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Gas Mixing Station with Three Channel Float Flowmeters and Valves - EQ-GSL-3F-SS

In stock
Item Number: GSL3F-SS

The GSL-3F-SS is designed to mix and deliver 3 different gases to the MTI CVD system at a low cost. The system is installed in a heavy-duty mobile cart where a tube furnace can be placed on top of it. The flow rates are adjustable via three float flow meters. 


Flow rate

Diaphragm Pressure Gauge 
  • -0.1 0.15 MPa (for gas mixing tank)
Gas Mixing Tank
  • SS304
Gas Schematics
  • Three needle valves for three gas inlets
  • One valve for a gas outlet
Gas Inlets and Outlets
  • 1/4" compression tube fittings
  • 12' length 1/4" PTFE pipe is included for immediate use
  •  600 mm (L) x 600 mm  (W) x 650 mm ( H)

CVD & PECVD Furnace                                     Bubbler or evaporator for CVD                         
Load limit 400 lbs
Net weight 165 lbs
Shipping dimensions 41 x 49 x 38 inch
Shipping weight 200 lbs
Warranty One year limited with lifetime support
Operation Manual

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