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5" Rotary CVD Tube Furnace with Three Heating Zones at 1200C Max. - OTF-1200X-III-R5L

In stock
Item Number: OTF1200XIIIR5
Transported by LTL Freight (Truck)

The OTF-1200X-III-R5L is a 5" rotary CVD tube furnace with three heating zones built in the NRTL standard. The furnace is especially good for preparing Li-Ion battery cathode and Anode materials with the conductive coating, such as LiFePO3, LiMnNiO3, Si/C, etc. This rotary furnace has a larger tube diameter (5"OD) combined with a longer and more uniform heating area (three zones, 900mm overall length).

(Item number has been updated from OTF-1200X-5L-R-III-UL since March 2019)

Furnace Construction
  • Double shell casing with three cooling fans
  • High purity Alumina fibrous insulation for max. energy efficiency
  • DC Gear motor drives quartz tube with variable speed 0 - 10 RPM
  • The furnace can be electrically tilted up to 30° C
  • Split cover enables faster cooling and easy operation.
  • All electric components are UL or Met recognized and ready to pass any safety test worldwide
Heating Zone length
  • Three zones: (600mm, 24" in total)
    • Zone 1: 150 mm  
    • Zone 2: 300mm  
    • Zone 3: 150 mm 
  • Constant temperature zone: 450 mm within +/-2ºC if two zones are at the same temperature.
Processing tube & Flange
  • Fused quartz tube (one is included)
  • Dimension:  130 mm O.D. x 120 mm I.D. x 1200 mm L + 60 OD mm (two ends )
    • Click the pics below to see details about the furnace's processing tube
          Four Mixing Blades                         Dimension
  • One pair of 60mm SS sealing flange with needle valves and a rotatable gas connector is included for immediate use      
Gas Fittings
Inlet Fitting: Elbow Push-in connector for 6mm O.D tube; Outlet Fitting:  Elbow Push-in connector for 12mm O.D tube

Max. Working Temperature

  • 1100°C for continuously

  • 1200°C Max for < 1 hours

Temperature Controllers         
  • Three PID digital temperature controllers with 30 programmable segments
  • RS485 port is built in to connect PC for remote control          
Temperature Uniformity
 +/- 1°C in heating Zone
Three Omega K type 3mm OD x 6" L with high temperature tolerance (220°C) connector
Tube rotating Speed
0 - 10 RPM variable (Gear reduction ratio 1:150, torque 10Nm)
Furnace tilt angle
0 - 30°
Chamber pressure
10-2 torr
 Production yield
 2 kg per batch
 4 KW Max
 208 - 240V single phase (30 A Breaker required)
 Warranty & Certificate One year limited warranty (consumable parts such as processing tubes, o-rings and heating elements are not covered by the warranty, replacements are available at related products below.) 
Laptop, software & WiFi Control (Optional)
  • Brand new laptop with Microsoft Window 10 and Microsoft Office 2013 (30 days free trial) for immediate use.
  • Labview Based Temperature Control System (EQ-MTS01) enables the user to edit temperature profile, manage heat-treatment recipe, record and plot data for MTI furnaces.
  • A wireless remote control provides up to 300 meters operating range.
  • Above features are available upon request at an extra cost (up to $1,000). Please contact us for more information.
  • Note: The software is only compatible with MTI’s Yudian Temperature Controller

  • CE Certified
  • NRTL (UL61010)  or CSA certification is available upon request at extra cost. 
 Furnace dimension

With Lid Open With Lid Closed
Tilt At 0° 34° 34°
Length 60" 60" 60" 60"
Width 35" 35" 24" 24"
Height 66.5" 74" 58" 68"

 Net Weight
   130 kg   
 Shipping Weight &  Dimension
  • 600 lbs
  • 48"x40"x80"
Operation Video


Application Notes
  • The concept of continuous power feeding and processing can be realized by the use of Magnetic Fluid Sealed Swivel Coupling with Volumetric Feeder and Rotary Furnace. Please view the assembling approach diagram and video in below.  
  • For CVD coating, you may choose our multi channel Gas delivery system as Pic below right     
  • For CVD coating, you may choose our multi-channel Gas delivery system as Pic below right.
  • Ref Article: Scalable synthesis of silicon-nanolayer-embedded graphite for high-energy lithium-ion batteries
  • The tube furnaces with quartz tube are designed for using under vacuum and low pressure < 0.2 bar / 3 psi / 0.02 MPa
  • Attention: A two-stage pressure regulator must be installed on gas cylinder to limit the pressure to below 3 PSI for safe operation. Click here to learn the installation of a gas regulator.
  • Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used up to 1000°C

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      1. Prices listed online are valid for US market and whom pay by credit card only. There will be extra charges for shipping & handling. Price various from country to country.
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      3. The prices listed are subject to change without notice.