|
1100°C Vacuum Chamber Furnace (7.5"ID x 8.5"Depth, 7.6 Liter ) with 30 Segment Programable Temperature Controller - VBF-1200X-H8
|
Click to enlarge
|
In stock
Item Number: VBF-1200X-H8
|
VBF-1200X-H8 is a CE certified vacuum chamber furnace with 7.5" ID x 13.4"L heated quartz chamber in horizontal position. Water-cold stainless steel vacuum flange and valve are installed to achieve 10-2 to 10-5 torr via mechanical or molecular vacuum pump . It is designed for calcining or annealing semiconductor wafer up to 6" under vacuum or various gas atmosphere up to 1100°C.
|
Specifications
|
| Working Temperature
|
|
|
Heating Element
|
High quality Ni-Cr-Al resistance wire as heating element and can be heated up to 1200°C.
|
|
Quartz tube size & Effective Heating Area
|
Tube size: 8" O.D. x 7.5" I.D x 13.4" L.
Heating area: 7.5" ID x 8.5" Depth (7.6Liter)
Uniform Temperature zone: 4"dia x 3.5" depth in center position within +/- 5ºC
Quartz tube is replaceable ( click picture left to order spare tube )
|
|
Temperature controller
|
Built in 30 segments programmable digital temperature controller provides the precision control of heating rate, cooling rate and dwell time.
Please click the pic to enlarge.
Note: To achieve fully temperature computerization please order a set of MTS-02 control module. If you order the control module with the furnace we will install and test it before we ship out the product. We recommend you order computer (laptop) from us. More information please click here.
|
|
Uniformity
|
+/- 2°C
|
|
Vacuum flange ( water cold )
|
-
Stainless steel vacuum flange with double high temperature silicone O-ring at front door.
-
One needle valve built on the flange is for gas inlet.
-
One KF25D port on left side of furnace is for connection with vacuum pump.
- The water cooling jacket has been installed in the flange. The inlet and outlet ports are located on the left side of the furnace for connecting to the water chiller through two 12 mm dia. polyurethane tubes (the water chiller needs to be order separately. Please click here to review detail info of the water chiller.)
- The Quartz Thermal Block must be placed inside the chamber during operation to avoid the silicone o-ring being damaged by the heat radiation when the temperature is higher than 300°C
-
A Quartz Thermal Block included is filled with fibrous alumina inside and it will provide excellent clean environment and vacuum pressure.
-
Optional: If using the furnace for flat sample, you may order flat sample order as picture below

|
|
Digital Vacuum Gauge & KF25 Fitting

|
|
|
Vacuum pressure
|
Vacuum Level is depended on vacuum pump, connected pipe, inside refractory block's materials etc. By using KFD25, stainless steel pipe, MTI two stage mechanical pump and KF25 Ball valve, the furnace can achieve vacuum level as the follows:
Optionals:
Vacuum pump and pipe are not included, please click bold order it separately.
If you want to achieve higher vacuum (<10-5 torr or better) you must
Spare seal oring is available at extra cost ( click picture below )
|
|
Gas flow and pressure
|
-
There is a gas inlet (1/4" house adapter ) with a valve on left side of furnace ( see picture left )
-
Inert gas and oxygen gas flow can be achieved via the inlet . (Attention: MTI does not recommend using our products under hazardous conditions. We are not liable for any damage incurred under hazardous conditions. If you intend to use hydrogen, however, we feel it's prudent to place the furnace under fume hood.)
-
Max. gas pressure shall be less than 1.2 atm.
-
You may choose gas mixer to deliver multi-gases to control gas composition and flow-rate (click pictures below to order separately).

|
|
Power Supply
|
Single phase 208 - 240 VAC / 50/60Hz, 3000 W max. (20 A breaker required)
|
|
Overall Dimension
|
510 x 435 x 425mm
|
|
Net Weight
|
80 kg
|
|
Shipping Weight
|
200 lbs
|
|
Shipping Volume
|
45x28x35"
|
|
Warranty
|
One year limited warranty (Consumable parts such as processing tubes, o-rings and heating elements are not covered by the warranty, please order the replacements at related products below.)
|
| Certificate
|
CE certified
|
|
Optional Parts for Vacuum and Sample Loading
|
|
In order to achieve higher vacuum , it is highly recommended to order the vacuum package including: vacuum pump, stainless steel pipe, ball valve with KFD25 port, clamp to set up the system, please check the item list below to see product details
|
|
Description
|
Quantity
|
links
|
Unit Price
|
|
Vacuum Pump, Two Steps Rotary Vane High Speed Vacuum Pump(226 L/m) with Two Stage Exhaust System & KF-25 Adapter (110V or 220V)
|
1
|
|
USD$1195.00
|
|
Compact Turbomolecular Vacuum Pump Station (up to 1E-7 mbar) with Gauge, Ball Valve & SS Bellows - Made in Germany - EQ-PV-HVS
|
1
|

|
USD$9850.00
|
|
KF-25 Flexible Stainless Steel Vacuum Hose ( Bellows ), 600mm - EQ-KF-Pipe-D25-600
|
1
|
|
USD$129.95
|
|
Quick Clamp with Rubber O-Ring for KF-25 Vacuum adapter
|
2
|
|
USD$29.95
|
|
6" wafer quartz boat in VBF1200 Furnace is able to carry 25 pieces of 6'' dia. wafe for diffusion, oxidation and annealing process.
|
1
|

|
USD$398.00
|
| Quartz Platform (8.6'' L x 6.4'' W x 2'' H) for Placing Samples - EQ-QF-0806
|
1
|
|
USD$959.00
|
|
Compact Recirculating Water Chiller with 4 Liter Tank, 4L/min Flow - EQ-CCA1110
|
1
|
|
USD1695.00
|
|
Sale Price: Starting at USD$1,290.00
|
Sale Price: USD$12,995.00
|
|
Sale Price: USD$19,995.00
| | |
|
| | |
|
Your cart is empty.
Please clear the browsing history before ordering the product. Otherwise, availability and price are not guaranteed. | |
| | |
|
|
MS&T 2012, Booth# 536, Oct.9-10, 2012, Pittsburgh, PA, USA
 Nanotech 2012, Booth# 712, June 19-20, 2012, Santa Clara, California
MRS 2012 Spring Meeting, Booth# 321, Apr. 10-12, 2012, San Francisco, CA , USA
TMS 2012, Booth# 330, Mar. 12- 14, 2012, Orlando, FL, USA
APS 2012, Booth#211, Feb.27-29, 2012, Boston, MA, USA
AABC 2012, Booth #809, Feb 6-10, 2012,Orlando, FL, USA
36th ICAE/ICACC 2012, Booth#214, Jan.24-25, 2012, Daytona Beach, FL, USA
|
|
|
|
|

|
|
Notices
1. The price listed on line is valid for US market and who pay by credit card only. There will be extra cost for shipping and handling. The price is different from country to country
2. We may add extra cost for paper order and net 30 term due to extra labor cost
3. The price is subject to change without notice
|
|
|