Browse Categories

5" Rotary Tube Furnace w/ 3 Zones and Gas Delivery System at 1200C Max.- OTF-1200X-III-R5L-LVC4

Please email for lead time
Item Number: OTF1200XIIIR5C4LV
Transported by LTL Freight (Truck)

OTF-1200X-III-R5L-LVC4 is a 5" rotary CVD tube furnace with 3 heating zones and 4 Channel precision gas delivery system. The furnace is designed for coating battery powder both anode and cathode for the next-generation battery
and is a cost-effective intermediate step in the upscaling process from laboratory to production scale.
(Item number has been updated from OTF-1200X-5L-R-CVD since March 2019)

Furnace Construction
  • Double shell casing with three cooling fans
  • High purity Alumina fibrous insulation for max. energy efficiency
  • DC Gear motor drives quartz tube with variable speed 0 - 10 RPM
  • The furnace can be electrically tilted up to 30°
  • The split cover enables faster cooling and easy operation.
  • All electric components are UL or Met recognized and ready to pass any safety test worldwide
Heating Zone length
  • Three zones: (600mm, 24" in total)
    • Zone 1: 150 mm  ( 6")
    • Zone 2: 300mm  ( 12")
    • Zone 3: 150 mm ( 6")
  • Constant temperature zone: 450 mm within +/- 2 ºC if two zones are at the same temperature.
Processing tube & Flange
  • Fused quartz tube (one is included)
  • Dimension:  130 mm O.D. x 120 mm I.D. x 1200 mm L + 60 OD mm (two ends )
    • Click the pics below to see details about the furnace's processing tube
          Four Mixing Blades                         Dimension
  • One pair of 130mm SS sealing flange with needle valves and the rotatable gas connector is included
  • 60 OD straight quartz or SS310 steel tube is available upon request.
Gas Fittings
Inlet Fitting: Elbow Push-in connector for 6mm O.D tube; Outlet Fitting:  Elbow Push-in connector for 12mm O.D tube

Max. Working Temperature

  • 1100°C for continuously

  • 1200°C Max for < 1 hours

Temperature Control

  • Three programable temperature controllers are included  to control three heating zone independently
  •  temperature accuracy:  +/- 1°C 
  • Three Omega K type 3mm OD x 6" L included
  • The touch screen control panel is available upon request at the extra cost ( $600 ), See Pic left
Tube rotating Speed
0 - 10 RPM variable
Furnace tilt angle
0 - 30°
Chamber pressure
10-2 torr
 Production yield
 2 kg per batch
Vacuum and Filters
  • One heavy-duty mechanical vacuum pump  with Exhaust Filter  are  included 
  • One cold vacuum trap is included to avoid CVD contaminating the vacuum pump.
Gas Delivery System

  • Four-channel precision gas mixing and delivery system with Touch Screen  is included for 1-4 kinds of gasses CVD
  • Note:  If using flammable gas in the system,  It must be placed in a fume hood with a suitable gas detector. You must get approved by professional safety personnel.
 4 KW Max
 208 - 240VAC,  single-phase, (30 A Breaker required), 50/60Hz
 Warranty & Certificate One-year limited warranty (consumable parts such as processing tubes, o-rings, and heating elements are not covered by the warranty, replacements are available at related products below.) 
Laptop, software & Control (Optional)
  • Brand new laptop with Microsoft Windows 10 and Microsoft Office 2013 (30 days free trial) for immediate use.
  • Labview Based Temperature Control System (EQ-MTS01) enables users to edit temperature profiles, manage heat-treatment recipes, and record and plot data for MTI furnaces.
  • A wireless remote control provides up to 300 meters of operating range.
  • CE Certified
  • NRTL (UL61010)  or CSA certification is available at extra cost. 
 Furnace dimension

With Lid Open With Lid Closed
Tilt At 0° 34° 34°
Length 60" 60" 60" 60"
Width 35" 35" 24" 24"
Height 66.5" 74" 58" 68"

 Net Weight
   130 kg   
 Shipping Weight &  Dimension
  • 600 lbs
  • 48"x40"x80"
Operation Video


Application Notes
  • The continuous power feeding and processing can be realized by the use of Magnetic Fluid Sealed Swivel Coupling in line with the Volumetric Feeder and Rotary Furnace. Please view the assembling approach diagram and video below.  
  • The tube furnace with quartz tube is designed for use under vacuum and low pressure < 0.2 bars / 3 psi 
  • Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation. Click here to learn about the installation of a gas regulator.
  • Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used up to 1000°C

      Related Products

      Shopping Cart
      Your cart is empty.
      Please clear the browsing history before ordering the product. Otherwise, availability and price are not guaranteed.
      Mailing Lists
      MTI sponsorships:
      MTI Sponsors Thermoelectrics Workshop

      MTI-UCSD Battery Fabrication Lab

      MTI Sponsors the Postdoctoral Awards

      Upcoming Shows:

      Hydrogen Tech Expo June 26-27 Houston TX Booth 567

      Solid-State Battery Summit August 13-15 Chicago IL Booth 36

      2024 MRS Fall Meeting December 1-6 Boston MA Booth 901

      AABC US December 9-12 Las Vegas NV

      Click here to see our past conferences

      1. Prices listed online are valid for the US market and who pay by credit card only. There will be extra charges for shipping & handling. Prices vary from country to country.
      2. We may add extra charges for paper orders and NET 30 terms due to extra labor costs.
      3. The prices listed are subject to change without notice.