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Tube Furnace w/ Hi-Vacuum (1E-4 torr) & 3 Channel Gas Flow Station for CVD - OTF-1200X-HVC3-series

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Item Number: OTF1200XC3HV
Transported by LTL Freight (Truck)


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The OTF-1200X-HVC series furnace workstation consists of an OTF-1200X series tube furnace, a precision mass flow gas control station, a high vacuum station, and other assembling parts. The max. working temperature of this workstation is 1200°C. The ultimate vacuum rate goes to 10^-4 torr (with our sealing assembly provided). The mass flow gas control station mixes three kinds of gas together and allows the mixed gas to flow into a fused quartz tube inside the furnace. It is competent for the experiments as CVD, Diffusion and other thermo-treatments under vacuum status and shielding gas protected.


OTF-1200X series tube furnace

  • Double-layer steel casing with air cooling.
  • Built-in thermostat to control Cooling running automatically when case > 55°C.
Processing Tube
Material: Fused quartz tube
One processing tube is included with the furnace.
Please contact MTI to specify the tube diameter. 
Please select the tube size in the optional bar to update the price.
Thermal block placement
Power 2.5KW
Rated Voltage AC 208-240V Single phase, 50/60Hz
Heating Element Fe-Cr-Al Alloy doped by Mo
Working Temp.
Max. Heating Temp.: 1200°C
Continuous Working Temp.: 1100°C
Heat-up Rate Heat-up rate: 1~20°C/min programmable
Heating Zone Length Total heating zone: 440mm
Constant Temp. Zone: 150mm (±1°C)

Temp. Control
  • PID automatic control with 30 steps programmable segments.
  • Temperature accuracy: ±1°C
  • Thermocouple: K type built inside the furnace

Vacuum Seal
  • One pair of stainless steel vacuum flange with:
    •  one mechanical pressure gauge
    •  two needle valves 
    • one KF-25 connector for the high vacuum station.
Power 100~110W
Rated Voltage AC 208-240V Single Phase, 50/60Hz

High Vacuum Station

Mobile cart size:  600 (L) x 600 (W) x 700(H), mm
Max. Loading:       600 Lbs on top
Molecular pump control Panel:   LCD digital
Inside:   Pfeiffer vacuum pump  made in Germany
Vacuum sensor is included

Volume Flow Rate
Nitrogen   N2     33 L/s
Helium      He     39 L/s   (2340L/minute)
Hydrogen H2   32 L/s
Working Range From 1000 mbar to <1E-7 mbar
Ultimate Pressure <1E-8 mbar (without any leaking )

Mass Flow Gas Control

Made of 316 stainless steel valve
Gas mixing tank: Φ80X120mm  
600mm(L) x 745mm(W) x 700mm(H)
6" color touch screen control panel to make parameter setting at easy.
Touchscreen Control and PC remote switchable.
Power 23W per channel
Rated Voltage AC 220V/50Hz Single phase
Temperature Controller
  • FA-YD518P-AG temperature controller is included.
  • Proportional–integral–derivative control (PID control) and auto-tune function
  • 30 segments programmed with ramping, cooling and dwelling steps
  • Built-in over-temperature alarm and thermocouple failure alarm
  • +/- 1 ºC temperature control accuracy
  • Default DB9 PC communication port
Temperature controller (optional)

  • MTS02-Y Temperature control software kit (for YD518P series controllers) + 15" laptop package is available at the options bar. Click for detailed information about the MTS02-Y software kit. 
  • You may upgrade the temperature controller to the Eurotherm 3504 Temperature Controller which is fully compatible with LabVIEW. This package includes a Eurotherm 3504 programmer, a communication cable (RS485 - USB), and a software CD. Click the pic below to view the full spec of Eurotherm 3004 temperature controller.     

Click here to learn the installation of a gas regulator
  • The tube furnaces with quartz tube are designed for use under vacuum and low pressure < 0.2 bars 
  • Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation. Click here to learn the installation of a gas regulator.
  • The flow rate for gases should be limited to < 200 ml/min for reducing thermal shocks to the tube
  • Vacuum pressures may only be safely used up to 1000°C 
Warranty One year limited warranty with lifetime support (Consumable parts such as processing tubes, O-rings are not covered by the warranty, please order replacements at related products below.)

  • CE Certified
  • NRTL or CSA certification is available upon request at extra cost.    
Operation Instructions

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2. We may add extra charges for paper orders and NET 30 terms due to extra labor costs.
3. The prices listed are subject to change without notice.