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In-Situ Thin Film Thickness / Deposition Rate Monitor with Software, and Optional Sensor, Quartz Crystals - EQ-TM106-LD

In stock
Item Number: TM106-LD
Transported by LTL Freight (Truck)


EQ-TM106-LD is a high precision thickness sensor/monitor for the thin film deposition process. It is based on the principle that the mass of a deposited film on a quartz crystal can be measured by monitoring the change in crystal’s oscillating frequency. If the density of deposited material is known, the thickness can be determined to a high resolution of sub-Angstrom (0.037 Å for this equipment).

  • 5 VDC, 400 mA
Frequency Range
  • 6.0 to 5.0 MHz (fixed)
Frequency Resolution
  • +/- 0.03 Hz @ 6 MHz
Measurement Speed
  • Up to 10 measurements per second
Reference Frequency Stability
  • +/- 2 ppm
Thickness and Rate Resolution
  • +/- 0.037Å @tooling = 100%, density = 1.00 g/cm3, Z-ratio = 1.00, frequency = 6.0 MHz
Display Resolution
  • 0.1 Å         
Operating Temperature
  • 0 to 50°C
Water Flow Requirement
  • Minimum water flow 150-200 cc/min, 30° C max
Water Feedthrough
  • 2 pass water 3/16 in. (4.8 mm) O.D. tubing
Standard Package
  • Sensor with the quartz holder is included.
  • 6″ BNC Cable M/F is included
  • SMA Female to Female Bulkhead Connector Adaptor is included (For MTI’s film deposition systems, feedthrough with SMA female (in the deposition chamber) to BNC female (outside chamber) adapter)
  • Gold quartz crystals of one set (10 PCS) is included.
Quartz holder 6″ BNC-J3 Female to
SMA-J3 Female Cable
SMA Bulkhead Adaptor Gold  quartz crystals
Quartz Crystals (Optional)
  • Starting frequency: 6 MHz
  • Crystal size: 14 mm Dia.
  • Anchor electrode pattern for maximum crystal stability and life
  • Gold and alloy electrode quartz crystals can be ordered at MTI (Click pictures below or select product options)
  • Choose the quartz crystal with the right electrode material for your application - gold, silver, alloy
    • Recommend gold electrode crystals for most applications
    • Silver electrode crystals work well for processes with high heat loads, such as sputtering
    • Alloy electrode crystals are recommended for high-stress deposition, such as optical coating with dielectric materials and semiconductor processes with high-stress materials 
Operating System
  • Windows 8, Windows 7, Windows Vista, Windows XP, Windows 2000
  • STM-2 software is included (Download link is also available here)
  • STM-2 LabVIEW™ Application Software is available here.
  • An additional laptop ($699) with software pre-installed is highly recommended and can be ordered at MTI    
Compliance  CE Certificated (Assembled in the USA)
Monitor Size
  • 114 mm L x 76 mm W x 25 mm H
Monitor Weight
  • 57 g
  • One year limited warranty with lifetime support
Operation Instructions    
Application Notes

  • If you need test the resistance of a coating of the electrode to cracking or detachment from a substrate, Please click to order Flexibility Tester.
  • If you need a customized feedthrough, please email us for more information.
    Drawing FlexibilityTest Applcation for Sputtering

No. Description Qty
STM-2 rate / thickness monitor 1
Software/monitor manual CD 1
5 m (16.4 ft.) USB cable 1
BNC male to male cable 1
5 Quartz holder 1
6 6″ BNC Cable M/F 1
7 SMA Female to Female Bulkhead Connector Adaptor 1
8 Gold  quartz crystals(Included 10 pc) 1

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1. Prices listed online are valid for the US market and who pay by credit card only. There will be extra charges for shipping & handling. Price various from country to country.
2. We may add extra charges for paper order and net30 terms due to extra labor costs.
3. The prices listed are subject to change without notice.