Atmospheric Plasma Beam with Automatic Scanning System for Surface Treatment- GSL1100X-PJF-A

• 40 PSI min.(0.055 Mpa)
• Air, N2, Ar, He or any mixed gas (no flammable and explosive gases)

• Temperature: < 42°C
•  Humidity: ≤ 40% RH
•  No flammable gas

• X-Y two dimensions are driven by step motors and controlled by the SBC control box.
• Z-axis is adjustable by manual
• The control box has an LCD display and the scanning program can be set by the function key
• Max. scanning area: 8" x 9"
• One 4" diameter vacuum chunk is installed on X-Y sample holder, which can soak thin wafer up to 6" diameter on the sample holder firmly
• One vacuum pump is included to connect the vacuum chunk
• The whole system is placed on a heavy-duty mobile cart  (600x600x 800Lmm)
• Optional:  Heating plate up to 500°C can be installed on the movement stage with manufacture modification (available upon request at extra cost). also, it can be placed inside glovebox to operate under inner gas atmosphere or inside a fume hood for harmful gases (see pictures below-right)

                   

• One year limited warranty with lifetime support
• CE certified

Please click the link to learn more about AP-PECVD application: Atmospheric-Pressure Plasma-Enhanced Chemical Vapour Deposition (AP-PE-CVD) For Growth Of Thin Films At Low Temperature.

• Blue Adhesive Plastic Film (PVC) for Vacuum Chuck, EQ-ECO-519-LD