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1200C Max. 4" Tube Furnace with Sliding Flange - OTF-1200X-100-SF
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Please call for the delivery time
Item Number: OTF1200XSF4
Transported by LTL Freight (Truck)
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OTF-1200X-100-SF is a compact 4" ID quartz tube furnace with slidable flange with 1200°C Max. working temperature, which is designed for customers to build a DIY CVD system easily.
Specifications
Furnace Structure
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- Split cover with Interlock protection, cut the power if the door open during furnace heating process.
- Please click the picture below for more details:
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| Rated Voltage |
Single Phase, 220V AC, 50/60 Hz, AWG 8# Power cord is included (without plug) |
| Power Consumption |
Max. 3600 W (20 A breaker required) |
Heating Zone |
- Heating zone Length: 440 mm
- Constant temperature zone: 100 mm
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Working Temperature
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- Max heating temperature: 1200°C ( < 30 minutes )
- Continuous working temperature: 200~1100°C
- Max heating & cooling rate: 20°C/min
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Temperature Control
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- Digital controller with PID/self-tuning function and 30 segments programmable
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Thermocouple: K type thermocouple, which is inserted from the right side flange and connected to the temperature controller.
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Control accuracy: +/- 1°C
- Software for PC control furnace is available as optional (click picture below to order)
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Vacuum and Gas Sealing & Flange |
- Right flange:
- Water cooling structure with 12mm quick connector to prevent sealing o-ring from melting (water cooler is not included, please click water chiller to order)
- KF25 vacuum fitting (to the vacuum pump, please click to order a pump, vacuum hose, valve and sealing gasket)
- Slidable to easily and fast push/pull in/out the sample
- One quartz wafer holder ( 3" Dia. max. ) is built in the flange with heating radiation block for CVD growth on a thin substrate
- An anti-corrosive capacitance diaphragm gauge is included
- Left flange with four 1/8'' Swagelok fittings for 1/8'' gas tube:
- Two separate 1/8'' fitting on the flange for any gas into the CVD furnace
- and customized feedthrough is available upon request.
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Net weight
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100kg
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Dimensions
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- Standard: 48"L X 18"W X 23"H
- Maximum: 66"L X 18"W X 32"H (Lid open and right-side flange slided out)
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Warranty
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- One year limited warranty for electrical parts. ( Consumable parts such as processing tubes, O-rings, and etc are not covered by the warranty)
- You may order replacement quartz tube here: EQ-QZTube-RTP
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| Laptop, software & WiFi Control(Optional) |
- Brand new laptop with Microsoft Windows 10 and Microsoft Office 2013 (30 days free trial)
- Labview Based Temperature Control System (EQ-MTS01) enables users to edit temperature profiles, manage heat-treatment recipes, record, and plot data for MTI furnaces.
- A wireless remote control provides up to 300 meters of operating range.
- The above features are available upon request at an extra cost (up to $1,000). Please contact us for more information.
- Note: The software is only compatible with MTI’s Yudian Temperature Controller
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| Compliance |
- CE Certified
- NRTL or CSA or TUV certification is available upon request at extra cost.
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Warning
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- The tube furnaces with quartz tube are designed for use under vacuum and low pressure <0.2 bars / 3 psi / 0.02 Mpa
- Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation. Please click here to learn how to install the gas regulator.
- Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used up to 1000°C
- The flow rate for gasses should be limited to<200 SCCM (or 200ml/min) for reducing thermal shocks to the tube
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Operation Instructions
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