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24"L 3 Zone Tube Furnace w/ Hinged Flange & Quartz Tube (80-130mm, 1200C Max) - OTF-1200X-III-SHG

Transported by LTL Freight (Truck)

Product Options

UL/CSA/CE Certifications:
Tube Size:


Upgrade to Eurotherm Temp controller( 3 zone)+15" Laptop+ USB Cable
OTF-1200X-III-S is CE certified and UL Standard 24" Long ( 6"+12"+6")  split-able three-zone tube furnace with quartz tube (size selectable) and hinged type flange. Such configuration allows easy sample loading/ unloading. Three 30 segments of temperature controllers are installed with K-type thermal couples. Microprocessor-based self-tuning PID provides excellent control with no overshooting and  +/- 1 °C accuracy. It is an excellent furnace for sample annealing, diffusion, and sintering in the various gas atmosphere up to 1200°C.    (Please select the tube size in the options bar to view the price and model)
Furnace structure
  • Double-layer steel case with two cooling fans which ensure low surface temperature;
  • Energy-saving high purity fibrous alumina insulation; 
  • Two fibrous ceramic tube blocks are included for blocking heat radiation from inside of the tube. (Ceramic blocks must be fully inserted into the furnace chamber before heating).
  • Quartz block (Optional) is ideal for more cleanness and higher achievable vacuum.
Rated voltage
AC 208-240V Single Phase, 50/60 Hz (40A breaker required; Powder cord is included without plug)
Power consumption
6  KW Max.
Heating elements
Fe-Cr-Al Alloy doped by Mo
Heating zone length

  • Three zones: 610mm (24") in total
  • Z1-Z2- Z3:152.4mm (6") + 304.8mm (12") + 152.4mm (6")
  • +/-1ºC Constant Temperature Zone: 260 mm length
  • +/-2ºC Constant Temperature Zone: 480 mm length (click the pic below for detail)
Fused Quartz Tube(Please choose from product option) Model: OTF-1200X-III-SHG-80-UL
80 O.D x 72 I.D x 1200 L  (mm)
2" wafer Max.
Model: OTF-1200X-III-SHG-4-UL
101 O.D x 92 I.D x 1200 L  (mm)
3" wafer Max.
Model: OTF-1200X-III-SHG-5-UL
130 O.D x 122 I.D x 1200 L  (mm)
4" wafer Max.
Warning: The tube furnaces with quartz tubes are designed for use under vacuum and low pressure < 0.12 Mpa (absolute pressure)
Heating temperature
  • Max. Heating Temperature: 1200°C at flowing gas 
  • Continuous Heating Temperature: 1100°C  at flowing gas 
  • Max. The heating temperature at Vaccum 1000°C 
  • Max. Heating Rate: 20°C/min
Temperature Controllers
  • PID automatic control with 30 programmable segments for precise control of heating rate, cooling rate, and dwell time.
  • Built-in overheating & broken thermocouple protection.
  • Over-temperature protection and alarm allow for operation without attendant(s).
  • +/- 1 ºC temperature accuracy.
  • Three K-type thermocouples (one for each zone).
  • RS485 Communications Port.
  • Optional:  
    • The furnace may be operated by a PC by installing a control module. Please order an MTS-02 control module at extra cost. 
    • The new version of the PC module is now compatible with Lab View 05/08/2014
    • If you order the PC control module together with the furnace, we will install and test it before shipping. We recommend you order a computer laptop from us to avoid software installation problems. For more information please click here.
European Temperature Controllers (optional upgrade)
  • 1 heating channel
  • 1 programs of 8 or 24 segment
  • Alarm Relay: Form 'A' and Form ‘C’ built-in 
  • Digital Communications: RS485
  • Temperature Accuracy:  ±  0.1ºC
  • Recipes: Using a PC tool recipes can be created that can be used to change the operating parameters of the 3000 simply by selecting a new recipe via the HMI. This is very useful where multiple products are processed using the same controller but require different parameters to be set.
Vacuum Flange and Gauge


  •  Hinged type flanges are installed on both ends for easy sample loading/unloading;
  • KF25D adapter installed on left flange with a precision digital vacuum gauge;
  • SS needle valve with 1/4" pipe connector installed on right flange;
  • Max. vacuum pressure can reach 10^-2 torr by mechanical pump and 10^-5 torr by the molecular pump;
  • Optional: you may choose our molecular vacuum pump station for higher vacuum  
Optional Part In order to build a complete CVD system, you may need a bubbler or gas delivery system, and a quartz wafer Carrier. . Please click the picture below to choose:
750mm(L) x 525mm(W) x 670mm(H)  
Net Weight
70 kg
One-year limited warranty with lifetime support (Consumable parts such as processing tubes, o-rings and heating elements are not covered by the warranty, please order the replacements at related products below.)
Laptop, software & WiFi Control(Optional)
  • Brand new laptop with Microsoft Windows 10 and Microsoft Office 2013 (30 days free trial) 
  • Labview Based Temperature Control System (EQ-MTS01) enables users to edit temperature profile, manage heat-treatment recipes, record and plot data for MTI furnaces.
  • A wireless remote control provides up to 300 meters of operating range.
  • CE certified
  • NRTL or CSA certification is available upon request at extra cost
Shipping dimensions
65"(L) x 45"(W) x 35"(H)
Shipping weight

Application Notes

          Operation Instructions

          OTF-1200X-III-SHG-4 OTF-1200X-III-SHG-130
          1 Compact Digital Vacuum Gauge &
          Controller with Power Supply (U to 10-4Torr), 
          1 pc
          EQ-CVM-211 EQ-CVM-211 EQ-CVM-211
          Fused quartz tube
          1 pc
          EQ-QZTube-80D-48 EQ-QZTube-100 EQ-QZTube-130
          Alumina fiber foam tube block
          2 pcs

          EQ-F-T-block-70 EQ-F-T-block-92 EQ-F-T-block-125
          Hook for moving the sample

          EQ-FLG-kit-2 EQ-FLG-kit-2 EQ-FLG-kit-2
          Metric Hex-wrenches
          1 set

          7 Vacuum Flange 1 pair EQ-FL-80KF25-HG EQ-FL-101KF25-HG FL125KF25H

          Part No.
          Quick Link
          EQ-MTS02 Computerized temperature Control System
          High vacuum station (Mechanical pump + turbo molecular pump.)
          Gas mix station (Float flow meter / Mass flow meter) (2, 3, 4channels selectable)
          Compact Flow Meter (float flow meter / mass flow meter)
          EQ-QBlock-90 90mm O.D heat-insulating quartz block 
          Quartz Boats /crucible /container /sample holder
          Heavy Duty Mobile Car for All MTI Tube and Box Furnaces

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          1. Prices listed online are valid for the US market and who pay by credit card only. There will be extra charges for shipping & handling. Prices vary from country to country.
          2. We may add extra charges for paper orders and NET 30 terms due to extra labor costs.
          3. The prices listed are subject to change without notice.