4" Vacuum chuck for MTI CNC Dicing Saw - EQ-ECO-402

Put your sample (usually a thin wafer) on the removable adhesive film (ECO 419) (available from MTI upon your request), then place the film with the wafer on the top of the vacuum chuck.

   Open the vacuum valve, vacuum chuck will suck the wafer firmly and be ready for cutting.

There is a M6 screw thread underneath for mounting the vacuum chuck.

A Push-to-connect fitting 6mm is installed in the chuck. If you are using your own pump, you also need to install the 6mm push-connect fitting in the vacuum pump. Please make sure the thread type is right for your pump. 
     Click to order 6mm polyurethane tubing.