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5" PECVD Split Tube Furnace (1200C Max.) with Vacuum Pump Station - OTF-1200X-5L-PE


4 -6 weeks to delivery for QC
Item Number: OTF1200XPELV5
Transported by LTL Freight (Truck)

Personalization

Upgrade to Eurotherm 3000 series
OTF-1200X-5L-PE is a PE-CVD (Plasma Enhanced Chemical Vapor Deposition) tube furnace system, which consists of 300W RF plasma source, 130ODx122ID, mm quartz tube furnace, and high-quality vacuum pump with a cold trap. The PE-CVD furnace is an ideal and affordable tool to deposit thin films or grow nanowire from a gas state (vapor) up to 4" wafer.
(item number has been updated from OTF-1200X-5L-I-PE since March 2019)

Specifications:
Single Zone 1200°C Split Tube furnace



  • Max 1200ºC, and for 1100ºC continuous heating
  • Programmable precision digital temperature controllers with 30 segments.
  • Heating Zones: 880 mm • Quartz Tube Size: 130 ODx122 IDx2000L mm
  • Input power: 208 – 240V AC input, single phase at max. 7KW.
  • Vacuum sealed flanges are included for immediate use. 
  • Optional:  three-zone furnace with 24" heating zone can be replaced at extra cost ( click Pic 2 to review specs )
  •                  
Plasma RF Power Supply
 
     
  • Output Power:          5 -300W adjustable with ± 1% stability
  • RF frequency:          13.56 MHz ±0.005% stability
  • Reflection Power:     200W max.
  • Matching:                Automatic
  • RF Output Port:       50 Ω, N-type, female
  • Noise:                    <50 dB. 
  • Cooling:                  Air cooling.
  • Power:                   208-240VAC, 50/60Hz
  • Note:                      This RF power supply can accept 50 - 80 mm Max. quartz tube  by changing flange
Pressing Tube 
  • Quartz Tube: 130 ODx122 IDx2000L mm (5"x 79"). included.  Click Pic 1 to order spare
  • 5" SS vacuum flange with valve and K25Vacuum port is included
  • One Anti-corrosive Pressure Gauge is installed on the flange
    • 3.8x10-5 to 1125 Torr measurement range
    • Anti-corrosive, gas-type independent 
    • High accuracy and reproducibility at atmosphere for reliable atmospheric pressure detection
    • Fast atmospheric detection eliminates waiting time and shortens process cycle
    • We provide extra 24V 7Ah batteries pack as a power supply for pressure gauge which is sufficient for 30-40 hrs battery life per charge.
                                    
  Vacuum Pump and valve
 
  • EQ-FYP-Pump is installed inside the heavy-duty mobile cart.
  • One Cold Trap for Recovering Condensables is included
  • KF25 adapter and stainless steel pipe are connected between the pump and tube flange with precision ball valve for user's plug and immediately use.
  • 10E-2 Torr vacuum can be achieved inside the processing tube
  •      
Temperature Controller
  • MET certified 30 programmable segments for precise control of heating rate, cooling rate and dwell time.
  • Built-in PID Auto-Tune function with overheating & broken thermocouple protection.
  • Over-temperature protection and alarm allows for operation without attendant(s).
  • +/- 1 ºC temperature accuracy.
  • RS485 Communications Port.
    • Advanced Temperature Control (Optional)
    • MTS02-Y Temperature control software kit (for YD518P series controllers) + 15" laptop package is available at the options bar. Click for the detail information about the MTS02-Y software kit. 
    • You may upgrade the temperature controller to the Eurotherm 3504 Temperature Controller which is fully compatible with LabVIEW. This package includes a Eurotherm 3504 programmer, a communication cable (RS485 - USB) and a software CD. Click the pic below to view the full spec of Eurotherm 3504 temperature controller. 
  •             


Optionals
                 
Dimensions
  • Furnace: 1100 X 450 x 670 mm
  • Net weight: 220 lbs
  • Shipping weight: 350 lbs
Warranty 
One year limited warranty with lift time support (Consumable parts such as processing tubes, o-rings, and heating elements are not covered by the warranty, please order the replacement at related products below.)
Laptop, software & WiFi Control (Optional)
  • Brand new laptop with Microsoft Window 10 and Microsoft Office 2013 (30 days free trial) for immediate use.
  • Labview Based Temperature Control System (EQ-MTS01) enables a user to edit temperature profile, manage heat-treatment recipe, record and plot data for MTI furnaces.
  • A wireless remote control provides up to 300 meters operating range.
  • Above features are available upon request at an extra cost (up to $1,000). Please contact us for more information.
  • Note: 
    The software is only compatible with MTI’s Yudian Temperature Controller

        



Compliance
  • CE Certified
  • All electric components ( >24V) are UL / MET / CSA certified, not including the gas mixing system, vacuum system, and plasma generator
  • The furnace is ready to  pass TUV(UL61010) or CSA certification at extra cost.( please click marks below to learn details )
              
Operation Instruction

        
Warning

Click here to learn the installation of a gas regulator
  • An operator should Keep safe distance >1 meter away from the Plasma Generator & its furnace chamber when the plasma is activated. The operator shall wear RF protective garments when continues operation at a close distance (< 1 meter) with the plasma is required. 
  • It is highly recommended to shield the furnace in an RF protective fume hood. We recommend you prepare an RF Detector to monitor RF power all the time.
  • The tube furnaces with quartz tube are designed for use under vacuum and low pressure < 0.2 bars / 3 psi / 0.02 MPa
  • Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation. Click here to learn the installation of a gas regulator.
  • Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used up to 1000°C
  • The flow rate for gasses should be limited to<200 SCCM (or 200ml/min) for reducing thermal shocks to the tube
  • MTI reserves right to modify PECVD design at  any time without notice but promise that quality will meet the specifications above
Shipping Dimensions
  • Pallet #1: 48" x 40" x 60", Pallet #2: 48" x 40" x 40", Pallet #3: 48" x 40" x 40",  Pallet #4: 48" x 40" x 40"
Total Shipping Weight 500 kg (1100 lbs)

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Notices
1. Prices listed online are valid for the US market and who pay by credit card only. There will be extra charges for shipping & handling. Prices vary from country to country.
2. We may add extra charges for paper orders and NET 30 terms due to extra labor costs.
3. The prices listed are subject to change without notice.