Browse Categories

Compact RF Generator 13.56 MHz 300W with Auto Matching Network for DIY RF Sputtering - RF-300I-LD

Please call for the delivery time
Item Number: RF-300I-LD


RF-300I is a compact 300W auto-match RF generator with 13.56Mhz frequency, which integrated auto-matching network  together with 13.56 MHz RF Generator into one unit and made installation and operation much easier. It can be operated with MTI magnetron sputtering source to DIY a small RF film coater at a flexible budget.

Input Power
  • 220VAC, 50/60Hz or 110VAC, 60Hz selectable
RF Power Generator
with auto-matching

  • Output Power:            5 -300W adjustable with ± 1% stability
  • RF frequency:            13.56 MHz ±0.005% stability
  • Matching:                   Automatic with variable air capacitor
  • Cooling:                     Air cooling
  • Noise:                        <50 dB
  • Power:                        110 -240VAC, 50/60Hz
  • Dimension:                  400 W x 450 D x 80 H, mm
Optional Accessories

Click here to order
  • You may order 2" High Vacuum Magnetron Sputter Source For DIY RF & DC Sputtering Coater  together with RF power supply for immediate use
  • High Vacuum Quick Disconnect is included when you order 300W RF generator together with the 2" sputtering source.
  • High Vacuum Quick Disconnect with 0.75" ID (compatible with HVMSS-SPC-2). Use this component to install the HVMSS-SPC-2 sputtering tool onto the baseplate (up to 1” thick) of a vacuum chamber with  1” diameter through-hole    
  • Digital Temperature Controlled Circulating Water Chiller with 6 Liters Tank, 16L / min Flow is available at extra cost, please order separately.
  • 148 cm RF cable is recommended with extra cost (click Pic. right 1 to order)


Operation Instructions
                       (click to see other components)
Warranty One year limited with lifetime support

Related Products

Shopping Cart
Your cart is empty.
Please clear the browsing history before ordering the product. Otherwise, availability and price are not guaranteed.
Mailing Lists
MTI sponsorships:
MTI Sponsors Thermoelectrics Workshop

MTI-UCSD Battery Fabrication Lab

MTI-VISTEC Cylindrical Cell  Pilot Line

MTI Sponsors the Postdoctoral Awards

MTI and Celgard have successfully reached the settlement under court for the litigation on patent and trademark

Upcoming Shows:

MS&T 2019 Sep 29 - Oct 3 Portland OR Booth 614

236th ECS Meeting Oct 13 - 17 Atlanta GA Booth 200

2019 MRS Fall Dec 1 - 6 Boston MA Booth 901

Recent Attended Shows:
ICT/ACT 2019 Jun 30 - July 4 Gyeongju South Korea

AABC 2019 Jun 24-27 San Diego CA

2019 MRS Spring April 22 - 26 Phoenix AZ

Click here to see our past conferences


1. Prices listed online are valid for US market and whom pay by credit card only. There will be extra charges for shipping & handling. Price various from country to country.
2. We may add extra charges for paper order and net30 terms due to extra labor cost.
3. The prices listed are subject to change without notice.