Compact UV-Ozone Cleaner with 6"x 6" Chamber - EQ-PCE-66

Sale Price: USD$4,998.00

If you are international, please click this.

In stock

Item Number: PCE66

EQ-PCE-66 is a compact Ultraviolet (UV) Ozone cleaner, which is a dedicated system to remove a variety of contaminants from surfaces of substrates samples. UV Ozone cleaning is simple to use the dry process which is a highly effective method to clean surfaces. The cleaning effect is caused by irradiating the surface of a substrate with suitable lamps creating enough energy in the UltraViolet spectrum range. It is the photo-sensitized oxidation process by atomized Oxygen and high reactive Ozone. The UV radiation directly to the surface stimulates the reaction. Volatile hydrocarbon products are produced. The removal of hydrocarbons in nanometer thickness by oxidation results in ultra-clean surfaces with significant wettability. This is very important before the thin-film coating process of glass and ceramic surfaces.

SPECIFICATIONS

Input Power	AC 220V±10%, 50/60Hz AC110V is available by a 200W 110V-220C transformer ( click underlined to order )
Feature	To remove a variety of contaminants from the surfaces of substrates samples Use the dry process to clean surfaces with the highly effective method Generate energy at wave line between 254nm to 185nm There is an Oxygen inlet port, Ozone removal pump LCD display unit with the substrate temperature display. Buzzer for indicating completion of cleaning Locking feature for locking sample feeding tray to avoid opening during operation
UV Lamp	UV lamp power: 120W Max. Wavelength: 254 nm and 185 nm Max substrate size: 150 x 150 mm ( 6"x 6")
Chamber & Sample Stage	Tray size: 176mm x 168mm Sample feeding: slide-based
LCD Display	Time Duration: 1 - 99 sec/min/hr Sample Temperature measurement feature (no heating function, only a thermocouple installed)
Exhausting Fan	An exhausting duct with a fan is installed on the back of the O-Zone cleaner. Easy to connect with an air pipe for exhausting the O-zone gas generated by the cleaner to the outside of the building.
Shipping Weight & Dimensions	70 lbs 40"x30"x22"
Warranty	One-year limited warranty with lifetime support ( no warranty for Pyrex glass chamber )
Application	Cleaning molecular contamination from SPTs, AFM tips, and surfaces Curing UV-adhesives UV-photopatterning of SAM surfaces Oxidizing PDMS Surface sterilization Etch, pattern, sharpen Clean MEMS devices Clean substrate surfaces such as Si, Ge, GaAs, and all oxide crystal substrate
Consumable Parts	Replacement lamps
Operation Video
Reference articles	1. C. Koenigsmann et al. J. Am. Chem. Soc. 2011, 133, 25, 9783–9795. 2. M. Cargnello, J. Am. Chem. Soc. 2015, 137, 21, 6906–6911. 3. D. Li, ACS Catal. 2012, 2, 7, 1358–1362.

Related Products

Desktop UV-Ozone Cleaner with 12" x 12" Chamber and Heating Stage up to 150C - EQ-PCE-22 Sale Price: RFQ	0.7 L Plasma Cleaner with Digital Vacuum Gauge, 3"Dx 6.5"L Quartz Chamber, 13.56 Mhz - EQ-PCE-3 Sale Price: RFQ	3 L Plasma Cleaner with Vacuum Pump & Digital Controller, 6"Dx6.5"L Quartz Chamber - EQ-PCE-6 Sale Price: RFQ
3 Rotary Target Plasma Sputtering Coater Including 3 Targets - VTC-16-3HD-LD Sale Price: RFQ	8.5" RF Plasma Cleaner / Etcher with Vacuum Pump. (12 Liter, 13.56 Mhz, 80W max.) - EQ-PCE-8 Sale Price: RFQ	Atmospheric Plasma Jet-Flow system (Plasma Pen) for Surface Treatment - GSL1100X-PJF Sale Price: RFQ

Compact UV-Ozone Cleaner with 6"x 6" Chamber - EQ-PCE-66

Related Products

Desktop UV-Ozone Cleaner with 12" x 12" Chamber and Heating Stage up to 150C - EQ-PCE-22

0.7 L Plasma Cleaner with Digital Vacuum Gauge, 3"Dx 6.5"L Quartz Chamber, 13.56 Mhz - EQ-PCE-3

3 L Plasma Cleaner with Vacuum Pump & Digital Controller, 6"Dx6.5"L Quartz Chamber - EQ-PCE-6

3 Rotary Target Plasma Sputtering Coater Including 3 Targets - VTC-16-3HD-LD

8.5" RF Plasma Cleaner / Etcher with Vacuum Pump. (12 Liter, 13.56 Mhz, 80W max.) - EQ-PCE-8

Atmospheric Plasma Jet-Flow system (Plasma Pen) for Surface Treatment - GSL1100X-PJF