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5" PECVD Split Tube Furnace (1200C Max.) with Vacuum Pump Station - OTF-1200X-5L-PE
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4 -6 weeks to delivery for QC
Item Number: OTF1200XPELV5
Transported by LTL Freight (Truck)
Personalization
Upgrade to Eurotherm 3000 series
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OTF-1200X-5L-PE is a PE-CVD (Plasma Enhanced Chemical Vapor Deposition) tube furnace system, which consists of 300W RF plasma source, 130ODx122ID, mm quartz tube furnace, and high-quality vacuum pump with a cold trap. The PE-CVD furnace is an ideal and affordable tool to deposit thin films or grow nanowire from a gas state (vapor) up to 4" wafer.
(item number has been updated from OTF-1200X-5L-I-PE since March 2019)
Specifications：
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Single Zone 1200°C Split Tube furnace
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- Max 1200ºC, and for 1100ºC continuous heating
- Programmable precision digital temperature controllers with 30 segments.
- Heating Zones: 880 mm • Quartz Tube Size: 130 ODx122 IDx2000L mm
- Input power: 208 – 240V AC input, single phase at max. 7KW.
- Vacuum sealed flanges are included for immediate use.
- Optional: three-zone furnace with 24" heating zone can be replaced at extra cost ( click Pic 2 to review specs )
 
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Plasma RF Power Supply
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- Output Power: 5 -300W adjustable with ± 1% stability
- RF frequency: 13.56 MHz ±0.005% stability
- Reflection Power: 200W max.
- Matching: Automatic
- RF Output Port: 50 Ω, N-type, female
- Noise: <50 dB.
- Cooling: Air cooling.
- Power: 208-240VAC, 50/60Hz
- Note: This RF power supply can accept 50 - 80 mm Max. quartz tube by changing flange
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Pressing Tube
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- Quartz Tube: 130 ODx122 IDx2000L mm (5"x 79"). included. Click Pic 1 to order spare
- 5" SS vacuum flange with valve and K25Vacuum port is included
- One Anti-corrosive Pressure Gauge is installed on the flange
- 3.8x10-5 to 1125 Torr measurement range
- Anti-corrosive, gas-type independent
- High accuracy and reproducibility at atmosphere for reliable atmospheric pressure detection
- Fast atmospheric detection eliminates waiting time and shortens process cycle
- We provide extra 24V 7Ah batteries pack as a power supply for pressure gauge which is sufficient for 30-40 hrs battery life per charge.
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Vacuum Pump and valve
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- EQ-FYP-Pump is installed inside the heavy-duty mobile cart.
- One Cold Trap for Recovering Condensables is included
- KF25 adapter and stainless steel pipe are connected between the pump and tube flange with precision ball valve for user's plug and immediately use.
- 10E-2 Torr vacuum can be achieved inside the processing tube
  
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Temperature Controller
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- MET certified 30 programmable segments for precise control of heating rate, cooling rate and dwell time.
- Built-in PID Auto-Tune function with overheating & broken thermocouple protection.
- Over-temperature protection and alarm allows for operation without attendant(s).
- +/- 1 ºC temperature accuracy.
- RS485 Communications Port.
- Advanced Temperature Control (Optional)
- MTS02-Y Temperature control software kit (for YD518P series controllers) + 15" laptop package is available at the options bar. Click for the detail information about the MTS02-Y software kit.
- You may upgrade the temperature controller to the Eurotherm 3504 Temperature Controller which is fully compatible with LabVIEW. This package includes a Eurotherm 3504 programmer, a communication cable (RS485 - USB) and a software CD. Click the pic below to view the full spec of Eurotherm 3504 temperature controller.
   
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Optionals |
    
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Dimensions
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- Furnace: 1100 X 450 x 670 mm
- Net weight: 220 lbs
- Shipping weight: 350 lbs
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Warranty
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One year limited warranty with lift time support (Consumable parts such as processing tubes, o-rings, and heating elements are not covered by the warranty, please order the replacement at related products below.) |
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Laptop, software & WiFi Control (Optional)
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Compliance |
- CE Certified
- All electric components ( >24V) are UL / MET / CSA certified, not including the gas mixing system, vacuum system, and plasma generator
- The furnace is ready to pass TUV(UL61010) or CSA certification at extra cost.（ please click marks below to learn details )
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Operation Instruction
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Warning
Click here to learn the installation of a gas regulator
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- An operator should Keep safe distance >1 meter away from the Plasma Generator & its furnace chamber when the plasma is activated. The operator shall wear RF protective garments when continues operation at a close distance (< 1 meter) with the plasma is required.
- It is highly recommended to shield the furnace in an RF protective fume hood. We recommend you prepare an RF Detector to monitor RF power all the time.
- The tube furnaces with quartz tube are designed for use under vacuum and low pressure < 0.2 bars / 3 psi / 0.02 MPa
- Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation. Click here to learn the installation of a gas regulator.
- Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used up to 1000°C
- The flow rate for gasses should be limited to<200 SCCM (or 200ml/min) for reducing thermal shocks to the tube
- MTI reserves right to modify PECVD design at any time without notice but promise that quality will meet the specifications above
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| Shipping Dimensions |
- Pallet #1: 48" x 40" x 60", Pallet #2: 48" x 40" x 40", Pallet #3: 48" x 40" x 40", Pallet #4: 48" x 40" x 40"
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| Total Shipping Weight |
500 kg (1100 lbs) |
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