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In-Situ Thin Film Thickness / Deposition Rate Monitor with Software, and Optional Sensor, Quartz Crystals - EQ-TM106-LD
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In stock
Item Number: EQ-TM106-LD
Transported by LTL Freight (Truck)
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EQ-TM106-LD is a high precision thickness sensor/monitor for thin film deposition process. It is based on the principle that the mass of a deposited film on a quartz crystal can be measured by monitoring the change in crystal’s oscillating frequency. If the density of deposited material is known, the thickness can be determined to a high resolution of sub-Angstrom (0.037 Å for this equipment).
SPECIFICATIONS:
| Power |
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| Frequency Range |
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| Frequency Resulution |
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| Measurement Speed |
- Up to 10 measurements per second
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| Reference Frequency Stability |
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Thickness and Rate Resolution
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- +/- 0.037Å @tooling = 100%, density = 1.00 g/cm3, Z-ratio = 1.00, frequency = 6.0 MHz
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Display Resolution
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| Operating Temperature |
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| Water Flow Requirement |
- Minimum water flow 150-200 cc/min, 30° C max
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| Water Feedthrough |
- 2 pass water 3/16 in. (4.8 mm) O.D. tubing
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| Standard Package |
- Sensor with the quartz holder is included.
- 6″ BNC Cable M/F is included
- SMA Female to Female Bulkhead Connector Adaptor is included (For MTI’s film deposition systems, a feedthrough with SMA female (in the deposition chamber) to BNC female (outside chamber) adapter)
- Gold quartz crystals of one set (10 PCS) is included.
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| Quartz holder |
6″ BNC-J3 Female to
SMA-J3 Female Cable |
SMA Bulkhead Adaptor |
Gold quartz crystals |
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Quartz Crystals (Optional)
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| Alloy |
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- Starting frequency: 6 MHz
- Crystal size: 14 mm Dia.
- Anchor electrode pattern for maximum crystal stability and life
- Gold and alloy electrode quartz crystals can be ordered at MTI (Click pictures below or select product options)
- Choose the quartz crystal with the right electrode material for your application - gold, silver, alloy
- Recommend gold electrode crystals for most applications
- Silver electrode crystals work well for processes with high heat loads, such as sputtering
- Alloy electrode crystals are recommended for high-stress deposition, such as optical coating with dielectric materials and semiconductor processes with high-stress materials
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| Operating System |
- Windows 8, Windows 7, Windows Vista, Windows XP, Windows 2000
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| Software |
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| Installation |
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| Compliance |
CE Certificated (Assembled in the USA) |
| Monitor Size |
- 114 mm L x 76 mm W x 25 mm H
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| Monitor Weight |
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| Warranty |
- One year limited warranty with lifetime support
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| Operation Instructions |
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Application Notes
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- If you need test the resistance of a coating of the electrode to cracking or detachment from a substrate, Please click to order Flexibility Tester.
- If you need a customized feedthrough, please email us for more information.
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| Drawing |
FlexibilityTest |
Applcation for Sputtering |
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LIST OF PARTS:
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