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1100°C Max 8“OD(7.6 L)Vacuum Chamber Furnace with Feedthrough flange - VBF-1200X-H8


Transported by LTL Freight (Truck)

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UL/CSA/CE Certifications:
Vacuum Gauge:
VBF-1200X-H8 is a compact vacuum furnace. It equips a 7.5" ID x 13.4"L Quartz tube chamber sitting horizontally. Water-cooled stainless steel vacuum flanges with valves are installed to achieve a vacuum up to10-5 Torr via turbopump. It is designed for calcining or annealing semiconductor wafers (up to 6") under vacuum or various other gas atmospheres with a temperature up to 1100°C. It also can also be used as a vacuum brazing furnace for fusing small parts.

SPECIFICATIONS

Power

  • Voltage: Single-phase 208 - 240 VAC / 50/60Hz, (25 A breaker installed)
  • 3 KW max. 
  • Note: Power cable included but without the plug. Please install a plug by your own or click link below the picture to choose a plug according to your country or your lab  requirement


Working Temperature

  • <= 1000 °C continuously

  • Max. 1100 °C, < 30 minutes
  • Temperature Uniformity: +/- 2°C

Heating Rate

  • Max. 20°C/ min
  • Recommended. 10°C/ min

Heating Elements    

  • High-quality Ni-Cr-Al resistance wire 

Quartz Tube & Effective Heating    

  • Tube size: 8" O.D. x 7.5" I.D x 13.4" L. 

  • Heating area: 7.5" ID x 8.5" Depth (7.6Liter)

  • Uniform Temperature zone:  4"Dia x 3.5" depth in center position within +/- 5ºC

  • The quartz tube is replaceable  ( click picture left to order spare tube )


Vacuum Flange



Note: The standard flange door has upgraded to feedthrough type on Feb 15, 2016.


Stainless steel vacuum flange with dual high-temperature silicone O-rings at the front door with water colling ports
  • 1/4 gas inlet & outlet included which allow continuous gas delivery during operation. A gas quartz tube (6.35mm O.D) is provided to reach the location of the sample and deliver reactive gas to the sample directly. (Fig A, B)
  • One 1/4 thermocouple feedthrough port allows a 1/4 O.D thermocouple probe to be inserted into the chamber and measure the temperature of the sample independently. (Fig. C) (Thermocouple is optional. Click here to find one). Four probes electric resistance measurement feedthrough also is available upon request. (Fig. D)
  • M15 x 1.5mm Thread for both 1/4" feedthrough
  • One bored Al2O3 foam refractory block (190Dia *  50mm) is provided. (Fig. F)
  • K type 1/4" OD x 18" L thermocouple is included.    (Since Apr 2016) (Fig. C)
  • Gas Inlet Tube (O.D 6.35mm, I.D 4.0 mm, L 300mm) is included.    (Since Apr 2016)
  • Mechanical Vacuum Gauge (included as standard accessory), which ranges from -0.1 to 0.15Mpa.
                           
            Fig. A                         Fig. B                                    Fig. C                              Fig. D                                 Fig. F
Gas Inlet and Outlet & Water cooling
   
  • One gas purging inlet (1/4" hose adapter ) with a valve is on the left side of the furnace 
  • The inert gas can be introduced into the chamber via the inlet for purging purposes. 
  • If a continuous gas flow is needed, refer to the additional gas inlet and thermocouple probe below.
  • A water cooling jacket has been built inside the flange to protect the vacuum sealing O-tings. The inlet and outlet ports located on the left side of the furnace are used for connecting to a water chiller through two 12 mm Dia. polyurethane tubes (16L/minute water flow is required). Please click the picture left to order the water chiller.
Temperature Controller

     
  • NRTL certified digital temperature controller is included.
  • Proportional–integral–derivative control (PID control) and auto-tune function
  • 30 segments programmed with ramping, cooling, and dwelling steps
  • Built-in over-temperature alarm and thermocouple failure alarm
  • +/- 1 ºC temperature control accuracy
  • THE Default DB9 PC communication port included for connecting to PC
  • Eurotherm Temperature Controller is available at the extra cost with +/-0.1°C accuracy. 
Options
   

  • Digital Pressure Gauge (optional) A gas-type independent(above 10mbar) digital vacuum gauge with a wide range between 3.8x10-5 to 1125 Torr. ( Click Pic. 1 to order )
  • You may choose a gas mixer to deliver multiple gasses with control over gas composition and flow rate (click pictures below to order separately).
    Pic. 1New Version front panelPic. 2
Options
  • The sample holder is not provided with the furnace. You may check the link below to order the sample holder separately. 
  • Optional Quartz Thermal Block is available upon request as the refractory block, which can help achieve a higher vacuum level and avoid potential contamination problems, please order Quartz Thermal Block.
  • A 4-holes 1/4" Alumina Tube can be used for inserting 4 wires (e.g. Pt wires) through the holes for measuring the electrical properties at the high temperature at extra cost.
                                                                                 
Flat sample holder               Crucible sample holder              Quartz Thermal Block                        4 wires feedthrough 



Vacuum Pressure





  • Vacuum Level is dependent on the vacuum pump used, connected pipe, interior refractory block's materials, etc. By using KFD25, stainless steel pipe, MTI's two-stage mechanical pump, and KF25 Ball valve, the furnace can achieve vacuum levels below:
    • 10-2 torr via mechanical pump within 30 minutes without thermal Block
    • 10-4  torr via turbo-pump within 30 minutes with the Quartz Thermal Block at 900C
  • Optional: 
    • The vacuum pump and pipe are not included, please click on the picture below to order.
    • For achieving a higher vacuum level, a Turbopump is necessary. 
    • Spare sealing O-ring is available at extra cost ( click 2nd picture to left below )
    •  KF25 Right-Angle Valve for quick connection to KF25 Bellows (click the picture 3 below ).
                             

Overall Dimensions

700mm(L) x 440mm(W) x 435mm(H)          

Net Weight

80 kg

Shipping Weight

200 lbs

Shipping Volume

45"(L) x28"(W) x35"(H) 


Warranty

  • One year limited warranty with lifetime support (consumable parts such as processing tubes, and O-rings are not covered by the warranty, please order replacements at related products below.).  
  • ATTENTION: Any damages caused by the use of corrosive and acidic gasses are not under the coverage of MTI One Year Limited Warranty.

Compliance
  

  • CE Certified
  • Patten Number : ZL-2011-2-0102249.4 SINCE  2011-5-19
  • NRTL or CSA certification is available upon request at extra cost.

    Warning  


    Click here to learn the installation of a gas regulator

    • Tube furnaces with quartz tubes are designed for use under vacuum and at low-pressure <  0.2 bars 
    • Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation. Click here to learn the installation of a gas regulator. 
    • Never heat the furnace while the gas release valve is closed when a positive pressure condition exists within the furnace chamber. 
    • Max. 1000°C is limited on all quartz tube furnaces to avoid the quartz tubes' deformation.
    • The flow rate for gasses should be limited to < 200 SCCM for reducing thermal shocks

    Operation Demo Video

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    1. Prices listed online are valid for the US market and who pay by credit card only. There will be extra charges for shipping & handling. Price various from country to country.
    2. We may add extra charges for paper order and net30 terms due to extra labor costs.
    3. The prices listed are subject to change without notice.