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300W 13.56MHz RF Generator for 50, 80 or 125 mm OD Tube Furnace - OTF-PECVD-RF


4 -6 weeks to delivery for QC

Product Options

Tube Size:
13.56MHz RF generator up to 300W for DIY of PECVD (Plasma Enhanced Chemical Vapor Deposition) for Plasma etching, Plasma cleaning, and plasma polymerization etc.

SPECIFICATIONS

Noise <50 dB
Output Power 5 -300W adjustable with ± 1% stability
RF frequency 13.56 MHz ±0.005% stability
Reflection Power 200W max.
Matching Automatic matching
RF Output Port 50 Ω, N-type, female
Cooling Air cooling
Power 208-240VAC, 50/60Hz
Tube Size 50, 80 or 125 mm OD please select from option bar  ( larger diameter coil up to 11" diameter is available upon request )
Application Combine with MTI's tube furnace to get PECVD system
   
Dimension


Optional
Please order the oilless pump for zero contamination, quartz tubes, and vacuum flanges can be ordered by clicking the pictures below:
     Sealing flanges for 40 - 42 mm O.D tube     1



Demo Video

Warranty  One year limited warranty with lifetime support

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