1200ºC Max Microwave Plasma Assisted CVD (MPCVD) 2" Tube Furnace - GSL-1200X-50-MWPE

• 1400W  2.45 GHz  microwave chamber
• Stainless steel and aluminum shield to protect from microwave radiation 
• Rapid heating up to 20 ºC/minute speed
• Heating module inside microwave chamber with max. working temperature 1200°C
• Precision temperature control with 30 segments programable within +/- 1ºC
• Vacuum casting thermal insulation material for max. energy saving.

• 2000W 
• 208-240VAC, Single phase, 50/60Hz

• Frequency:                  2.45 GHz ±25 MHz
• Power Output:            1400W
• Microwave leaking:     ≤ 3 mW/cm² at 1 meter away. 
• One digital power controller is built in to adjust output power from 10 - 100%

• Ni-Cr-Al wire heating coin  with 80 mm ID is installed inside fibrous alumina module (Pic. 1)
• The heating coil is placed inside the microwave  chamber
• 2" quartz tube ( OD 50 x ID 44x L 600 mm) is inserted inside the heating module and microwave chamber to produce plasma (Pic.2)
•  Pic. 1    Pic. 2

• One pair of vacuum flange is included to seal the quartz tube
• KF25 vacuum port and 1/4 gas inlet and outlet with needle valves are built-in the flange ( Pic. 1)
• One digital vacuum gauge is included for vacuum control ( Pic. 2)
• Max. Vacuum level:  10-2 torr by dry pump and 10-5 torr by turbopump.
• The pump is not included. Please click Pic. 3 to order separately.  For CVD application,  suggest choosing a dry pump.

 Working Temperature

• Max. 1200ºC <  30 minutes with heating module assisted
• Min.  800ºC with heating module assisted
• ≤1100ºC continuous with heating module assisted and Plasma
• Heating rate:  1 ~20°C / min  programmable
• ~750ºC   heating by microwave only without temperature control

 Temperature Controller

• Microwave: 560(L) x 410(W) x 340(H) mm
• Total depth with tube and flange: 780 mm
• Controler: 600(L) x 520(W) x 265(H) mm

• One-year limited warranty with lifetime support. 
• Consumables, including crucibles, heating elements, and heat insulation materials are not covered by the warranty.
• ATTENTION: Any damages caused by the use of corrosive and acidic gasses are not under the coverage of MTI One Year Limited Warranty.

• CE Certified
• NRTL or CSA certification is available upon request