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Undoped AlN Template on Sapphire(0001) 10x10mmx5000nm


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Item Number: FmAlNonALc101005S1FT5000US

AlN  Template on saphhire is made by a Plasma Vapor Deposition of NanoColumns (PVDNC)-based method.  AlN template is a cost effective way to replace AlN single crystal substrate.

Specifications

  • Sizes                                                             10mmx10mm
  •  Substrate Sapphire Orientation:              c axis (0001) +/- 1.0 deg.
  • Type and Doping for the AlN film:               Undoped, Semi-insulating
  • Macro Defect Density:                                  <5 cm-2
  • Front Surface Finish (Al Face):                   As-grown
  • Back Surface Finish Sapphire                    as-received finish
  •  Useable Surface Area                                >90% 
  •  Edge Exclusion Area                                   1mm
  •   Package                                                        Single Wafer Container
  • AlN layer thickness                                       5000 nm +/- 5%
 Related data

For Surface Rughness and XRD data, Please click here.

 

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Notices
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