Browse Categories
Search

1200ºC Max Microwave Plasma Assisted CVD (MPCVD) 2" Tube Furnace - GSL-1200X-50-MWPE


Please email for lead time
Item Number: GSL1200X50MWPE
Transported by LTL Freight (Truck)
GSL-1200X-50-MWPE is a microwave-assisted CVD tube furnace (MPCVD). It integrates the 2.45GHz microwave generator, heating modules, and 2" OD quartz tube furnace with vacuum-sealed flanged to provide stable plasma from 800oC to 1200oC under ~4.5 torr vacuum. 
It is the most cost-effective furnace for both vacuum tube furnaces without plasma and MPCVD for nano-material research.

 
SPECIFICATIONS:
Furnace Features

  • 1400W  2.45 GHz  microwave chamber
  • Stainless steel and aluminum shield to protect from microwave radiation 
  • Rapid heating up to 20 ºC/minute speed
  • Heating module inside microwave chamber with max. working temperature 1200°C
  • Precision temperature control with 30 segments programable within +/- 1ºC
  • Vacuum casting thermal insulation material for max. energy saving.
Power
  • 2000W 
  • 208-240VAC, Single phase, 50/60Hz
Microwave

  • Frequency:                  2.45 GHz ±25 MHz
  • Power Output:            1400W
  • Microwave leaking:     ≤ 3 mW/cm² at 1 meter away. 
  • One digital power controller is built in to adjust output power from 10 - 100%
 Heating Module and
Processing Tube

  • Ni-Cr-Al wire heating coin  with 80 mm ID is installed inside fibrous alumina module (Pic. 1)
  • The heating coil is placed inside the microwave  chamber
  • 2" quartz tube ( OD 50 x ID 44x L 600 mm) is inserted inside the heating module and microwave chamber to produce plasma (Pic.2)
  •  Pic. 1    Pic. 2
Flanges & Vacuum

  • One pair of vacuum flange is included to seal the quartz tube
    • KF25 vacuum port and 1/4 gas inlet and outlet with needle valves are built-in the flange ( Pic. 1)
  • One digital vacuum gauge is included for vacuum control ( Pic. 2)
  • Max. Vacuum level:  10-2 torr by dry pump and 10-5 torr by turbopump.
  • The pump is not included. Please click Pic. 3 to order separately.  For CVD application,  suggest choosing a dry pump.
Pic. 1  Pic. 2   Pic.3

 Working Temperature

  • Max. 1200ºC <  30 minutes with heating module assisted
  • Min.  800ºC with heating module assisted
  • ≤1100ºC continuous with heating module assisted and Plasma
  • Heating rate:  1 ~20°C / min  programmable
  • ~750ºC   heating by microwave only without temperature control

 Temperature Controller

  • 30 segments programmable for heating rate, dwell temperature and time, and cooling rate
  • SCR temperature control  
  • Over-temperature and thermal couple broken protection
  • Control accuracy  +/-1.0 ºC
  • K type thermal couple inserted through the flange
Net Weight
  • 30  kg
Dimensions

  • Microwave: 560(L) x 410(W) x 340(H) mm
  • Total depth with tube and flange: 780 mm
  • Controler: 600(L) x 520(W) x 265(H) mm
Warranty
  • One-year limited warranty with lifetime support. 
  • Consumables, including crucibles, heating elements, and heat insulation materials are not covered by the warranty.
  • ATTENTION: Any damages caused by the use of corrosive and acidic gasses are not under the coverage of MTI One Year Limited Warranty.
Compliance
  • CE Certified
  • NRTL certification is available upon request at the extra cost
Operation Video
        

Related Products

Shopping Cart
Your cart is empty.
Please clear the browsing history before ordering the product. Otherwise, availability and price are not guaranteed.
Mailing Lists
MTI sponsorships:
MTI Sponsors Thermoelectrics Workshop

MTI-UCSD Battery Fabrication Lab


MTI Sponsors the Postdoctoral Awards

Upcoming Shows:

2022 MRS Fall Meeting Nov 27 - Dec 2 Boston MA Booth 901

AABC USA 2022 Dec 5 - 8 San Diego Booth 804

Recent Attended Shows:
242nd ECS Meeting October 9 - 13 Atlanta GA Booth 200

COMBI 2022 September 26 - 30 Golden CO


John Goodenough 100th Birthday Symposium


Click here to see our past conferences

 

Notices
1. Prices listed online are valid for the US market and who pay by credit card only. There will be extra charges for shipping & handling. Price various from country to country.
2. We may add extra charges for paper order and net30 terms due to extra labor costs.
3. The prices listed are subject to change without notice.