Browse Categories

4" Vacuum chuck - EQ-ECO-402

In stock
Item Number: ECO402
For mounting wafers easily and quickly, you may also choose a vacuum chuck (P/N ECO402) with 20-micron flatness.

Put your sample (usually a thin wafer) on the removable adhesive film (ECO 419) (available from MTI upon your request), then place the film with the wafer on the top of the vacuum chuck.

Open vacuum valve, vacuum chuck will suck wafer firmly and ready for cutting.

Push-to-connect fitting 6mm is installed in the chuck. If you are using your own pump, you also need to install the 6mm push-connect fitting in the vacuum pump. Please make sure the thread type is right for your pump. 

Click to order 6mm polyurethane tubing

Related Products

Shopping Cart
Your cart is empty.
Please clear the browsing history before ordering the product. Otherwise, availability and price are not guaranteed.
Mailing Lists
MTI sponsorships:
MTI Sponsors Thermoelectrics Workshop

MTI-UCSD Battery Fabrication Lab

MTI Sponsors the Postdoctoral Awards

Upcoming Shows:

242nd ECS Meeting October 9 - 13 Atlanta GA Booth 200

2022 MRS Fall Meeting Nov 27 - Dec 2 Boston MA

Recent Attended Shows:
John Goodenough 100th Birthday Symposium

2022 MRS Spring Meeting May 8 - 13 Honolulu Hawaii Booth 209

Click here to see our past conferences


1. Prices listed online are valid for the US market and who pay by credit card only. There will be extra charges for shipping & handling. Price various from country to country.
2. We may add extra charges for paper order and net30 terms due to extra labor costs.
3. The prices listed are subject to change without notice.