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Fluidized Bed CVD (FBCVD) Furnace with 1" O.D Quartz Tube and Flange for Powder CVD - OTF-1200X-S-FB

Transported by LTL Freight (Truck)

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OTF-1200X-S-FB is a UL/CSA ready to pass and a Fluidized Bed Vertical Furnace with 1'' O.D Quartz Tube (2'' O.D enlarged central area) for powder CVD ( FBCVD)applications. It consists of a vertical positioned cylindrical heating chamber that surrounds the quartz tube with a built-in filter right in the lower middle section of the central heating zone. Its filter is a porous (15~40 microns) quartz frit that allows the controlled gas flow passes through and floats the particles on a cushion of the gas stream where the interaction between the solid and gaseous materials takes place.
Fluidized Zone

  • Provides uniform distribution of the gas blast over the entire cross-section of the tube chamber
  • Solid particles are suspended by an upward gas flowing
  • Excellent heat transfer and coating to every single suspended particle 
  • Processed materials can be discharged from the top side of the tube after the cap is been taken off

Note: The gas is passed upward through the fluidized bed at a high enough velocity to lift the particles. However, particles may be swept away from the tube chamber entirely if the velocity was set too high. Depends on the particle size, you may want to adjust the gas in pressure and flow rate until particles are lifted and move turbulently inside of the tube.

Quartz Frit

  • Frits with forced convection design can trap the particles within the central heating area
  • Frit: 15~40 microns porous, 22mm O.D x 4mm thick
Optional Tube

  • You may consider SS310 high-temperature stainless steel tube for processing high-pressure materials.
  • Max. working temperature 800ºC
  • Max. Pressure 3 bars (built-in over-pressure valve which can be automatically reset and reusable)
  • ALD delivery system may be added on the top furnace for powder coating
Furnace Casing
  • Double-layer steel structure with air cooling
  • Split door design for easy installation of tube
  • High-purity Al2O3 fibrous insulation designed for maximum energy saving




AC 110V or 220V Single Phase, 50/60 Hz

Max. Temperature


Continuous Temperature


Max. Heating Rate

<= 20 oC /min

Tube Size and Materials

  • One quartz tube is included. Main tube with bottom frit and enlarged space for particles processing
  • Two Ends: 25ODx 22 ID (mm); Central: 50O.D. x 44 I.D. (mm), please click the picture to the left for details
  • Central enlarged area ensures the high aerodynamic performance

Sealing Flanges

  • Bottom flange: Regular designed 1'' bottom flange with 1/4'' tube fitting for introducing primary gas 
  • Top Flange: Special designed 1'' top flange with backstreaming secondary (precursor) gas inlet and exhaust, please click the picture to the left for details


  • An optional gas mixing system is available for the CVD or ALD process. 
  • Oxygen Monitoring: An Oxygen Sensor can be used to monitor the oxygen level of gas(es) used in CVD systems for preventing or reducing oxidation. Please click the picture below to learn more
  • Ultrasonic Atomizer can be integrated into the system for delivering sub-micron droplets to the hot zone  Please click the bottom right picture for details
  • Optional material feeder for continuous operation. 

Heating Zone Length

200mm (single zone)

Constant Heating Zone 60mm (+/-2oC)

Temperature Controller

  • 30 programmable segments for precise control of heating rate, cooling rate, and dwell time.
  • Built-in PID Auto-Tune function with overheating & broken thermocouple protection.
  • Over-temperature protection and alarm allow for operation without attendant(s).
  • +/- 1 ºC temperature accuracy.
  • Eurotherm 3000 precision temperature controller is optional with +/- 0.1ºC accuracy
Heating Elements
Fe-Cr-Al Alloy doped by Mo
Fitting Ports
1/4'' Tube Fittings were installed on both sides of the flange for standard connection to the gas supplier


340mm×300mm×1000mm ( W x L x H)

Net Weight

~20 Kg (excluding mobile cart)

Shipping Dimensions

48" x 40" 35" (L x W x H)

Shipping Weight

150 lbs


One-year limited warranty (Consumable parts such as heating elements, processing tubes, and o-rings are not covered by the warranty, please order the replacement at related products below.)

Laptop & software (Optional)

  • Brand new laptop with Microsoft Windows 10 and Microsoft Office 2013 (30 days free trial) 
  • Labview Based Temperature Control System (EQ-MTS01) enables the user to edit temperature profiles, manage heat-treatment recipes, record and plot data for MTI furnaces


  • CE Certified
  • NRTL or CSA certification is available at an extra cost

Click here to learn the installation of a gas regulator

  • Tube furnaces with quartz tube is designed for using under low positive pressure < 0.2 bars / 3 psi / 0.02 Mpa
  • Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation. Click here to learn the installation of a gas regulator.
  • Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used up to 1000°C 

Operation Instructions video


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