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2-9 Channel Gas Control System with PLC Touch Panel and PC Operation Software - EQ-GSL-LCD
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Product Options
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EQ-GSL-LCD gas mixing station is designed for the control of 1-9 types of gasses flowing through vacuum-sealed tube furnaces at a low cost. It is installed in a heavy-duty mobile cart where the tube furnace can be placed on the top. LCD touch screen is integrated to provide easy control of the gas flow rate of each independent channel. Such a system is suitable for using with CVD furnaces to study the gas environmental influence on various materials.
SPECIFICATIONS
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Function
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Two Channels
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Three Channels
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Four Channels
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Customized Four to Nine Channels
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Computerized
Mass Flow Controller
Note: Other range MFC can be customized at extra cost upon request. |
Controlling Range:
- Controller 1: 1~199 SCCM
- Controller 2: 1~499 SCCM
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Controlling Range:
- Controller 1: 0~100 SCCM
- Controller 2: 1~199 SCCM
- Controller 3: 1~499 SCCM
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Controlling Range:
- Controller 1: 0~100 SCCM
- Controller 2: 1~199 SCCM
- Controller 3: 1~199 SCCM
- Controller 4: 1~499 SCCM
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Select Range from below to make Customised 4 to 9 Channels:
- 0~100 SCCM
- 1~200 SCCM
- 1~500 SCCM
- 1~1000 SCCM
- 1~2000 SCCM
- 1~5000 SCCM
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| Accuracy, linearity, and repeatability |
Accuracy: ±1.5%FS
Linearity: ±1%FS
Repeatability: ±0.2%FS |
| Working Temp and Pressure |
Working Temp. : 5~45 ºC
Max. Pressure: 3x106 Pa |
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Working Voltage
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AC 110 - 240V Single phase 50/60Hz |
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Power
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23W |
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PLC Touch Screen
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- 6" color touch screen control panel to make parameter setting at easy.
- Touchscreen Control and PC remote switchable, RS485 Port and a supplied software are included for remote operation by PC, not compatible with LabVIEW for now.
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| Mechanical Pressure Gauge |
Measurement Range: -0.1~0.15 MPa |
| Needle Valve |
316 Stainless Steel |
Gas Pipeline
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- One stainless steel gas mixing tank is built-in
- Internal pipeline: 1/4" O.D stainless steel and 1/4" O.D PTFE
- External pipeline: 1/4" O.D PTFE
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| Gas Mixing Tank |
Φ80X120mm |
Stop Valve & Fittings |
316 stainless steel needle valve,
Φ1/4” Swagelok Tube Fitting |
| Dimensions |
600mm(L) x 855mm(W) x 700mm(H) |
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Compliance
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- All components are CE certified
- The unit can pass TUV(UL61010) or CSA certification at extra cost. （ please click marks below to learn details )
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Warranty
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One year limited with lifetime support |
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Oxygen Monitoring
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- An Optional oxygen Sensor can be used to monitor the oxygen level of gas(es) used in CVD systems for preventing or reducing oxidation. Please click the picture below to learn more:
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Application Note
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- Waiting for 15 minutes to warm up the gas mixer and start your gas supply to charge.
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Related Products
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CVD & PECVD Furnace Click picture below to order bubbler or evaporator for CVD
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