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4" Precision Polishing Fixture with Vacuum Jig for Faster Thinning and Polishing - EQ-PF-4-1V

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Item Number: PF4V

  • Precision Polishing Jig for accurate wafer/substrate polishing and back-thinning
  • 4" Diameter sample holder vacuum chuck to take wafer or substrate up to 4"
  • Vacuum chuck can suck wafer through vacuum pump without wax and make wafer sample mounting clean, faster and flat
  • 2 feet length vacuum tube is included to connect the vacuum pump, which keeps vacuum pressure during jig rotation
  • Thickness control screw fixture with a resolution of 0.005 mm to limit stock remove
  • One digital micrometer is included with a resolution of +/- 1 micron for more accurate control polishing remove
  • Two dead weights are included for adjusting polishing gravity
  • This Polishing fixture can fit with, Unipol 1202 and Unipol 1502 and any precision 12" or larger polishing machine with yoke support to achieve automatic polishing or thinning.
  • Require a vacuum pump with a rate > 70 L/ min.
  • Maximum travel distance: 6.7mm
  • Net Weight: 18 lbs

Product Images

Note: super-hard tungsten alloy is welded on the bottom of the jig for polishing responsible

Application notes

This fixture also can polish < 4" wafer via the blue tape method
  • Cut a 4 " diameter blue tape, then stick the 2- 3" wafer or < 4" irregular substrate on the tape
  • Then put the 4" blue tape with the wafer to vacuum chunk

Operation Instructions Please click on here to download  how to use this fixture 


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