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Automatic and Vacuum-Sealed Linear Sliding Device for Tube Furnace - EQ-Slide-300


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Item Number: EQ-Slide-300
     Features
  
   EQ-Slide-300 is an automatic vacuum-sealed slide module that is designed to connect an 80 mm OD processing tube for moving a sample in and out under a vacuum or controlled atmosphere.
   It can convert a tube furnace as an RTP furnace for fasting heating ad fast cooling under a controlled atmosphere, or a horizontal crystal growth furnace for 2D materials at low cost.
 Moving Mechanism
  • The precision screw is driven by DC motor at the two-stage speed via a vacuum-sealed scalable bellows
    • Fast speed:   300 mm / minute ( constant speed)
    • Slow speed:   0.5 mm - 30 mm / minute  ( adjustable )
  • Moving distance:  1 -  300 mm Max programmable on the control panel
  • The moving mechanism is installed on the mobile table with 600x600 x 600 
Tube Flange

  • One set of  80 mm OD vacuum-sealed flange with KF25 vacuum port and gas inlet valve is included  to connect scalable bellows and processing tube with KF 25 port
  • Optional 25 mm, 60mm, 100 mm OD flange are available upon request
  • Vacuum level:  10-5 torr by a turbopump
Sample Holder

  • One stainless steel rod with the fibrous thermal block is installed on the center of moving bellows
  • One 50x50mm quartz sample holder is inserted into the rod for carrying sample for CVD or annealing processing.
  • One height adjustable table in the bottom of the moving mechanism for easy alignment.
  • One K-type thermal couple is placed under the sample holder via a central rod to monitor the temperature.
Control Panel 
  • 7" color touch screen panel with the control box is located on the mobile cart
  • Programmable all moving parameters and record/display the temperature of the sample order.
Dimension
Operation Video     
    
Note This device  only match MTI tube furnaces as the link below 
         

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1. Prices listed online are valid for the US market and who pay by credit card only. There will be extra charges for shipping & handling. Prices vary from country to country.
2. We may add extra charges for paper orders and NET 30 terms due to extra labor costs.
3. The prices listed are subject to change without notice.