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24"L 3 Zone Tube Furnace w/ Hinged Flange & Quartz Tube (80-130mm, 1200C Max) - OTF-1200X-III-SHG
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Transported by LTL Freight (Truck)
Product Options
| UL/CSA/CE Certifications: |
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| Tube Size: |
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Personalization
Upgrade to Eurotherm Temp controller( 3 zone)+15" Laptop+ USB Cable
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OTF-1200X-III-S is CE certified and UL Standard 24" Long ( 6"+12"+6") split-able three-zone tube furnace with quartz tube (size selectable) and hinged type flange. Such configuration allows easy sample loading/ unloading. Three 30 segments of temperature controllers are installed with K-type thermal couples. Microprocessor-based self-tuning PID provides excellent control with no overshooting and +/- 1 °C accuracy. It is an excellent furnace for sample annealing, diffusion, and sintering in the various gas atmosphere up to 1200°C. (Please select the tube size in the options bar to view the price and model)
SPECIFICATIONS:
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Furnace structure
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Double-layer steel case with two cooling fans which ensure low surface temperature;
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Energy-saving high purity fibrous alumina insulation;
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Two fibrous ceramic tube blocks are included for blocking heat radiation from inside of the tube. (Ceramic blocks must be fully inserted into the furnace chamber before heating).
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Quartz block (Optional) is ideal for more cleanness and higher achievable vacuum.
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Rated voltage
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AC 208-240V Single Phase, 50/60 Hz (40A breaker required; Powder cord is included without plug)
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Power consumption
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6 KW Max.
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Heating elements
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Fe-Cr-Al Alloy doped by Mo
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Heating zone length
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| Fused Quartz Tube(Please choose from product option) |
Model: OTF-1200X-III-SHG-80-UL
80 O.D x 72 I.D x 1200 L (mm)
2" wafer Max. |
Model: OTF-1200X-III-SHG-4-UL
101 O.D x 92 I.D x 1200 L (mm)
3" wafer Max. |
Model: OTF-1200X-III-SHG-5-UL
130 O.D x 122 I.D x 1200 L (mm)
4" wafer Max. |
| Warning： The tube furnaces with quartz tubes are designed for use under vacuum and low pressure < 0.12 Mpa (absolute pressure) |
Heating temperature
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- Max. Heating Temperature: 1200°C at flowing gas
- Continuous Heating Temperature: 1100°C at flowing gas
- Max. The heating temperature at Vaccum 1000°C
- Max. Heating Rate: 20°C/min
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Temperature Controllers
 
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- PID automatic control with 30 programmable segments for precise control of heating rate, cooling rate, and dwell time.
- Built-in overheating & broken thermocouple protection.
- Over-temperature protection and alarm allow for operation without attendant(s).
- +/- 1 ºC temperature accuracy.
- Three K-type thermocouples (one for each zone).
- RS485 Communications Port.
- Optional:
- The furnace may be operated by a PC by installing a control module. Please order an MTS-02 control module at extra cost.
- The new version of the PC module is now compatible with Lab View 05/08/2014
- If you order the PC control module together with the furnace, we will install and test it before shipping. We recommend you order a computer laptop from us to avoid software installation problems. For more information please click here.
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European Temperature Controllers (optional upgrade)
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- 1 heating channel
- 1 programs of 8 or 24 segment
- Alarm Relay: Form 'A' and Form ‘C’ built-in
- Digital Communications: RS485
- Temperature Accuracy: ± 0.1ºC
- Recipes: Using a PC tool recipes can be created that can be used to change the operating parameters of the 3000 simply by selecting a new recipe via the HMI. This is very useful where multiple products are processed using the same controller but require different parameters to be set.
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Vacuum Flange and Gauge
 
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Hinged type flanges are installed on both ends for easy sample loading/unloading;
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KF25D adapter installed on left flange with a precision digital vacuum gauge;
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SS needle valve with 1/4" pipe connector installed on right flange;
- Max. vacuum pressure can reach 10^-2 torr by mechanical pump and 10^-5 torr by the molecular pump;
- Optional: you may choose our molecular vacuum pump station for higher vacuum
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| Optional Part |
In order to build a complete CVD system, you may need a bubbler or gas delivery system, and a quartz wafer Carrier. . Please click the picture below to choose:
   
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Dimensions
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750mm(L) x 525mm(W) x 670mm(H) |
Net Weight
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70 kg
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Warranty
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One-year limited warranty with lifetime support (Consumable parts such as processing tubes, o-rings and heating elements are not covered by the warranty, please order the replacements at related products below.)
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| Laptop, software & WiFi Control(Optional) |
- Brand new laptop with Microsoft Windows 10 and Microsoft Office 2013 (30 days free trial)
- Labview Based Temperature Control System (EQ-MTS01) enables users to edit temperature profile, manage heat-treatment recipes, record and plot data for MTI furnaces.
- A wireless remote control provides up to 300 meters of operating range.
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Compliance
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- CE certified
- NRTL or CSA certification is available upon request at extra cost
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Shipping dimensions
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65"(L) x 45"(W) x 35"(H)
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Shipping weight
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340lbs
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Application Notes
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| Operation Instructions |
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AVAILABLE OPTIONAL ACCESSORY:
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Part No.
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Description
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Quick Link
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| EQ-MTS02 |
Computerized temperature Control System
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High vacuum station (Mechanical pump + turbo molecular pump.) |
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Gas mix station (Float flow meter / Mass flow meter) (2, 3, 4channels selectable) |
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Compact Flow Meter (float flow meter / mass flow meter) |
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| EQ-QBlock-90 |
90mm O.D heat-insulating quartz block |
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Quartz Boats /crucible /container /sample holder |
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EQ-FM-Cart
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Heavy Duty Mobile Car for All MTI Tube and Box Furnaces
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