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Automatic and Vacuum-Sealed Linear Sliding Device for Tube Furnace - EQ-Slide-300

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Item Number: EQ-Slide-300
   EQ-Slide-300 is an automatic vacuum-sealed slide module that is designed to connect an 80 mm OD processing tube for moving a sample in and out under a vacuum or controlled atmosphere.
   It can convert a tube furnace as an RTP furnace for fasting heating ad fast cooling under a controlled atmosphere, or a horizontal crystal growth furnace for 2D materials at low cost.
 Moving Mechanism
  • The precision screw is driven by DC motor at the two-stage speed via a vacuum-sealed scalable bellows
    • Fast speed:   300 mm / minute ( constant speed)
    • Slow speed:   0.5 mm - 30 mm / minute  ( adjustable )
  • Moving distance:  1 -  300 mm Max programmable on the control panel
  • The moving mechanism is installed on the mobile table with 600x600 x 600 
Tube Flange

  • One set of  80 mm OD vacuum-sealed flange with KF25 vacuum port and gas inlet valve is included  to connect scalable bellows and processing tube with KF 25 port
  • Optional 25 mm, 60mm, 100 mm OD flange are available upon request
  • Vacuum level:  10-5 torr by a turbopump
Sample Holder

  • One stainless steel rod with the fibrous thermal block is installed on the center of moving bellows
  • One 50x50mm quartz sample holder is inserted into the rod for carrying sample for CVD or annealing processing.
  • One height adjustable table in the bottom of the moving mechanism for easy alignment.
  • One K-type thermal couple is placed under the sample holder via a central rod to monitor the temperature.
Control Panel 
  • 7" color touch screen panel with the control box is located on the mobile cart
  • Programmable all moving parameters and record/display the temperature of the sample order.
Operation Video     
Note This device  only match MTI tube furnaces as the link below 

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