Browse Categories
Search

Bench-Top Double Side Lapping / Polishing Machine for Max. 2" wafer - EQ-Unipol-160D

Click to enlarge
In stock
Item Number: EQ-Unipol-160D
Transported by LTL Freight (Truck)
EQ-UNIPOL-160D machine is a bench-top precision double side lapping and polishing machine. It can lap and polish 4 pieces of wafers up to 2" in both side at the same time, and achieves TTV less than one micron in 2" diameter area. It is an idea tool to prepare Si, Ge and oxide single crystal wafer with 2" diameter or less in the laboratory.

SPECIFICATIONS
Lapping Plate Dimensions 225 x  94 x 15mm (Outer dia. x Arbor dia. x Thickness)
Weight of Upper Lapping Plate and Balance 5.5kg (3kg for balance weight)
Gearing Template Specification z=54 m=1.5  dia.81mm (metric)
Number of Gearing Templates for Simultaneous Use 4



Product Images
                                                                            
Bottom Stainless Steel Lapping Plate     Top Stainless steel Lapping Plate     Three Templates to hold various size wafer
Largest Work Piece Size Dia. 60mm; thickness 15mm
Accuracy of Fatness and Parallelism 0.001mm
Accuracy of Lapping and Polishing +/-0.001mm
Surface Finish > grade 10
Input Power Single phase 220V
Motor DC/600W
Dimensions 615x375x494mm
Net Weight 80kg



Note

Four pieces of gearing templates are required for double sides polishing. (MTI can provide the gearing template with various hole size at extra cost (~$30/template). One template can hold sample as the follows:

  • One 60 mm or 2" diameter wafer
  • 3 pcs or less 1" diameter wafer
  • 14 pcs or less 10x10mm substrate

 To get a quote for gearing template please let us know wafer size and final thickness to be polished.

Compliance CE Certified
Operation Instructions

Warranty
  • One year limited warranty with lifetime support
  • Rusting and damage due to improper storage condition or maintenance is not covered by warranty

STANDARD PACKAGE

Item No.

Description

Qty

Pictrue

 EQ-unipol-160D-01
 Polishing plate

2

  
 EQ-unipol-160D-02
Lapping plate

2

   

EQ-unipol-160D-03

Polishing template gear

4

 

EQ-unipol-160D-04

Polymide polishing pad

2

   

EQ-unipol-160D-05

Poromeric polishing pad

2

  

EQ-unipol-160D-06

Axle key holders (pre-install in the upper polishing plate)

2

  

EQ-unipol-160D-07

Ring feeding channel (pre-install in the upper polishing plate)

1

  

EQ-unipol-160D-08

Ring weight

3

   

EQ-unipol-160D-09

Water pipes

2

 

EQ-unipol-160D-10

10A Fuse

2

 

EQ-unipol-160D-11

Screw drivers

2

 

EQ-unipol-160D-12

Power cord

1

 

 

Related Products

Shopping Cart
Your cart is empty.
Please clear the browsing history before ordering the product. Otherwise, availability and price are not guaranteed.
Mailing Lists
Upcoming Shows:

MRS Spring 2014, booth# 511, Apr 21-24, 2014, San Francisco, CA, USA

Energy Mobility 2014, booth# 148, Apr 29-30, 2014, San Diego, CA, USA

ECS Spring 2014, booth# 121, May 13-14, 2014, Orlando, FL, USA



Click here to see our past conferences

 
 

Notices
1. Prices listed online are valid for US market and who pay by credit card only. There will be extra charges for shipping & handling. Price various from country to country.
2. We may add extra charges for paper order and net30 terms due to extra labor cost.
3. The prices listed are subject to change without notice.