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1100°C Vacuum Chamber Furnace (7.5"ID x 8.5"Depth, 7.6 Liter ) with 30 Segment Programable Temperature Controller - VBF-1200X-H8

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Item Number: VBF-1200X-H8
VBF-1200X-H8 is a CE certified vacuum chamber furnace with 7.5" ID x 13.4"L heated quartz chamber in horizontal position.  Water-cold stainless steel vacuum flange and valve are installed to achieve 10-2 to 10-5  torr via mechanical or molecular vacuum pump  . It is designed for calcining or annealing semiconductor wafer up to 6"  under vacuum or various gas atmosphere up to 1100°C. 
 
Specifications
Working Temperature
  • <=    1000 °C continuously
  • Max.  1100 °C,  < 30 minutes 
Heating Element
  High quality Ni-Cr-Al resistance wire as heating element and can be heated up to 1200°C.
Quartz tube size &  Effective Heating Area

  

 

  Tube size: 8" O.D. x 7.5" I.D x 13.4" L.
  Heating area:
7.5" ID x 8.5" Depth (7.6Liter)
  Uniform Temperature zone:  4"dia x 3.5" depth in center position within +/- 5ºC
  Quartz tube is replaceable  ( click picture left to order spare tube )
Temperature controller
  Built in 30 segments programmable digital temperature controller provides the precision control of heating rate, cooling rate and dwell time.
Please click the pic to enlarge.

Note: To achieve fully temperature computerization please order a set of MTS-02 control module. If you order the control module with the furnace we will install and test it before we ship out the product. We recommend you order computer (laptop) from us. More information please click here.
   Uniformity
+/- 2°C
  
 
Vacuum flange  ( water cold )
 

 

  • Stainless steel vacuum flange with double high temperature silicone O-ring at front door.
  • One needle valve built on the flange is for gas inlet.
  • One KF25D port on left side of furnace  is for connection with vacuum pump.
  • The water cooling jacket has been installed in the flange. The inlet and outlet ports are located on the left side of the furnace for connecting to the water chiller through two 12 mm dia. polyurethane tubes (the water chiller needs to be order separately. Please click here to review detail info of the water chiller.)
  • The Quartz Thermal Block must be placed inside the chamber during operation to avoid the silicone o-ring being damaged by the heat radiation when the temperature is higher than 300°C
  • A Quartz Thermal Block included is filled with fibrous alumina inside  and it will provide excellent clean environment and vacuum pressure.
  • Optional:   If using the furnace for flat sample, you may order flat sample order  as picture below

Digital Vacuum Gauge & KF25 Fitting

Vacuum pressure

Vacuum Level is depended on vacuum pump,  connected pipe, inside refractory block's materials etc.  By using KFD25, stainless steel pipe, MTI two stage mechanical pump and KF25 Ball valve, the furnace can achieve vacuum level as the follows:

  • 30 m- torr(10-2 torr)via two stages mechanical pump within 30 minutes without the Quartz Thermal Block.
  • 60 m- torr(6x10-2 torr)via two stages mechanical pump within 30 minutes with the Quartz Thermal Block at 900C.
  • Vacuum leak rate at room temp. 125 mtorr/hour
Optionals: 
  • Vacuum pump  and pipe are not included, please click bold order it separately.
  • If you want to achieve higher vacuum (<10-5 torr or better)  you must 
  • Spare seal oring is available at extra cost ( click picture below )

          

  • Gas flow and pressure
    • There is a gas inlet (1/4" house adapter )  with a valve on left side of furnace ( see picture left )
    • Inert gas and oxygen gas flow can be achieved via the inlet . (Attention: MTI does not recommend using our products under hazardous conditions. We are not liable for any damage incurred under hazardous conditions. If you intend to use hydrogen, however, we feel it's prudent to place the furnace under fume hood.)
    • Max. gas pressure shall be less than 1.2 atm.
    • You may choose gas mixer to deliver multi-gases to control gas composition and flow-rate (click pictures below to order separately).

                    New Version front panel        

    Power Supply
    Single phase 208 - 240 VAC / 50/60Hz, 3000 W max. (20 A breaker required)
    Overall Dimension
    510 x 435 x 425mm
    Net Weight
    80 kg
    Shipping Weight
    200 lbs
    Shipping Volume
    45x28x35"
    Warranty
    One year limited warranty (Consumable parts such as processing tubes, o-rings and heating elements are not covered by the warranty, please order the replacements at related products below.)
    Certificate      CE certified
     
     

    Optional Parts for Vacuum and Sample Loading 

        

     In order to achieve higher vacuum , it is highly recommended to  order the vacuum package including: vacuum pump, stainless steel pipe,  ball valve with KFD25 port, clamp to set up the system, please check the item list below to see product details 

    Description

    Quantity

    links

    Unit Price

    Vacuum Pump, Two Steps Rotary Vane High Speed Vacuum Pump(226 L/m) with Two Stage Exhaust System & KF-25 Adapter (110V or 220V)

    1

     

    USD$1195.00

    Compact Turbomolecular Vacuum Pump Station (up to 1E-7 mbar) with Gauge, Ball Valve & SS Bellows - Made in Germany - EQ-PV-HVS

    1

    USD$9850.00

    KF-25 Flexible Stainless Steel Vacuum Hose ( Bellows ), 600mm - EQ-KF-Pipe-D25-600

    1

       

    USD$129.95

    Quick Clamp with Rubber O-Ring for KF-25 Vacuum adapter

    USD$29.95

    6" wafer quartz boat in VBF1200  Furnace is able to carry 25 pieces of 6'' dia. wafe for diffusion, oxidation and annealing process.

    1

    USD$398.00

    Quartz Platform (8.6'' L x 6.4'' W x 2'' H) for Placing Samples - EQ-QF-0806 1
    USD$959.00

    Compact Recirculating Water Chiller with 4 Liter Tank, 4L/min Flow - EQ-CCA1110

    1

    USD1695.00
     
     
     

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    Notices
    1. The price listed on line is valid for US market  and who pay by credit card only. There will be extra cost for shipping and handling. The price is different from country to country
    2. We may add extra cost for paper order and net 30 term due to extra labor cost
    3. The price is subject to change without notice