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Computerized Mass Flow Controller (Max. 1000 SCCM) - EQ-MFC-COM

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Optional SCCM:
MFC-A is a digital mass flow controller for MTI's CVD/PECVD/Graphene furnace to control the gas flowing rate for different research purposes.
  • This product did not have a display, it must be controlled by the computer using manufacturer software.
  • Digital Mass Flow Controller for Gas Control Systems
  • Cost effective, High accuracy and fast response, Multi-gas, Auto-zero, Compatible interfaces.
  • Used for accurately controlling and measuring the gas flow rate of high pressure.
  • Ideal for CVD and other gas mixture applications.
  • International standard DB15 pin fitting; connects to MTI Furnaces with Swagelok1/4 fitting.

Full scale range (N2)

( 0~100,200,500,1000)SCCM

Other range can be customized at extra cost, please email to


±1.0% S.P. (≥35% F.S.)

±0.35% F.S.(<35% F.S.)


±0.2% FS


±0.5% FS

Response Time


Valve Rest Position

Normally Closed or Normally Open

Temperature Coefficient

Zero: ≤±0.05% F.S./℃

Span: ≤±0.1% F.S.℃(≤30 SLM)

Span: ≤±0.2% F.S.℃(>30 SLM)

Zero Drift

<0.6%F.S. per year without autozero

Surface Finish(Ra)


Operation Temperature


Communication Interface for input Signal

Digital: RS485


Analog:(0~5)VDC or (4~20)mA

Communication Interface for Output Signal

Digital: RS485


Analog:(0~5)VDC or (4~20)mA

Power Supply

±11 ~ ±16 VDC or +11 ~ +28 VDC(400mA)

Electronic Connector

D-sub 9 pins male, D-sub 15 pins male,

DeviceNetTM male

Differential Pressure

(0.05~0.35) Mpa(≤10000SCCM

(0.1~0.35) Mpa(20000SCCM,30000SCCM)

(0.2~0.45) Mpa(50000SCCM)

Max Pressure


Leak integrity

1×10-9 atm·cc / sec He(1×10-10 Pa·m3 / sec He)

Seals Materials

Viton; Neoprene

Surface Chemistry (EP only)






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