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Plasma Enhanced ALD & CVD System 800ºC Max. W/ 4" Rotary Sample Stage - ALD-800X-4-PE


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Item Number: ALD-800X-4-PE
Transported by LTL Freight (Truck)
ALD-800X-4-PE is a compact plasma-enhanced (PE)  ALD and CVD system with a four high-frequency valve, 4" shower-head, and rotary heatable sample stage, and 300 W RF generator. The smart design makes ALD  more cost-effective and affordable.

SPECIFICATIONS:
Power
  • 208 - 240VAC, single phase, 50/60 Hz
  • 2000W  total

Control Panel

  • All processing parameters of  ALD are controlled by PLC via a 6" touch screen panel, including vapor injecting time, inert gas flow rate, and temperature and rotation speed of sample stage 
    • 13.56MHZ, 100W max. RF plasma power and auto-matching
    • Control one ALD valves with puls duration time and cycling with mico-second precision
    • Control two channels gas delivery with ±0.2%F.S via MFC
    • Display vacuum pressure 
    • Other parameters upon request of the customer
  • Please click the picture left to see the control interface
ALD valve

  • One frequency ALD valve
    • Max. frequency on/off: 283 HZ
    • Min. Pulse time:           10 ms
  • Can deliver  drying gas or liquid-vapor
Shower Head

  • Material:  Aluminium or Stainless steel
  • 4" shower-head with 0.5 mm holes
  • 1/4"  dia. tube for gas or vapor inlet which connects to ALD valve
  • Special design for uniform distribution of gas or vaper
Sample Stage

  • 4" diameter rotary and heatable sample stage
  • Speed:            0 - 5 RPM  adjustable via the control panel
  • Temperature:   RT - 700oC programmable via the control panel with +/- 5 ºC accuracy
  • Substrate size to be coated:   100 mm in diameter.
Chamber
  • Quartz glass tube, 165 mm OD. X 150 mm ID x 250 mm Height
    • Please click here to order the Quartz Chamber replacement.
  • SS 304 flanges to ensure the vacuum level:  10-5 torr by turbopump and 10-2 by the mechanical pump
  • KF 25 vacuum port is built-in
Heatable Bubbler
  • Two 150 ml Heatable bubblers with temperature controllers are included for carrying precursors
  •    
Dimension
  •   L 700 mm×W 700 mm × H 1400 mm
Vacuum Pump 
( optional)
  • A vacuum pump is not included, suggest you order a dry pump for the CVD process by click the picture below
  •       
Warranty
One-year limited warranty with lifetime support (Consumable parts such as processing tubes, O-rings, and heating elements are not covered by the warranty, please order replacements at related products below).
Compliance
  • CE certified and NRTLor CSA certification is available upon request at the extra cost.
Demo Video
Operation Instructions
    

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Notices
1. Prices listed online are valid for the US market and who pay by credit card only. There will be extra charges for shipping & handling. Price various from country to country.
2. We may add extra charges for paper order and net30 terms due to extra labor costs.
3. The prices listed are subject to change without notice.