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1200ºC Max Microwave Plasma Assisted CVD (MPCVD) 2" Tube Furnace - GSL-1200X-50-MWPE

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Item Number: GSL1200X50MWPE
Transported by LTL Freight (Truck)
GSL-1200X-50-MWPE is a microwave-assisted CVD tube furnace (MPCVD). It integrates the 2.45GHz microwave generator, heating modules, and 2" OD quartz tube furnace with vacuum-sealed flanged to provide stable plasma from 800oC to 1200oC under ~4.5 torr vacuum. 
It is the most cost-effective furnace for both vacuum tube furnaces without plasma and MPCVD for nano-material research.

Furnace Features

  • 1400W  2.45 GHz  microwave chamber
  • Stainless steel and aluminum shield to protect from microwave radiation 
  • Rapid heating up to 20 ºC/minute speed
  • Heating module inside microwave chamber with max. working temperature 1200°C
  • Precision temperature control with 30 segments programable within +/- 1ºC
  • Vacuum casting thermal insulation material for max. energy saving.
  • 2000W 
  • 208-240VAC, Single phase, 50/60Hz

  • Frequency:                  2.45 GHz ±25 MHz
  • Power Output:            1400W
  • Microwave leaking:     ≤ 3 mW/cm² at 1 meter away. 
  • One digital power controller is built in to adjust output power from 10 - 100%
 Heating Module and
Processing Tube

  • Ni-Cr-Al wire heating coin  with 80 mm ID is installed inside fibrous alumina module (Pic. 1)
  • The heating coil is placed inside the microwave  chamber
  • 2" quartz tube ( OD 50 x ID 44x L 600 mm) is inserted inside the heating module and microwave chamber to produce plasma (Pic.2)
  •  Pic. 1    Pic. 2
Flanges & Vacuum

  • One pair of vacuum flange is included to seal the quartz tube
    • KF25 vacuum port and 1/4 gas inlet and outlet with needle valves are built-in the flange ( Pic. 1)
  • One digital vacuum gauge is included for vacuum control ( Pic. 2)
  • Max. Vacuum level:  10-2 torr by dry pump and 10-5 torr by turbopump.
  • The pump is not included. Please click Pic. 3 to order separately.  For CVD application,  suggest choosing a dry pump.
Pic. 1  Pic. 2   Pic.3

 Working Temperature

  • Max. 1200ºC <  30 minutes with heating module assisted
  • Min.  800ºC with heating module assisted
  • ≤1100ºC continuous with heating module assisted and Plasma
  • Heating rate:  1 ~20°C / min  programmable
  • ~750ºC   heating by microwave only without temperature control

 Temperature Controller

  • 30 segments programmable for heating rate, dwell temperature and time, and cooling rate
  • SCR temperature control  
  • Over-temperature and thermal couple broken protection
  • Control accuracy  +/-1.0 ºC
  • K-type thermal couple inserted through the flange
Net Weight
  • 30  kg

  • Microwave: 560(L) x 410(W) x 340(H) mm
  • Total depth with tube and flange: 780 mm
  • Controler: 600(L) x 520(W) x 265(H) mm
  • One-year limited warranty with lifetime support. 
  • Consumables, including crucibles, heating elements, and heat insulation materials are not covered by the warranty.
  • ATTENTION: Any damages caused by the use of corrosive and acidic gasses are not under the coverage of MTI One Year Limited Warranty.
  • CE Certified
  • NRTL or CSA certification is available upon request
Operation Video


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