartz boat to anneal 3" wafer 

Heating Zone length

 Temperature controller

• Three precision temperature controllers and control two zone independently.

• PID precision control by PWM solid relay.

• 30 segments programmable for any temperature profile.

• Built in protection for overheated and broken thermal couple.

 Temperature Accuracy

     +/- 1^oC

• Two stainless steel flanges with vacuum gauge and valves are included.
• Min. vacuum pressure achieved by mechanical pump is 5.5 m-torr. ( 5.5x10^-3 torr). If use mechanical + moleculer pump, pressure can reach 10^-4 torr.
• Leaking rate is < 5 m-torr / min. and stable vacuum pressure after 24 hours is < 2 torr.
• Click the picture below to get details chart and data measured by CE cetified vacuum meter: 

  

(For a whole 24 hours curve display, the time segment through 08:00:00~21:10:00 in X axis is passed over in the chart, therefore, steep variety in there)

Vacuum pump

Double Steps Rotary Vane High Speed Vacuum Pump-2TW-4C-110v with max. vacuum pressure of 10^-2 torr. Stainless steel hose tube is included for connecting to tube furnace.

Vacuum Sensor & display

Vacuum sensor is installed to vacuum flange of tube furnace, and connect to a digital vacuum pressure display which is installed in bottom mobile case.

• Three gas flow-meters ( 4% accuracy FS) are installed inside mobile case which are able to monitor gases flowing rate (three different kinds of gases in total)

• Four pressure meters are installed inside mobile cart which are able to monitor three types of flowing gases pressure as well as the pressure of mixing tank.

 Dimension

• Furnace: 1100 X 450 x 670mm
• Bottom Mobile case: 600x600x597

 Net Weight

 about 90 Kg

Shipping weight

 245 Lbs

Shipping package size after crating

 Two cases in one pallet:  45x45x35/case

 Warranty & certificate

• One year limited warranty (Consumable parts such as processing tubes, o-rings and heating elements are not covered by the warranty, please order the replacement at related products below.) 
•   CE certified

Notice:

(click links to the right to see more detail)

• Please click here to see our typical temperature profile calibration result at various temperature.
• From 7/15/08, MTI calibrate each each furnace by NIST certificated Omega CL3515R precision Temperature calibrator, and pre-set temperature off (SC value) in controller before shipping.
• In order to obtain accurate temperature inside tube furnace, you need to calibrate temperature by yourselves. Please click here to learn how.
• How to set up ceramic tube and vacuum flange for MTI Tube furnace.