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Desktop ALD & CVD System 800ºC Max. W/ 4" Showerhead and Rotary Sample Stage - ALD-800X-4


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Item Number: ALD-800X-4
Transported by LTL Freight (Truck)
   ALD-800X-4 is a desktop ALD and CVD system with a high-frequency valve ( 283 Hz max), 4" shower-head, and rotary heatable sample stage. The smart design makes ALD  more cost-effective and affordable.

SPECIFICATIONS:

Control Panel
 
  • All processing parameters of  ALD are controlled by PLC via a 6" touch screen panel, including vapor injecting time, inert gas flow rate, and temperature and rotation speed of sample stage 
    • Control one ALD valves with puls duration time and cycling with mico-second precision
    • Control two channels gas delivery with ±0.2%F.S via MFC
    • Display vacuum pressure 
    • Other parameters upon request of the customer
  • Please click the picture left to see the control interface
ALD valve

  • One frequency ALD valve
    • Max. frequency on/off: 283 HZ
    • Min. Pulse time:           10 ms
  • Can deliver  drying gas or liquid-vapor
Shower Head

  • Material:  Aluminium or Stainless steel
  • 4" shower-head with 0.5 mm holes
  • 1/4"  dia. tube for gas or vapor inlet which connects to ALD valve
  • Special design for uniform distribution of gas or vaper
Sample Stage
  • 5“ diameter rotary and heatable sample stage
  • Speed:            0 - 5 RPM  adjustable via the control panel
  • Temperature:   RT - 800oC programmable via the control panel with +/- 5 ºC accuracy
  • Substrate size to be coated:   100 mm in diameter.
Chamber
  • Quartz glass tube, 165 mm OD. X 150 mm ID x 250 mm Height
    • Please click here to order the Quartz Chamber replacement.
  • SS 304 flanges to ensure the vacuum level:  10-5 torr by turbopump and 10-2 by the mechanical pump
  • KF 25 vacuum port is built-in
Dimension
  •   L 440 mm×W 330 mm × H 290 mm
Vacuum Pump 
( optional)
  • A vacuum pump is not included, suggest you order a dry pump for the CVD process by click the picture below
  •       


More Bubbler
(Optional )

  • Click the picture below to order a bubbler (Pic. 1) or evaporator (Pic. 2)  for ALD or CVD
  • This device can be upgraded to PEALD/CVD to and a plasma generator and inductive coil  ( Pic. 3 and 4) 
  •   (Pic. 1)     (Pic. 2)      Pic. 3     Pic. 4
Warranty
One-year limited warranty with lifetime support (Consumable parts such as processing tubes, O-rings, and heating elements are not covered by the warranty, please order replacements at related products below).
Compliance
  • CE certified and NRTLor CSA certification is available upon request at the extra cost.
      
Operation Instructions
    

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Notices
1. Prices listed online are valid for the US market and who pay by credit card only. There will be extra charges for shipping & handling. Price various from country to country.
2. We may add extra charges for paper order and net30 terms due to extra labor costs.
3. The prices listed are subject to change without notice.