1100°C Max 8“OD（7.6 L）Vacuum Chamber Furnace with Feedthrough flange - VBF-1200X-H8

Power

• Voltage: Single-phase 208 - 240 VAC / 50/60Hz, (20 A breaker installed)
• 3 KW max. 
• Note： Power cable included but without the plug. Please install a plug on your own or click the link below the picture to choose a plug according to your country or your lab  requirement

Working Temperature

• <= 1000 °C continuously

• Max. 1100 °C, < 30 minutes
• Temperature Uniformity: +/- 2°C
• Note: <= 1150 °C continuously is available upon request by GE214 grade quartz tube at the extra cost

Heating Rate

• Max. 20°C/ min
• Recommended. 10°C/ min

Heating Elements    

• High-quality Ni-Cr-Al resistance wire 

Quartz Tube & Effective Heating    

• Tube size: 8" O.D. x 7.5" I.D. x 13.4" L. 

• Heating Zone (Inside Quartz Tube): 7.5" ID x 8.5" Depth (7.6Liter)

• Uniform Temperature zone:  6"Dia x 3.5" depth in center position within +/- 5ºC

• The quartz tube is replaceable  ( click picture left to order spare tube )
  

• Stainless steel water-cooled flange assembly with two quick-connect ports. All of the seals are provided by silicone o-rings. 
• Multi-function of the quick-connect ports via 1/4" OD bored alumina tubes.
  
• Gas inlet/outlet near the sample surface. (Fig. A, B, C)
• Thermocouple feedthrough (Fig. A, B, C, D); Optional K type 1/4"ODx18" L 
• Electric feedthrough. eg. Four probe resistance measurements (Fig. D)
  
• One bored Al2O3 foam refractory block (190Dia *  50mm) is provided. (Fig. F)
• Thermocouple or electric Alumina Feedthrough (O.D 6.35mm, I.D 4.0 mm, L 300mm) is available upon request    (Since Apr 2016)
• Mechanical Vacuum Gauge (included as standard accessory), which ranges from -0.1 to 0.15Mpa.

Fig. A

  Fg. B     Fig. C      Fig. C     Fig. F

• One gas purging inlet (1/4" hose adapter ) with a valve is on the left side of the furnace 
• The inert gas can be introduced into the chamber via the inlet for purging purposes. 
• If a continuous gas flow is needed, refer to the additional gas inlet and thermocouple probe below.
• A water cooling jacket has been built inside the flange to protect the vacuum sealing O-tings. The inlet and outlet ports located on the left side of the furnace are used for connecting to a water chiller through two 12 mm Dia. polyurethane tubes (16L/minute water flow is required). Please click the picture left to order the water chiller.
• A water chiller is required for heating temperatures above 500°C (thermal block is placed)

• NRTL-certified digital temperature controller is included.
• Proportional–integral–derivative control (PID control) and auto-tune function
• 30 segments programmed with ramping, cooling, and dwelling steps
• Built-in over-temperature alarm and thermocouple failure alarm
• +/- 1 ºC temperature control accuracy
• ThE Default DB9 PC communication port is included for connecting to a PC
• Eurotherm Temperature Controller is available at an extra cost with +/-0.1°C accuracy. 

• Digital Pressure Gauge (optional) A gas-type independent(above 10 mbar) digital vacuum gauge with a wide range between 3.8x10^-5 to 1125 Torr. ( Click Pic. 1 to order )
• You may choose a gas mixer to deliver multiple gasses with control over gas composition and flow rate (click pictures below to order separately).
  Pic. 1Pic. 2

• The sample holder is not included in the furnace. You may check Pic. 1 below to order 
• You may order quartz wafer boat to anneal wafer up to 6" ( Pic.2)
• Optional Quartz Thermal Block is available upon request as the refractory block, which can help achieve a higher vacuum level and avoid potential contamination problems, please order Quartz Thermal Block.
• A 4-holes 1/4" Alumina Tube can be used for inserting 4 wires (e.g. Pt wires) through the holes for measuring the electrical properties at the high temperature at extra cost.
  

   

                   

   

Vacuum Pressure

• Vacuum Level is dependent on the vacuum pump used, connected pipe, interior refractory block's materials, etc. By using KFD25, stainless steel pipe, MTI's two-stage mechanical pump, and KF25 Ball valve, the furnace can achieve vacuum levels below:
• 10^-2 torr via mechanical pump within 30 minutes
• 10^-4  torr via turbo-pump within 30 minutes with the Quartz Thermal Block at 900C
• Optional: 
• The vacuum pump and pipe are not included, please click on the picture below to order.
• For achieving a higher vacuum level, a Turbopump is necessary. 
• Spare sealing O-ring is available at extra cost ( click 2nd picture to left below )
•  KF25 Right-Angle Valve for quick connection to KF25 Bellows (click the picture 3 below ).

                         

   

Overall Dimensions

700mm(L) x 440mm(W) x 435mm(H)          

Net Weight

80 kg

Shipping Weight

240 lbs

Shipping Volume

47"(L) x39"(W) x47"(H) 

Warranty

• One-year limited warranty with lifetime support (consumable parts such as processing tubes, and O-rings are not covered by the warranty, please order replacements at related products below.).  
• ATTENTION: Any damages caused by the use of corrosive and acidic gasses are not under the coverage of MTI One Year Limited Warranty.

Compliance
  

• CE Certified
• NRTL or CSA certification is available upon request at extra cost.
• Patten Number: ZL-2011-2-0102249.4 SINCE  2011-5-19

Warning  

Click here to learn the installation of a gas regulator

• Tube furnaces with quartz tubes are designed for use under vacuum and at low-pressure <  0.2 bars 
• Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation. Click here to learn the installation of a gas regulator. 
• Never heat the furnace while the gas release valve is closed when a positive pressure condition exists within the furnace chamber. 
• Max. 1000°C is limited on all quartz tube furnaces under vacuum to avoid the quartz tube's deformation.
• The flow rate for gasses should be limited to < 200 SCCM to reduce thermal shocks
  

Operation Demo Video