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4" Vacuum chuck - EQ-ECO-402

In stock
Item Number: ECO402
For mounting wafer easily and quickly, you may also choose a vacuum chuck ( P/N ECO402 ) with 20 micron flatness.

Put your sample ( usually a thin wafer ) on the removable adhesive film (ECO 419) (available from MTI upon your request ), then place film with the wafer on the top of the vacuum chuck.

Open vacuum valve, vacuum chuck will suck wafer firmly and ready for cutting.

Push-to-connect fitting 6mm is installed in the chuck. If you are using your own pump, you also need to install the 6mm push-connect fitting in the vacuum pump. Please make sure the thread type is right for your pump. 

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