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Rotation Powder ALD 4" Tube Furnace System Upto 1200oC - ALD-1200X-R-4
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Please email for lead time
Item Number: ALD-1200X-R-4
Transported by LTL Freight (Truck)
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ALD-1200X-R-4 is a 4"rotation tube furnace combining with two channel ALD valves and one channel liquid vapor delivery( Atomic Layer Deposition ) and as well as four channels gas delivery to make surface coating on powder by both ALD and CVD. The smart design makes ALD more cost effective and affordable for every research group.
SPECIFICATIONS:
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Control Pannel
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- All parameters of Vapor, ALD, and Gas flow are integrented into one mobile cart and controlled by PLC via a 6" touch screen panel:
- Two Channel ALD valve
- For channels MFC gas delivery
- Please click picture below to see control interface
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ALD valve
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- Two ALD valves with pulse controller (min 10 ms duration )
- Capable of heating with thermal actuators
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Liquid-Vapor Generator
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- Automatic liquid vapor generator is included and connect to ALD valve
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Rotation furnace
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Anti-corrosive Pressure Gauge
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- 3.8x10-5 to 1125 Torr measurement range
- Anti-corrosive, gas-type independent
- High accuracy and reproducibility at atmosphere for reliable atmospheric pressure detection
- Fast atmospheric detection eliminates waiting time and shortens process cycle
- Easy to exchange plug & play sensor element
- Click the picture to view detail spec.
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Vacuum Pump
( optional)
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- 10E-2 Torr vacuum can be achieved inside processing tube
- Vacuum pump is not included , suggest you order a dry pump for CVD process by click picture below
 
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More Bubbler
Optional
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Warranty
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One year limited warranty with lifetime support (Consumable parts such as processing tubes, O-rings, and heating elements are not covered by the warranty, please order replacements at related products below).
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Compliance
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- Built-in Pfeiffer's pump is ELT Certification
- CE Certified
- All electric components ( >24V) are UL / MET / CSA certified
- The furnace is ready to pass TUV(UL61010) or CSA certification at extra cost. （ please click marks below to learn details )
 
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Application
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Operation Insturctions
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