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1200°C Max Tube Furnace (3" ID ) w/ Sample Sliding Function Under High Vacuum- OTF-1200X-DVD-M

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Item Number: OTF-1200X-DVD-M
Transported by LTL Freight (Truck)
OTF-1200X-DVD-M is a splittable tubular furnace with a crucible sliding function (manually pushing ) in a high vacuum or air-tight atmosphere, with a maximum temperature of 1200 °C. The vacuum-sealed manual push crucible is actualized by a magnetic coupling vacuum push system. This equipment can carry out titanium sheet annealing treatment, rapid heat treatment, HPCVD, rapid thermal evaporation (RTE), and direct vapor deposition (DVD) in various atmospheres. 

Furnace Features

  • The mobility of crucible in vacuum/atmosphere through magnetic coupling drive.
  • Real-time temperature measurement by a thermocouple at the bottom of the crucible.
  • The flange of the left end is connected with a clamp to reach samples conveniently.
  • High vacuum sealed up to 10-5 torr
  • AC single-phase 220V 50/60HZ
  • 3.5 kW
Working Temperature
Max.                           1200°C (<30 min)
Continuous:                1100°C ( )
Max. Heating Rate:     <= 1°C/min
Temperature Accuracy: +/- 1°C

Heating Zone
400mm Length
You shall measure the furnace temperature profile for your own application before making film growth.
Tube Size
Quartz tube: 100 O.D x 95 I.D x 1000 L (mm)
Temperature Controller
  • Two temperature controllers are included. One is for controlling furnace temperature, and another is for displaying moveable crucible temperature
  • PID automatic control via solid-state relay with 30 steps programmable
  • Built-in Over Temperature and Thermocouple Failure Protection
  • Optional:  The furnace may be operated by PC by installing a control module. Please order an MTS02-B control module at extra cost.
 Vacuum Flanges and
Vacuum Actuator

  • Left side :   
    • 4"  flange with 1/4'' Bard fittings, 1/4'' tube feedthrough port (for 1/4" O.D thermocouple insert), and a KF40 vacuum port to connect a vacuum pump
  • Right side:
    • 4"quick clamping flange with magnetically coupled vacuum actuator 
    • The vacuum actuator rod  will hold a quartz crucible with quartz thermal buffer, which can move in or out a sample in the crucible manually to achieve heating or cooling rapidly
    • K type thermal couple is located  bottom of the crucible to control the temperature
  • Optional:  Electric actuator is available upon request at the extra cost
Vacuum Pump

  • A turbopump is included to connect the left side flange ( Click the picture left to see detailed specs)
  • 10-6 torr max  ( cold state )
Net Weight
130 Kg
One-year limited warranty with lift time support (Consumable parts such as processing tubes and O-rings are not covered by the warranty.
  • CE Certified
  • NRTL or CSA certification is available at extra cost. ( please click marks below to learn details )
Demo Video      

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