Fluidized Bed CVD (FBCVD) Furnace with 1" O.D Quartz Tube and Flange for Powder CVD - OTF-1200X-S-FB

• Provides uniform distribution of the gas blast over the entire cross-section of the tube chamber
• Solid particles are suspended by an upward gas flowing
• Excellent heat transfer and coating to every single suspended particle 
• Processed materials can be discharged from the top side of the tube after the cap is been taken off

• Frits with forced convection design can trap the particles within the central heating area
• Frit: 15~40 microns porous, 22mm O.D x 4mm thick

• You may consider SS310 high-temperature stainless steel tube for processing high-pressure materials.
• Max. working temperature 800ºC
• Max. Pressure 3 bars (built-in over-pressure valve which can be automatically reset and reusable)
• ALD delivery system may be added on the top furnace for powder coating

• Double-layer steel structure with air cooling
• Split door design for easy installation of tube
• High-purity Al2O3 fibrous insulation designed for maximum energy saving

Power

1200W

Voltage

Max. Temperature

1100^oC

Continuous Temperature

1000^oC

Max. Heating Rate

<= 20 ^oC /min

Tube Size and Materials
  

• One quartz tube is included. Main tube with bottom frit and enlarged space for particles processing
• Two Ends: 25ODx 22 ID (mm); Central: 50O.D. x 44 I.D. (mm), please click the picture to the left for details
• Central enlarged area ensures the high aerodynamic performance

Sealing Flanges

• Bottom flange: Regular designed 1'' bottom flange with 1/4'' tube fitting for introducing primary gas 
• Top Flange: Special designed 1'' top flange with backstreaming secondary (precursor) gas inlet and exhaust, please click the picture to the left for details

Options

• An optional gas mixing system is available for the CVD or ALD process. 
• Oxygen Monitoring: An Oxygen Sensor can be used to monitor the oxygen level of gas(es) used in CVD systems for preventing or reducing oxidation. Please click the picture below to learn more
• Ultrasonic Atomizer can be integrated into the system for delivering sub-micron droplets to the hot zone  Please click the bottom right picture for details
• Optional material feeder for continuous operation. 

            

Heating Zone Length

200mm (single zone)

Temperature Controller

• 30 programmable segments for precise control of heating rate, cooling rate, and dwell time.
• Built-in PID Auto-Tune function with overheating & broken thermocouple protection.
• Over-temperature protection and alarm allow for operation without attendant(s).
• +/- 1 ºC temperature accuracy.
• Eurotherm 3000 precision temperature controller is optional with +/- 0.1ºC accuracy

Dimensions

Net Weight

~20 Kg (excluding mobile cart)

Shipping Dimensions

48" x 40" 35" (L x W x H)

Shipping Weight

150 lbs

Warranty 

Laptop & software (Optional)
    

• Brand new laptop with Microsoft Windows 10 and Microsoft Office 2013 (30 days free trial) 
• Labview Based Temperature Control System (EQ-MTS01) enables the user to edit temperature profiles, manage heat-treatment recipes, record and plot data for MTI furnaces

Compliance
   

• CE Certified
• NRTL or CSA certification is available at an extra cost
  

Warning
Click here to learn the installation of a gas regulator

• Tube furnaces with quartz tube is designed for using under low positive pressure < 0.2 bars / 3 psi / 0.02 Mpa
• Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation. Click here to learn the installation of a gas regulator.
• Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used up to 1000°C 

Operation Instructions video