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High Vacuum Chamber (18"x17" x20" ) For DIY Sputtering coating system (w/ up to 5 sputtering sources) - HVC-SS


In stock
Item Number: HVC-SS

Personalization

MTI provides pre-built high vacuum box chamber. This vacuum chamber can be customized to be a sputtering coater system (up to 5 sputtering sources) and other systems such as CVD, ALD, etc. It also can be used as high vacuum storage box.



Chamber
  • Vacuum chamber is made of 304 stainless steel with reinforcing rib 
  • Inside vacuum chamber size:  470mm L×445mm D×522mm H  (~ 105 Liters , 18.5“x17.5"x 20.5")
  • Round 380 mm Dia. hinged type door with 150 mm Dia glass window
  • Vacuum sealed 150mm diameter glass window is installed on the front door for easy observation
  • Silicone O-ring can be used for all vacuum seals.
  • Temperature range: -15 to 150°C
                Vacuum Pressure

                Ports and fitting

                • One KF40 port built on the right side of the chamber to connect to the vacuum pump.
                • Four KF25 ports built in the chamber, 3 in left and one in right
                • Three 1/4" BSPP fittings with needle valve are installed for gas inlet & outlet ( 2 at the back and 1 on the left)
                • One 1/8 NPT port installed on top of the chamber to connect a vacuum gauge.
                • Top plate is removable to made customized port and fitting
                • Customer fitting and port are available upon request
                   
                Application Sputtering coating system:
                A complete sputtering coating system consists of five parts. Vacuum chamber, sputtering heads, sputtering power supply (DC or RF), pumping system (mechanical pump or turbo pump) and water cooling system
                This vacuum chamber is able to install a single or multiple sputtering heads (up to 5). Maximum up to three 2" heads or five 1" heads. Please contact us regarding the number of sputtering heads and size. We will pre-fabricate the vacuum chamber and install the sputtering heads. 
                       
                The above pic shows a complete RF/DC (switchable) sputtering coating system by using this vacuum chamber. Single sputtering is equipped. w/ Mechanical + turbo pumping system.
                Application Case 
                (Please email us for quote)
                • Optional 1' or 2" sputtering heads (up to 5 sputtering sources)
                •      
                             HVC-SS-1                        HVC-SS-2                       HVC-SS-2-II

                Optionals

                • Please click picture below left 1- 2  to choose vacuum gauge at extra cost
                • Please click picture right to choose a vacuum pump station, which the vacuum chamber can be put on its top
                           (click to see other components)

                Dimension

                                       

                Operation

                Warranty

                • Three years limited warranty

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                Notices
                1. Prices listed online are valid for US market and whom pay by credit card only. There will be extra charges for shipping & handling. Price various from country to country.
                2. We may add extra charges for paper order and net30 terms due to extra labor cost.
                3. The prices listed are subject to change without notice.