N2 equivalent Mass Flow Controller upto 5000sccm (NO display, Product for Replacement only) - EQ-MFC-7B

Sale Price: For Replacement or Repair Parts Only

Controlling Range:

EQ-MFC-7B is a cost effective MFC for MTI's CVD/PECVD/Graphene furnace to control the gas flowing rate for different research purposes.

MFC are standard calibrated by N2 while it is out of factory, other gas calibration can be approximated by converting of conversion factors of our instruction,
Other gas calibration MFC can be ordered upon request, please email us for the price, the lead time is 8 -10weeks after PO.
Mass Flow Controller for the use in MTI Multiple Channel Gas Control Systems only
Ideal for vacuum coating and other gas mixture applications.
International standard DB15 pin fitting; connects to MTI Furnaces with Swagelok1/4 fitting
Note： This MFC is for replacement of MTI gas mixing and delivery system at related product below. In order to operate it independently, you need order EQ-MFC-COM

Specification

Full scale range (N₂)	( 0～100,200, 500, 1000, 2000, 5000)SCCM Other range can be customized at extra cost, please email to info@mtixtl.com
Accuracy	±1.5% F.S.
Repeatability	±0.2% FS
Linearity	±1% FS
Response Time	≤10sec
Valve Configuration	Normally Closed
Operation Temperature	（5～45）℃
Input Signal	(0～5) VDC
Output Signal	(0～5) VDC
Power Supply	+15V 50mA; -15V 200mA
Electronic Connector	D sub 15 pins male
Differential Pressure	(0.1～0.5) Mpa
Max Pressure	3MPa
Leak integrity	1×10^-8 atm·cc / sec He
Seals Materials	Viton; Neoprene
Fittings	Swagelok1/4”
Weight	1.1kg