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Compact RF Generator 13.56 MHz 300W with Auto Matching Network for DIY RF Sputtering - RF-300I-LD

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Item Number: RF300I

RF-300I is a compact 300W auto-match RF generator with 13.56Mhz frequency, which integrated the auto-matching network together with 13.56 MHz RF Generator into one unit and made installation and operation much easier. It can be operated with MTI magnetron sputtering source to DIY a small RF film coater at a flexible budget.

Input Power
  • 220VAC, 50/60Hz or 110VAC, 60Hz selectable
RF Power Generator
with auto-matching

  • Output Power:            5 -300W adjustable with ± 1% stability
  • RF frequency:            13.56 MHz ±0.005% stability
  • Matching:                   Automatic with variable air capacitor
  • Cooling:                     Air cooling
  • Noise:                        <50 dB
  • Power:                        110 -240VAC, 50/60Hz
  • Dimension:                  400 W x 450 D x 80 H, mm
Optional Accessories

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  • You may order 2" High Vacuum Magnetron Sputter Source For DIY RF & DC Sputtering Coater  together with RF power supply for immediate use
  • High Vacuum Quick Disconnect is included when you order 300W RF generator together with the 2" sputtering source.
  • High Vacuum Quick Disconnect with 0.75" ID (compatible with HVMSS-SPC-2). Use this component to install the HVMSS-SPC-2 sputtering tool onto the baseplate (up to 1” thick) of a vacuum chamber with  1” diameter through-hole    
  • Digital Temperature Controlled Circulating Water Chiller with 6 Liters Tank, 16L / min Flow is available at extra cost, please order separately.
  • 148 cm RF cable is recommended with extra cost (click Pic. right 1 to order)


Operation Instructions
                       (click to see other components)
Warranty One year limited with lifetime support

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1. Prices listed online are valid for the US market and who pay by credit card only. There will be extra charges for shipping & handling. Price various from country to country.
2. We may add extra charges for paper order and net30 terms due to extra labor costs.
3. The prices listed are subject to change without notice.