Browse Categories
Search

1100°C Max 8“OD(7.6 L)Vacuum Chamber Furnace with Feedthrough flange - VBF-1200X-H8


Transported by LTL Freight (Truck)

Product Options

Vacuum Gauge:

Personalization

Upgrade to Eurotherm Temperature controller
VBF-1200X-H8 is a compact vacuum furnace. It equips a 7.5" ID x 13.4"L Quartz tube chamber sitting horizontally. Water-cooled stainless steel vacuum flanges with valves are installed to achieve a vacuum of up to10-5 Torr via turbopump. It is designed for calcining or annealing semiconductor wafers (up to 6") under vacuum or various other gas atmospheres with a temperature of up to 1100°C. It also can also be used as a vacuum brazing furnace.
SPECIFICATIONS

Power

  • Voltage: Single-phase 208 - 240 VAC / 50/60Hz, (25 A breaker installed)
  • 3 KW max. 
  • Note: Power cable included but without the plug. Please install a plug on your own or click the link below the picture to choose a plug according to your country or your lab  requirement


Working Temperature

  • <= 1000 °C continuously

  • Max. 1100 °C, < 30 minutes
  • Temperature Uniformity: +/- 2°C
  • Note: <= 1150 °C continuously is available upon request by GE412 grade quartz tube at the extra cost

Heating Rate

  • Max. 20°C/ min
  • Recommended. 10°C/ min

Heating Elements    

  • High-quality Ni-Cr-Al resistance wire 

Quartz Tube & Effective Heating    

  • Tube size: 8" O.D. x 7.5" I.D x 13.4" L. 

  • Heating area: 7.5" ID x 8.5" Depth (7.6Liter)

  • Uniform Temperature zone:  6"Dia x 3.5" depth in center position within +/- 5ºC

  • The quartz tube is replaceable  ( click picture left to order spare tube )


Vacuum Flange



Note: The standard flange door has upgraded to feedthrough type on Feb 15, 2016.


  • Stainless steel water-cooled flange assembly with two quick-connect ports. All of the seals are provided by silicone o-rings. 
  • Multi-function of the quick-connect ports via 1/4" OD bored alumina tubes.
    • Gas inlet/outlet near the sample surface. (Fig. A, B, C)
    • Thermocouple feedthrough (Fig. A, B, C, D); Optional K type 1/4"ODx18" L 
    • Electric feedthrough. eg. Four probe resistance measurements (Fig. D)
  • One bored Al2O3 foam refractory block (190Dia *  50mm) is provided. (Fig. F)
  • Thermocouple or electric Alumina Feedthrough (O.D 6.35mm, I.D 4.0 mm, L 300mm) is available upon request    (Since Apr 2016)
  • Mechanical Vacuum Gauge (included as standard accessory), which ranges from -0.1 to 0.15Mpa.
      Fig. A   Fg. B     Fig. C      Fig. C     Fig. F
Gas Inlet and Outlet & Water cooling
   
  • One gas purging inlet (1/4" hose adapter ) with a valve is on the left side of the furnace 
  • The inert gas can be introduced into the chamber via the inlet for purging purposes. 
  • If a continuous gas flow is needed, refer to the additional gas inlet and thermocouple probe below.
  • A water cooling jacket has been built inside the flange to protect the vacuum sealing O-tings. The inlet and outlet ports located on the left side of the furnace are used for connecting to a water chiller through two 12 mm Dia. polyurethane tubes (16L/minute water flow is required). Please click the picture left to order the water chiller.
  • A water chiller is required for heating temperature above 500°C (thermal block is placed)
Temperature Controller

     
  • NRTL certified digital temperature controller is included.
  • Proportional–integral–derivative control (PID control) and auto-tune function
  • 30 segments programmed with ramping, cooling, and dwelling steps
  • Built-in over-temperature alarm and thermocouple failure alarm
  • +/- 1 ºC temperature control accuracy
  • THE Default DB9 PC communication port included for connecting to a PC
  • Eurotherm Temperature Controller is available at an extra cost with +/-0.1°C accuracy. 
Options
   

