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Customized 1100oC 4 Zone Tube Furnace with 24" ( 600 mm) Día Quartz tube and Flange - GSL-1100X-24-IV
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Please email for the delivery time
Item Number: GSL-1100X-24-IVI
Transported by LTL Freight (Truck)
Personalization
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GSL-1100X-24-IV is a four-zone tube furnace with 24" quartz tube and vacuum flanges. Needle valves and, vacuum gauges are pre-installed for immediate use. 30-segment programmable controllers are built-in with K type thermal couple. Microprocessor-based PID control provides excellent control without overshooting and +/- 1 ºC accuracy. It has been widely used for materials or chemical lab for sintering all types of new material samples under vacuum or other gas conditions. It is an excellent tool for annealing, CVD, and sintering processes.
SPECIFICATIONS
Furnace structure
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- Double-layer steel casing with air cooling. The surface temperature of the case is < 70°C.
- Refractory fibrous alumina insulation liner for maximum energy saving.
- Heating element: NiCrAl Resistance Wire
- Two fibrous ceramic tube blocks are included for blocking heat radiation from the inside tube. (Ceramic blocks must be fully inserted into the furnace chamber before heating)
- Hinged types of vacuum-sealed flanges are included to achieve a vacuum level of 10-5 torr by a turbo-pump
   Holding 8" wafer
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Heating zone |
- Total heating zone length 1200 mm
- Four zones: 300 mm + 300 mm + 300mm + 300 mm (24" per zone)
- Constant temperature zone:
- 1000 mm (if three zones are in the same temperature within +/- 3°C) longitude direction
- 1100 mm (if three zones are in the same temperature within +/- 5°C) longitude direction
- +/- 3 oC along the cross-section
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Working temperature
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- Max heating temperature: 1150°C ( < 1 hour )
- Normal working temperature: 200~1100°C
- Max heating & cooling rate: 5°C/min
- Temperature uniformity: please click the pic left to enlarge
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Temperature control
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| Processing Tube |
- High-quality quartz tube with OD 600 mm x ID 590 mm x L 1500 mm
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Vacuum sealing & Flange
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A pair of water cold SS vacuum sealing flange (Hinged Type) and 4 pieces of silicon O-ring are included.
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Left Side Flange: Vacuum gauge, stainless steel needle valves, and 1/4" barbed hose fitting.
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Right Side Flange: KF40 vacuum port with KF-40 Vacuum Right-Angle Valve for easy connection to KF40 bellows and pump. ( If using a pump with a KF25 port, you will need an adapter KF40-KF25.
- One 1/4" OD thermal couple insert port is built in the flange for easy temperature calibration.
- Vacuum Level: 10-2 torr by heavy-duty mechanical pump and 10-4 torr by regular turbopump. 5x10-6 torr can be reached by 700 L/s high-speed turbopumps and a modified flange adaptor
- Arecirculatingwaterchiller（ 16L/min）is included for cooling flanges
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Options for CVD
Click to enlarge
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- The tube furnace should be calibrated regularly to maintain temperature accuracy and uniformity. We are providing a simple calibration kit for you to complete this job at an extra cost The complete calibration kit includes (click the underline to see details):
- You may consider ordering a turbopump for hi-vacuum up to 10-5 torr ( click pic 1 to order )
- For CVD application, you may need a gas delivery system as Pic. 2
- For flammable gases, especially H2, you may integrate a gas leak detecter into the control panel, as Pic.3
 Pic. 1 Pic. 2  Pc. 3
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Rated Voltage
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- Three Phase, 220V AC, 50/60 Hz
- Power consumption: ~50 KW
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Product Dimension
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`~ 2000 L x 900W x 1200 H mm |
Net weight
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400kg |
Shipping dimension
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80" x 40" x 70" |
Shipping weight
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1000 lbs |
Warranty
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- One-year limited warranty for electrical parts. ( Consumable parts such as processing tubes, o-rings, and quartz tubes are not covered by the warranty)
- You may order a replacement quartz tube at the link below
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Compliance
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- CE Certified
- NRTL or CSA Certification is available upon request, additional charges will apply
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NOTE
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| Operation Instructions |
 
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Warning
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- Tube furnaces with quartz tubes are designed for use under vacuum and low pressure < 0.2 bar / 3 psi
- Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation. Click here to learn about the installation of a gas regulator.
- Vacuum pressures may only be safely used up to 1000°C
- The flow rate for gases should be limited to<200 SCCM for reducing thermal shocks to the tube
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