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Single Zone Tube Furnace with 6" - 8.5" Quartz Tube and Hinged Type Water Cooling Vacuum Flanges (1100 ºC , 24" heating zone) - GSL-1100X-6/8.5

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Transported by LTL Freight (Truck)

Product Options

tube size:


Upgrade to Eurotherm Temp. Controller
GSL-1100X-6/8.5 is a ready-to-pass UL/CSA (UL61010 or SPE1000 certification) furnace. It is single heating zone and adapts to various sizes of the quartz tube (6" or 8.5" outside diameter). The heating temperature is up to 1100°C. The hinged type vacuum flanges with water cooling ports built in. It is widely used for materials or chemical lab to sinter and anneal materials or semiconductor wafers under vacuum or other gases condition. The furnace is controlled by an intelligent temperature controller with accuracy +/-1°C and 30 programmable segments. 

Model GSL-1100X-6 GSL-1100X-8.5
Fused quartz tube size Quartz Tube:
152 OD x 143 IDx 1020L mm (6" x 5.6" x 40")
Quartz Tube:
216 OD x 208 IDx 1020L mm (8.5"OD x 8.2" x 40"L)

Furnace structure
  • Double layer steel casing.
  • Four cooling fans are built inside to keep temperature of outside case < 60ºC
  • High purity alumina fibrous insulation for max energy saving.
  • Two foam ceramic thermal blocks are included, which must be placed inside tube at two ends to block heat radiation


Input voltage 208 - 230VAC Single phase
power 8kW (50Amps Air Breaker is required)
Heating element NiCrAl Resistance Wire
Working Temperature
  • Max. heating temperature: 1100°C
  • Continuous working temperature: 400 -1050°C
  • Max. heating/cooling rate: 20°C/min
  • Recommended heating/cooling rate: 10°C/min
  • Typical temperature profile at 800°C (click picture below to see detail)
Heating zone
  • Total heating zone length: 600mm (24'')
  • constant temperature zone: 200mm at the center (with +/-1°C)
Temperature Controller
  • One Precision digital controller with PID function and 30 segments programmable
  • Secondary temperature monitor has function of protection from over-temperature and broken thermocouple
  • K type thermocouple
  • Temperature accuracy: +/-1°C
    • Advanced Temperature Control (Optional)
    • MTS02-Y Temperature control software kit (for YD518P series controllers) + 15" laptop package is available at the options bar. Click for the detail information about the MTS02-Y software kit. 
    • You may upgrade the temperature controller to the Eurotherm 3504 Temperature Controller which is fully compatible with LabVIEW. This package includes a Eurotherm 3504 programmer, a communication cable (RS485 - USB) and a software CD. Click the pic below to view the full spec of Eurotherm 3504 temperature controller. 


Vacuum & Fitting Ports
  • One pair of hinged type stainless steel vacuum seal flange with water cooling ( see Pic.1 )
  • One Digital Vacuum Gauge - EQ-CVM-221, two stainless steel needle valves & 1/4" hose fittings, KF40 vacuum port and 1/4'' feedthrough (see Pic. 2 and Pic. 3). Vacuum pressure limit: depended on the vacuum pump. (Usually 10-2 torr by mechanical pump).
                Pic.1              Pic. 2                     Pic. 3
Water Chiller (Optional)

  • Cooling water is required.
  • Please make sure the flow rate of cooling water is ≥ 10L/min, water temp. < 25ºC; pressure > 25 PSI.
  • We suggest using the EQ-KJ5000 Series recirculating water chiller as a cooling system (please order separately here) to save water.  

Product dimension 1000L x 680W x 920 H  mm
Net weight 250Kg
Shipping dimension 60" x 60" x 55"
Shipping weight 350Kg
Warranty One-year limited warranty (Consumable parts such as processing tubes, o-rings and heating elements are not covered by the warranty, please order the replacement at related products below.)
  • CE Certified
  • All electric components ( >24V) are UL / MET / CSA certified
  • The furnace is ready to pass TUV(UL61010) or CSA certification at extra cost. ( please click marks below to learn details) 
Application Notes

                     Click here to learn the installation of a gas regulator
  • Tube furnaces with quartz tubes are designed for using under vacuum and low pressure <  0.2 bar / 3 psi / 0.02 MPa    or   0.12 MPa (absolute pressure).
  • Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation. Click here to learn the installation of a gas regulator.
  • Never heat furnace at positive pressure and close outlet valve condition. Once watch pressure gauge on furnace during heating, once pressure is over  3 PSI please open release valve immediately
  • Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used up to 1000°C
  • The flow rate for gasses should be limited to<200 SCCM (or 200ml/min) for reducing thermal shocks to the tube.
  • Please use the manual torque wrench to tighten all flange screws to avoid overpressure incidents. The recommended torque is 45 inch-lbs at max.

Demo Video
           -- Furnace in operation
No. Description Quantity Picture GSL-1100X-6-S-UL GSL-1100X-8.5-S-UL
01 Quartz tube 1 pc 152 O.D x 143 I.D x 1300mm L
(6" O.D x 5.6" I.D x 51" L)
216 O.D x 206 I.D x 1300mm L
(8.5" O.D x 8.1" I.D x 51" L)
02 Quartz Thermal Block 1 pair


03 O ring for inner flange
2 pcs EQ-SOR-152 EQ-SOR-213
04 O ring for flange cap
4 pcs EQ-SOR-168 EQ-SOR-230
05 KF-40 quick clamp 2 pcs


06 KF-40 right angle vacuum valve 1 pcs


07 KF-40 Blank flange 2 pcs EQ-KF-BF
08 Manual torque wrench to prevent overtighten 1 set

Part No. Description Quick Link


KF-D40 series Vacuum Suite(vacuum pump, vacuum ball valve, vacuum bellows, quick clamps, KF adapter, KF40-25 Reducer )
The items in the suite can be purchased individually.


Computerized temperature Control System
  High vacuum station (Mechanical pump + turbo molecular pump)
  Gas mix station (Float flow meter / Mass flow meter)(2, 3, 4channels selectable)
  Quartz Boats /curcible /container /sample holder

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