  • Digital Pressure Gauge (optional) A gas-type independent(above 10 mbar) digital vacuum gauge with a wide range between 3.8x10-5 to 1125 Torr. ( Click Pic. 1 to order )
  • You may choose a gas mixer to deliver multiple gasses with control over gas composition and flow rate (click pictures below to order separately).
    Pic. 1New Version front panelPic. 2
Options
  • The sample holder is not included with the furnace. You may check Pic. 1 below to order 
  • You may order quartz wafer boat to anneal wafer up to 6" ( Pic.2)
  • Optional Quartz Thermal Block is available upon request as the refractory block, which can help achieve a higher vacuum level and avoid potential contamination problems, please order Quartz Thermal Block.
  • A 4-holes 1/4" Alumina Tube can be used for inserting 4 wires (e.g. Pt wires) through the holes for measuring the electrical properties at the high temperature at extra cost.
                                                                                                     
        sample holder              Quartz boat for wafer                Quartz Thermal Block                        4 wires feedthrough 



Vacuum Pressure





  • Vacuum Level is dependent on the vacuum pump used, connected pipe, interior refractory block's materials, etc. By using KFD25, stainless steel pipe, MTI's two-stage mechanical pump, and KF25 Ball valve, the furnace can achieve vacuum levels below:
    • 10-2 torr via mechanical pump within 30 minutes without thermal Block
    • 10-4  torr via turbo-pump within 30 minutes with the Quartz Thermal Block at 900C
  • Optional: 
    • The vacuum pump and pipe are not included, please click on the picture below to order.
    • For achieving a higher vacuum level, a Turbopump is necessary. 
    • Spare sealing O-ring is available at extra cost ( click 2nd picture to left below )
    •  KF25 Right-Angle Valve for quick connection to KF25 Bellows (click the picture 3 below ).
                             

Overall Dimensions

700mm(L) x 440mm(W) x 435mm(H)          

Net Weight

80 kg

Shipping Weight

200 lbs

Shipping Volume

45"(L) x28"(W) x35"(H) 


Warranty

  • One-year limited warranty with lifetime support (consumable parts such as processing tubes, and O-rings are not covered by the warranty, please order replacements at related products below.).  
  • ATTENTION: Any damages caused by the use of corrosive and acidic gasses are not under the coverage of MTI One Year Limited Warranty.

Compliance
  

  • CE Certified
  • NRTL or CSA certification is available upon request at extra cost.
  • Patten Number : ZL-2011-2-0102249.4 SINCE  2011-5-19

    Warning  


    Click here to learn the installation of a gas regulator

    • Tube furnaces with quartz tubes are designed for use under vacuum and at low-pressure <  0.2 bars 
    • Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation. Click here to learn the installation of a gas regulator. 
    • Never heat the furnace while the gas release valve is closed when a positive pressure condition exists within the furnace chamber. 
    • Max. 1000°C is limited on all quartz tube furnaces to avoid the quartz tubes' deformation.
    • The flow rate for gasses should be limited to < 200 SCCM for reducing thermal shocks

    Operation Demo Video

    Related Products

    Shopping Cart
    Your cart is empty.
    Please clear the browsing history before ordering the product. Otherwise, availability and price are not guaranteed.
    Mailing Lists
    MTI sponsorships:
    MTI Sponsors Thermoelectrics Workshop

    MTI-UCSD Battery Fabrication Lab

    MTI-VISTEC Cylindrical Cell  Pilot Line

    MTI Sponsors the Postdoctoral Awards

    Upcoming Shows:

    AABC USA 2021 December 7 - 9 San Diego CA Booth 429

    2021 MRS Fall Meeting November 28 - December 3 Boston MA Booth 901

    Recent Attended Shows:
    IMAT Virtual Edition October 26 - 28

    TMS 2020 Feb 23 - 27 San Diego CA Booth 700


    AABC Europe Jan 12 - 16 Wiesbaden Germany


    Click here to see our past conferences

     

    Notices
    1. Prices listed online are valid for the US market and who pay by credit card only. There will be extra charges for shipping & handling. Price various from country to country.
    2. We may add extra charges for paper order and net30 terms due to extra labor costs.
    3. The prices listed are subject to change without notice.