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Three Channel Compact Anti-Corrosion Gas Mixer Made of PTFE (100 -1000 mL/min) - EQ-CGM-3F-PTFE

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Item Number: CGM3F-PTFE
EQ-CGM-3F-PTFE is a compact three channel anti-corrosion gas mixing & delivery system, which can be put in a small fume-hood together with a tube furnace and be safer. All parts wetted with gas are made of PTFE (e.g. valve, pipe, mixing tank and flow-meter). It is designed for delivering corrosive gases, such as hydrogen sulfide (H2S) and hydrogen selenide ( H2Se) for CVD processing.


Floating meter
  • Three anti-corrosive Floating Flow-meter made of PTFE material with flow rates of 100 - 1000 mL/min (0.1 - 1.0 L/min)
  • One Mechanical Pressure Gauge (mixing tank): 0 - 0.05 MPa, (0.02 MPa/grit)
Valve  Three needle valves made of PTFE material which controls gas outlet on the front panel

Gas Tank  500 mL gas tank made of PTFE
 A built-in gas mixing tank combines and mixes gases from three inlet channels.
Pipe fitting
  • Pipe fitting made of PTFE and accept  1/4" pipe (nylon or stainless steel)

  • Three gas inlets with an independent gas flow meter for each channel.
  • 20' length 1/4" PTFE pipe is included for immediate use
  • Compact size:  340Lx300Dx 180H, mm    ( 13.4"x12"x7").
  • Net Weight: 16 Lb
  • Shipping dimension:  TBD
  • Shipping weight: 50 lbs


  Two years limited with lifetime support

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Oxygen Monitoring An Oxygen Sensor can be used to monitor the oxygen level of gas(es) used in CVD systems for preventing or reducing oxidation. Please click the picture below to learn more:
Application Note
  • If your CVD processing involves corrosive gas, such as H2S, please consider using PTFE flange on your tube furnace
  • Also, please choose an anti-corrosion dry vacuum pump instead of an oil vacuum pump
 Operation Manual

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