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3 L Plasma Cleaner with Vacuum Pump & Digital Controller, 6"Dx6.5"L Quartz Chamber - EQ-PCE-6
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Please email for lead time
Item Number: PCE6
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EQ-PCE-6 is a medium plasma cleaner with 6" Dia x 6.5"Length quartz chamber. It is designed to clean and remove nano-scale organic contamination on the substrate or wafer up to 4" using air, oxygen, or argon plasma. The rate of organic removal is about 20 nm/min Maximum at high RF power. It is an excellent tool to pre-clean single crystal substrate before epitaxial film deposition to achieve better quality. If you don't have experience with plasma surface cleaning, please refer to the articles as follows:
- McIntire, Theresa M., S. Rachelle Smalley, John T. Newberg, A. Scott Lea, John C. Hemminger, Barbara J. Finlayson-Pitts. "Substrate Changes Associated with the Chemistry of Self-Assembled Monolayers on Silicon." Langmuir (2006) 22(13): 5617-5624.
- Sumner, Ann Louise, Erik J. Menke, Yael Dubowski, John T. Newberg, Reginald M. Penner, John C. Hemminger, Lisa M. Wingen, Theo Brauers, Barbara J. Finlayson-Pitts. "The Nature of Water on Surfaces of Laboratory Systems and Implications for Heterogeneous Chemistry in the Troposphere." Phys. Chem. Chem. Phys. (2004) 6: 604-613.
- Mennicke, Ulrike, Tim Salditt. "Preparation of Solid-Supported Lipid Bilayers by Spin-Coating." Langmuir (2002) 18: 8172-8177.
SPECIFICATIONS
Input Power
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| RF Power |
- RF power (High voltage & high-frequency current applied on the coil) is adjustable at three levels: Low Setting 7.2W; Medium Setting 10.2W; High Setting 30W
- RF frequency: 13,56 MHz
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| Control Panel |
- Control Function: Clean time, RF Power, Vacuum Pump.
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Plasma Chamber
 
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- 6" diameter x 6.5" length quartz chamber
- 3 Liter Capacity
- Hinged type door with viewing window for easy sample loading and observing
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Vacuum Pump
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| Inert Gas |
- Many inert gases can be chosen for plasma cleaning such as N2, Ar, Air, and Mixed gas depended on what kind of material will be treated. ( not included in the package)
- No flammable gas shall be used for the plasma cleaner
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Optional
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- Combinations of PCE-6 plasma cleaner with Two Channel Gas Mixer will be a solution for introducing up to two process gases. Order plasma cleaner with the two-channel gas mixer from product options or Click the picture left for Two-Channel Gas Mixer.
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| Dimensions |
- 400mm L ×300mm W ×300mm H
- 16" x 12" x 12" (inch)
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| Net Weight |
30 Lbs |
| Shipping Weight & Dimensions |
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| Warranty |
One year limited warranty with lifetime support ( no warranty for Pyrex glass chamber )
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| Application Note： |
Positive Pressure may damage Plasma Quartz Chamber. |
| Operation Manual |
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Sale Price: Starting at USD$3,898.00
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