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Undoped AlN Template on Silicon ( Si <111> P type ) 10mmx10mm x 200 nm

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Item Number: FmAlNonSiBc101005S1FT200nm

AlN  Template on Silicon is made by a PVDNC method.  AlN template on Silicon is a cost effective way to replace AlN single crystal substrate.


  • Useful area: 90%
  • Nominal AlN thickness: 200nm ±10%, one side coated, undoped AlN film
  • Front Surface: <1nm RMS,    as-grown
  • Back surface: silicon as received
  • AlN orientation: c-plane (00.1)
  • Macro Defect Density: <1/cm^2
  • Wafer base: Silicon [111] P-type, 10x10 x0.5 mm, one side polished

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