Computerized Mass Flow Controller (Max. 1000 SCCM) - EQ-MFC-COM

Sale Price: Not for sale, Replacement only

Optional SCCM:

MFC-A is a digital mass flow controller for MTI's CVD/PECVD/Graphene furnace to control the gas flowing rate for different research purposes.

This product did not have a display, it must be controlled by the computer using manufacturer software.
Digital Mass Flow Controller for Gas Control Systems
Cost effective, High accuracy and fast response, Multi-gas, Auto-zero, Compatible interfaces.
Used for accurately controlling and measuring the gas flow rate of high pressure.
Ideal for CVD and other gas mixture applications.
International standard DB15 pin fitting; connects to MTI Furnaces with Swagelok1/4 fitting.

Specification

Full scale range (N₂)	( 0～100,200,500,1000)SCCM Other range can be customized at extra cost, please email to info@mtixtl.com
Accuracy	±1.0% S.P. (≥35% F.S.)
Accuracy	±0.35% F.S.(＜35% F.S.)
Repeatability	±0.2% FS
Linearity	±0.5% FS
Response Time	≤1sec
Valve Rest Position	Normally Closed or Normally Open
Temperature Coefficient	Zero: ≤±0.05% F.S./℃ Span: ≤±0.1% F.S.℃（≤30 SLM） Span: ≤±0.2% F.S.℃（＞30 SLM）
Zero Drift	＜0.6%F.S. per year without autozero
Surface Finish(Ra)	25Ra
Operation Temperature	（5～45）℃
Communication Interface for input Signal	Digital: RS485 DeviceNet^TM Analog:(0～5)VDC or (4～20)mA
Communication Interface for Output Signal	Digital: RS485 DeviceNet^TM Analog:(0～5)VDC or (4～20)mA
Power Supply	±11 ~ ±16 VDC or +11 ~ +28 VDC(400mA)
Electronic Connector	D-sub 9 pins male, D-sub 15 pins male, DeviceNet^TM male
Differential Pressure	(0.05～0.35) Mpa（≤10000SCCM） (0.1～0.35) Mpa（20000SCCM,30000SCCM） (0.2～0.45) Mpa（50000SCCM）
Max Pressure	3MPa
Leak integrity	1×10^-9 atm·cc / sec He（1×10^-10 Pa·m³ / sec He）
Seals Materials	Viton; Neoprene
Surface Chemistry (EP only)	——
Fittings	Swagelok1/4”
Weight	1kg