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700L/S High Speed Turbo Pump Station with Electric Gate Valve (upto 10-7 torr) - EQ-GZK-103-L-LD

In stock
Item Number: GZK103L
EQ-GZK-103-L is a high-speed turbo-pump station with electric gate valve,  which provides the fastest pumping speed up to 700 L/s. It is an ideal tool for most of MTI's tube furnaces to achieve high vacuum > 5x 10E-7 torr (please read details in the specs)
Mobile Cart Structure
  • Inside:  turbo-pump with rotary vane pump with vacuum pressure sensors and auto shut off valve
  • Three phase AC 380V ± 10%, 50/60Hz
  • 2.5 KW power consumption 
Pumping Speed
& Vacuum Limit
  • Turbo-pump  700 L/S
  • Vacuum pressure:  10E-7 Torr  without connecting to any chamber
  • Mechanical pump: 800 L/min

Flange Size

  • CF160 from turbo-pump
  • KF 40 for connecting to the outside vacuum chamber

Working Range

  • From 750 Torr to < 5.0 E-7 Torr with the proper connection at room temperature. The 5.0 E-6 torr can be achieved with MTI 8" - 15" O.D tube furnace.


  • 135 Kg


  • Dimensions: 1000 X600 X 1550mm

One year manufacturer warranty.(Attention: Improper use will cause all claims for liability and warranties to be forfeited. Improper use is deemed as below:
  • Pumping of corrosive or explosive media.
  • Pumping of condensing vapors.
  • Pumping of liquids.
  • Pumping of dust.
  • Operation with improper high levels of insulated heat input.
  • Operation in potentially explosive areas.)
  • CE Certified 
  • NRTL certification is available upon request.

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