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1200ºC Microwave Plasma Assisted CVD Rotary Furnace w/ 2" Tube - GSL-1200R-MWPE


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Item Number: GSL-1200R-MWPE
Transported by LTL Freight (Truck)
 GSL-1200R-MWPE is an MPCVD (microwave-assisted CVD) rotary furnace.  It integrates the 2.45GHz microwave generator and 2"  rotary processing tube ( 0-5 rpm) with vacuum-sealed flanged to provide stable plasma from 800oC to 1200oC under ~4.5 torr vacuum.  It is designed to fast calcine powder and form the core-shell structure for powder in battery research.
 
SPECIFICATIONS:
Power
  • Total 2000W 
  • 208-240VAC, Single phase, 50/60Hz
Microwave

  • Frequency:                  2.45 GHz ±25 MHz
  • Power Output:            1400W
  • Microwave leaking:     ≤ 3 mW/cm² at 1 meter away. 
  • One digital power controller is built in to adjust output power from 10 - 100%
 Heating Module and
Processing Tube

  • Ni-Cr-Al wire heating coin with 80 mm ID is installed inside a fibrous alumina module (Pic. 1)
  • The heating coil is placed inside the microwave  chamber
  • 2"  Fused quartz processing tube with a mixing blade in the center (Pic. 2 and Pic.3)
  •  Pic. 1    Pic. 2     Pic.3
Flanges & Vacuum

  • One pair of vacuum flange is included to seal the quartz tube
    • KF25 vacuum port and 1/4 gas inlet and outlet with needle valves are built-in the flange ( Pic. 1)
  • One digital vacuum gauge is included for vacuum control ( Pic. 2)
  • Max. Vacuum level:  10-2 torr by dry pump and 10-5 torr by turbopump.
  • The pump is not included. Please click Pic. 3 to order separately.  For CVD application,  suggest choosing a dry pump.
Pic. 1  Pic. 2   Pic.3

Inline Swivel &
Rotary Speed

 

  • Two Inline Swivel Gas Fittings are included and connected to flanges, which allows gas pipe in place when the tube rotating
  • Rotation speed:  Tube rotation is driven by a DC motor with a speed range of 1- 5 rpm variable
  • A 1/4" gas tube is required to connect the Inline Swivel Gas Fittings to the gas tank
  • Click the picture left to see detailed specs

 Working Temperature

  • Max. 1200ºC <  30 minutes with heating module assisted
  • Min.  800ºC with heating module assisted
  • ≤1100ºC continuous with heating module assisted and Plasma
  • Heating rate:  1 ~20°C / min  programmable
  • ~750ºC   heating by microwave only without temperature control

 Temperature Controller

  • 30 segments programmable for heating rate, dwell temperature and time, and cooling rate
  • SCR temperature control  
  • Over-temperature and thermal couple broken protection
  • Control accuracy  +/-1.0 ºC
  • K-type thermal couple inserted through the flange
Net Weight
  • 30  kg
Dimensions

  • Microwave: 560(L) x 410(W) x 340(H) mm
  • Total depth with tube and flange: 780 mm
  • Controler: 600(L) x 520(W) x 265(H) mm
Warranty
  • One-year limited warranty with lifetime support. 
  • Consumables, including crucibles, heating elements, and heat insulation materials are not covered by the warranty.
  • ATTENTION: Any damages caused by the use of corrosive and acidic gasses are not under the coverage of MTI One Year Limited Warranty.
Compliance
  • CE Certified
  • NRTL or CSA certification is available upon request
Operation Video

        

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1. Prices listed online are valid for the US market and who pay by credit card only. There will be extra charges for shipping & handling. Prices vary from country to country.
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